JPS5879786A - Carbonic acid gas laser device - Google Patents

Carbonic acid gas laser device

Info

Publication number
JPS5879786A
JPS5879786A JP17865981A JP17865981A JPS5879786A JP S5879786 A JPS5879786 A JP S5879786A JP 17865981 A JP17865981 A JP 17865981A JP 17865981 A JP17865981 A JP 17865981A JP S5879786 A JPS5879786 A JP S5879786A
Authority
JP
Japan
Prior art keywords
cooling pipe
gas
discharge tube
laser device
pro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17865981A
Other languages
Japanese (ja)
Inventor
Shigeo Shiono
塩野 繁男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17865981A priority Critical patent/JPS5879786A/en
Publication of JPS5879786A publication Critical patent/JPS5879786A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • H01S3/036Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)

Abstract

PURPOSE:To obtain the carbonic acid gas laser device with a blower motor causing no eccentricity by each mounting impellers at both ends of the shaft of the blower motor and circulating a gas medium. CONSTITUTION:The carbonic acid gas laser device is formed by a discharge tube 1, a gas cooling tube 2 connected to the discharge tube 1 and the blower motor 4, which is connected and mounted to the gas cooling tube and circulates the gas media 3a, 3b into the discharge tube 1 and the gas cooling tube 2. The impellers 8a, 8b are set up at both ends of the shaft 7 of the blower motor 4, and the gas media 3a, 3b are circulated. Accordingly, load is balanced, the eccentricity of the shaft 7 of the blower motor 4 is removed, and th damage of bearings 13 can be prevented.

Description

【発明の詳細な説明】 本発明は炭酸ガスレーザ装置に係り、特にガス媒体を循
環させるプロアモータを有する炭酸ガスレーザ装置に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a carbon dioxide laser device, and more particularly to a carbon dioxide laser device having a pro-a-motor for circulating a gas medium.

炭酸ガスレーザ装置は周知のようにレーザ放電管(以下
、放電管と称す)と、この放電管に接続されたガス冷却
管と、このガス冷却管に連結して設けられ、放電管およ
びガス冷却管内にガス媒体を循環させるプロアモータと
から形成されている。
As is well known, a carbon dioxide laser device includes a laser discharge tube (hereinafter referred to as a discharge tube), a gas cooling tube connected to the discharge tube, and a gas cooling tube connected to the discharge tube. and a pro-a-motor that circulates the gas medium.

このガス冷却管は一般に放電管に接続された左右の冷却
管、中央冷却管およびこれら左右の冷却管と中央冷却管
とを連結する共通冷却管から構成されている。そしてプ
ロアモータには軸の一方端にインペラが取り付けられ1
.このインペラが取り付けられたプロアモータは左右の
冷却管と共通冷却管との間に夫々1台ずつ設置され、ガ
ス媒体を循環している。すなわち左の冷却管を通ったガ
ス媒体は、インペラ付プロアモータ、共通冷却管、中央
冷却管、放電管および左の冷却管内を循環し、右の冷却
管を通ったガス媒体は1.同様にインペラ付ブロアモー
タ、共通冷却管、中央冷却管、放電管および右の冷却管
内を循環している。
This gas cooling pipe generally includes left and right cooling pipes connected to the discharge tube, a central cooling pipe, and a common cooling pipe connecting these left and right cooling pipes and the central cooling pipe. And the impeller is attached to one end of the shaft of the pro motor.
.. One proar motor to which this impeller is attached is installed between the left and right cooling pipes and the common cooling pipe, and circulates the gas medium. That is, the gas medium passing through the left cooling pipe circulates through the promotor with impeller, the common cooling pipe, the central cooling pipe, the discharge tube, and the left cooling pipe, and the gas medium passing through the right cooling pipe circulates through 1. Similarly, it circulates within the blower motor with impeller, common cooling pipe, central cooling pipe, discharge tube, and right cooling pipe.

このように形成された炭酸ガスレーザ装置では、放電管
内のガス媒体の流速を約100〜200m/(8)の高
速流で流す必要があシ、これをインベラ付プロアモータ
で流しているが、インペラがプロアモータの軸の片側に
、しか取シ付けてないので、インペラの高速回転に伴っ
てプロアモータの頭がふれて軸が偏心し、軸受に無理が
かかり、軸受の損傷が著しかった。またプロアモータを
2台使用しているが、夫々のプロアモータの送風量を同
じにすることが難しく、このため放電管内で送風量の違
いによるアーク放電の発生する懸念があり、かつ部品件
数も多かった。
In the carbon dioxide laser device formed in this way, it is necessary to flow the gas medium in the discharge tube at a high speed of about 100 to 200 m/(8), and this is flowed by a promotor with an impeller. Since the pro-ar motor was only attached to one side of the shaft, the head of the pro-ar motor moved as the impeller rotated at high speed, causing the shaft to become eccentric, putting strain on the bearing, and causing significant damage to the bearing. In addition, although two pro-ar motors are used, it is difficult to make the air volume of each pro-a motor the same, so there is a concern that arc discharge may occur in the discharge tube due to the difference in air volume, and there are also many parts involved. .

本発明は以上の点に鑑みなされたものであり。The present invention has been made in view of the above points.

その目的とするところは、偏心のないプロアモータを有
する炭酸ガスレーザ装置を提供するにある。
The object thereof is to provide a carbon dioxide laser device having a pro-a-motor without eccentricity.

すなわち本発明は、プロアモータの軸の両端に夫々イン
ペラを設けてガス媒体を循環させるようにしたことを特
徴とするものである。
That is, the present invention is characterized in that impellers are provided at both ends of the shaft of the promotor to circulate the gas medium.

以下1図示した実施例に基づいて本発明を説明する。第
1図および第2図には本発明の一実施例が示されている
。炭酸ガスレーザ装置は放電管1と、この放電管1に接
続されたガス冷却管2と、このガス冷却管2に連結して
設けられ、放電管1およびガス冷却管2内にガス媒体3
a、3bを循環させるプロアモータ4とから形成されて
いる。
The present invention will be explained below based on an embodiment shown in one figure. An embodiment of the invention is shown in FIGS. 1 and 2. FIG. The carbon dioxide laser device is provided with a discharge tube 1, a gas cooling tube 2 connected to the discharge tube 1, and a gas medium 3 in the discharge tube 1 and the gas cooling tube 2.
It is formed from a pro-a-motor 4 that circulates the motors a and 3b.

放電管1には図中にプラス+、マイナス−の符号が付し
であるようにグロー放電を発生させるための対向電極と
、放電管1内でグロー放電によって発生したレーザ光を
図中に点線で示しておるように往復反射させ、その一部
を取り出すための反射鏡5、全反射鏡5aおよび出力鏡
5bが設けられている。この放電管1内にガス媒体3a
、3bを循環させるガス冷却管2は、放電管1の軸方向
端部近傍に夫々接続された左右の冷却管2a、2bと、
軸方向中央部に設けられた中央冷却管2Cと、これら左
右の冷却管2a、2bと中央冷却管2Cとを連結する共
通冷却管2dとから構成されており、左右の冷却管2a
、2bと中央冷却管2Cとには循環するガス媒体3a、
3bを冷却するための冷却部6が設けである。このよう
に構成されたレーザ装置におけるガス媒体3a、3bの
循環を、本実施例ではプロアモータ4の軸70両端にイ
ンペラ8a*8bを設けて循環させるようにした。
The discharge tube 1 has opposing electrodes for generating glow discharge, as indicated by the plus + and minus signs in the figure, and the laser light generated by the glow discharge inside the discharge tube 1 is indicated by the dotted line in the figure. As shown in , a reflecting mirror 5, a total reflecting mirror 5a, and an output mirror 5b are provided for reciprocating reflection and taking out a part of the reflected light. A gas medium 3a is placed inside this discharge tube 1.
, 3b, the left and right cooling pipes 2a, 2b are respectively connected near the axial ends of the discharge tube 1.
It is composed of a central cooling pipe 2C provided at the center in the axial direction, and a common cooling pipe 2d that connects these left and right cooling pipes 2a, 2b and the central cooling pipe 2C.
, 2b and the central cooling pipe 2C have a circulating gas medium 3a,
A cooling section 6 is provided for cooling the 3b. In this embodiment, impellers 8a*8b are provided at both ends of the shaft 70 of the pro-ar motor 4 to circulate the gas media 3a and 3b in the laser device configured as described above.

そしてプロアモータ4は、共通冷却管2dと中央冷却管
2Cとの間に設けた。すなわちプロアモータ4の軸70
両端にインペラf3a、gbを夫々挿入して取り付ける
。この取り付けの終ったインペラ8a、8bの外周に、
インペラ8a、8bを覆ってインペラケースga、gb
を設け、このインペラケース9a、9bとプロアモータ
40ケース10とを一体に結合する。そしてこの一体に
なったインペラ8a、8bの付いたプロアモータ4を、
インペラケース9a、9bのフランジ部11a。
The pro-armotor 4 was provided between the common cooling pipe 2d and the central cooling pipe 2C. In other words, the shaft 70 of the pro motor 4
Insert and attach impellers f3a and gb to both ends, respectively. On the outer periphery of the impellers 8a and 8b after this installation,
Impeller cases ga and gb cover impellers 8a and 8b.
are provided, and the impeller cases 9a, 9b and the pro-armotor 40 case 10 are integrally coupled. Then, the pro motor 4 with the integrated impellers 8a and 8b is
Flange portions 11a of impeller cases 9a and 9b.

11b、IICを介して共通冷却管2dおよび中央冷却
管2C(第2図では図示せず)と夫々フランジ結合する
。なお同図で12はプロアモータの固定子巻線、13は
軸受、14a、14bはインペラ8a、8bのキャップ
である。
11b and flange-connected to the common cooling pipe 2d and the central cooling pipe 2C (not shown in FIG. 2) via IIC, respectively. In the figure, 12 is a stator winding of the pro-ar motor, 13 is a bearing, and 14a and 14b are caps for the impellers 8a and 8b.

この構成によれば、共通冷却管2dからインペラ8a、
8bを介してプロアモータ4に導入してきたガス媒体3
a、3bは、図中に実線の矢印で示されているようにプ
ロアモータ4から中央冷却管2C内に流れ、中央冷却管
2Cから放電管1、左右冷却管2a、 2b内を循環す
るが、プロアモータ4の軸7の両端にインペラ9a、f
3bをとりつけたので、従来のような片持ち荷重でなく
なって荷重が平衡し、プロアモータ4の軸7の偏心がな
くなり、軸受13の損傷を防止することができる。そし
て1台のプロアモータ4でガス媒体3a。
According to this configuration, from the common cooling pipe 2d to the impeller 8a,
The gas medium 3 introduced into the pro-armotor 4 via 8b
a and 3b flow from the pro-armotor 4 into the central cooling pipe 2C as shown by solid arrows in the figure, and circulate from the central cooling pipe 2C through the discharge tube 1 and the left and right cooling pipes 2a and 2b. Impellers 9a and 9f are installed at both ends of the shaft 7 of the pro motor 4.
3b, the load is balanced instead of being a cantilever load as in the conventional case, the eccentricity of the shaft 7 of the pro-ar motor 4 is eliminated, and damage to the bearing 13 can be prevented. Then, one promotor 4 serves as a gas medium 3a.

3bを循環するようにしたので、送風量が同じ罠なって
送風量の違いによるアーク放電発生の懸念を防止するこ
とができ、かつ部品件数の低減を図ることができる。そ
してまたプロアモータ4を共通冷却管2dと中央冷却管
2Cとの間に設けたので、フランジlla、llb、I
ICで取シ付け、取り外しができるようになって、プロ
アモータの取シ付け、取シ外しを容易にすることができ
る。
3b circulates, it is possible to prevent the risk of arc discharge occurring due to a difference in the amount of air being blown due to the same amount of air being blown, and it is possible to reduce the number of parts. Also, since the pro motor 4 is provided between the common cooling pipe 2d and the central cooling pipe 2C, the flanges lla, llb, I
Since the IC can be used for installation and removal, it is possible to easily install and remove the pro motor.

上述のように本発明は、プロアモータの軸の両端に夫々
インペラを設けてガス媒体を循環させるようにしたので
、従来のような片持荷重でなくなって、両持ち荷重とな
って軸の偏心がなくなり、偏心のないプロアモータを有
する炭酸ガスレーザ装置を得ることができる。
As described above, in the present invention, impellers are provided at both ends of the shaft of the pro-armotor to circulate the gas medium, so the load is no longer a cantilever load as in the past, but is now a double-end load, which prevents eccentricity of the shaft. Therefore, a carbon dioxide laser device having a pro-a-motor without eccentricity can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の炭酸ガスレーザ装置の一実施例の縦断
側面図、第2図は第1図のP枠部の拡大図である。 1・・・レーザ放電管、2・・・ガス冷却管、2a−、
・・左冷却管、2b・・・右冷却管、2C・・・中央冷
却管、2d・・・共通冷却管、3a、3b・・・ガス媒
体、4・・・プロ(ほか1名) 第 l 図 第2図
FIG. 1 is a longitudinal sectional side view of an embodiment of the carbon dioxide laser device of the present invention, and FIG. 2 is an enlarged view of the P frame portion of FIG. 1. 1... Laser discharge tube, 2... Gas cooling tube, 2a-,
...Left cooling pipe, 2b...Right cooling pipe, 2C...Central cooling pipe, 2d...Common cooling pipe, 3a, 3b...Gas medium, 4...Pro (1 other person) No. l Figure 2

Claims (1)

【特許請求の範囲】 1、レーザ放電管、とのレーザ放電管の中間および左右
端と連通ずる中央冷却管および左右冷却管とこれらの中
央冷却管および左右冷却管の1端と連通ずる共通冷却管
とから成るガス冷却管、上記ガス冷却管に設けたプロア
モータによって、上記レーザ放電管と上記ガス冷却管と
の間にガス媒体を循環冷却するものにおいて、上記プロ
アモータの軸の両端に夫々インペラを設けてガス媒体を
循環させることを特徴とする炭酸ガスレーザ装置。 2、前記プロアモータは、前記共通冷却管と前記中央冷
却管との間に設けることを特徴とする特許請求の範囲第
1項記載の炭酸ガスレーザ装置。
[Scope of Claims] 1. A laser discharge tube, a central cooling pipe and left and right cooling pipes communicating with the middle and left and right ends of the laser discharge tube, and a common cooling pipe communicating with one end of the central cooling pipe and the left and right cooling pipes. A gas cooling pipe consisting of a tube, and a proar motor provided in the gas cooling pipe circulates and cools a gas medium between the laser discharge tube and the gas cooling pipe, and an impeller is provided at each end of the shaft of the proarmotor. A carbon dioxide laser device characterized in that a gas medium is circulated through the use of a carbon dioxide laser device. 2. The carbon dioxide laser device according to claim 1, wherein the pro-a-motor is provided between the common cooling pipe and the central cooling pipe.
JP17865981A 1981-11-06 1981-11-06 Carbonic acid gas laser device Pending JPS5879786A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17865981A JPS5879786A (en) 1981-11-06 1981-11-06 Carbonic acid gas laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17865981A JPS5879786A (en) 1981-11-06 1981-11-06 Carbonic acid gas laser device

Publications (1)

Publication Number Publication Date
JPS5879786A true JPS5879786A (en) 1983-05-13

Family

ID=16052320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17865981A Pending JPS5879786A (en) 1981-11-06 1981-11-06 Carbonic acid gas laser device

Country Status (1)

Country Link
JP (1) JPS5879786A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH022697A (en) * 1988-06-16 1990-01-08 Fanuc Ltd Laser oscillator
JPH022695A (en) * 1988-06-16 1990-01-08 Fanuc Ltd Laser oscillator
JPH025585A (en) * 1988-06-24 1990-01-10 Fanuc Ltd Laser oscillator
JPH02222586A (en) * 1989-02-23 1990-09-05 Fanuc Ltd Turbo blower for laser and laser oscillation device
EP0411134A1 (en) * 1988-12-21 1991-02-06 Fanuc Ltd. Turbo-blower for laser and laser oscillator using the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH022697A (en) * 1988-06-16 1990-01-08 Fanuc Ltd Laser oscillator
JPH022695A (en) * 1988-06-16 1990-01-08 Fanuc Ltd Laser oscillator
JPH025585A (en) * 1988-06-24 1990-01-10 Fanuc Ltd Laser oscillator
EP0411134A1 (en) * 1988-12-21 1991-02-06 Fanuc Ltd. Turbo-blower for laser and laser oscillator using the same
JPH02222586A (en) * 1989-02-23 1990-09-05 Fanuc Ltd Turbo blower for laser and laser oscillation device

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