JPS5879733U - automatic developing machine - Google Patents
automatic developing machineInfo
- Publication number
- JPS5879733U JPS5879733U JP17577681U JP17577681U JPS5879733U JP S5879733 U JPS5879733 U JP S5879733U JP 17577681 U JP17577681 U JP 17577681U JP 17577681 U JP17577681 U JP 17577681U JP S5879733 U JPS5879733 U JP S5879733U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- rotating shaft
- automatic developing
- developing machine
- seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の自動現像器の主要部の構成を概略的に示
す縦断側面図、第２図は本考案の一実施例を概略的に示
す縦断側面図、第３図は第２図の一部拡大図である。
ｅ・・・現像液、ｅ′・・・現像廃液、ｋ・・・気体（
空気）、１・・・真空チャック、５・・・回転軸、６・
・・被現像物、９・・・真空吸引路、１１・・・真空チ
ャンバ、１２・・・上真空シール、１３・・・下真空シ
ール、１７・・・シール部材、２２・・・現像廃液浸入
防止用シール装置、１７ａ・・・軸貫通孔。
第３図
１１FIG. 1 is a vertical side view schematically showing the configuration of the main parts of a conventional automatic developing device, FIG. 2 is a vertical side view schematically showing an embodiment of the present invention, and FIG. 3 is the same as that shown in FIG. This is a partially enlarged view. e...Developer, e'...Developer waste, k...Gas (
Air), 1... Vacuum chuck, 5... Rotating shaft, 6...
...Object to be developed, 9...Vacuum suction path, 11...Vacuum chamber, 12...Upper vacuum seal, 13...Lower vacuum seal, 17...Seal member, 22...Development waste liquid Seal device for preventing intrusion, 17a... shaft through hole. Figure 3 11
Claims (1)
を真空吸着し、被現像物を回転させながら被現像物に現
像液を供給することにより現像するもので、上記真空チ
ャックの吸着部に一端を、また他端を真空チャンバにそ
れぞれ連通する真空吸引路を上記回転軸の軸心に沿って
形成することにより被現像物の真空吸着作用を行なわせ
る構成の自動現像機において、上記真空チャンバの回転
軸貫通部をシールする上下２つの真空シールのうち、上
方の真空シールの上側に回転軸の周面に沿って上方に気
体を吹出して回転軸を伝って流下する現像廃液の真空チ
ャンバ内への浸入を防止する現像廃液浸入防止用シール
装置を設けたことを特徴とする自動現像機。The object to be developed is vacuum-adsorbed to a vacuum chuck attached to the upper end of the rotating shaft, and development is carried out by supplying a developer to the object while rotating the object. In an automatic developing machine configured to perform vacuum suction of the object to be developed by forming a vacuum suction path along the axis of the rotating shaft, the vacuum suction path communicating with the vacuum chamber at one end and the other end, the vacuum chamber Of the two vacuum seals, upper and lower, that seal the passage through the rotating shaft, gas is blown upward along the circumferential surface of the rotating shaft onto the upper side of the upper vacuum seal, and the developer waste flows down the rotating shaft into the vacuum chamber. An automatic developing machine characterized by being equipped with a sealing device for preventing developer waste from entering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17577681U JPS5879733U (en) | 1981-11-26 | 1981-11-26 | automatic developing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17577681U JPS5879733U (en) | 1981-11-26 | 1981-11-26 | automatic developing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5879733U true JPS5879733U (en) | 1983-05-30 |
| JPH0224126Y2 JPH0224126Y2 (en) | 1990-07-02 |
Family
ID=29968305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17577681U Granted JPS5879733U (en) | 1981-11-26 | 1981-11-26 | automatic developing machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5879733U (en) |
-
1981
- 1981-11-26 JP JP17577681U patent/JPS5879733U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0224126Y2 (en) | 1990-07-02 |
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