JPS5870386U - Packaging containers for photo masks - Google Patents

Packaging containers for photo masks

Info

Publication number
JPS5870386U
JPS5870386U JP1981164971U JP16497181U JPS5870386U JP S5870386 U JPS5870386 U JP S5870386U JP 1981164971 U JP1981164971 U JP 1981164971U JP 16497181 U JP16497181 U JP 16497181U JP S5870386 U JPS5870386 U JP S5870386U
Authority
JP
Japan
Prior art keywords
packaging containers
photo masks
case
protrusions
masks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1981164971U
Other languages
Japanese (ja)
Inventor
増本　邦男
近藤　攻
Original Assignee
コニカ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コニカ株式会社 filed Critical コニカ株式会社
Priority to JP1981164971U priority Critical patent/JPS5870386U/en
Publication of JPS5870386U publication Critical patent/JPS5870386U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の包装容器の側面図、第２図は本考案包装
容器の下蓋を示す斜視図、第３図は本考案包装容器の側
面図で、第４図はその一部立面図、第５図は他の実施例
を示す一部立面図である。Figure 1 is a side view of a conventional packaging container, Figure 2 is a perspective view showing the lower lid of the packaging container of the present invention, Figure 3 is a side view of the packaging container of the present invention, and Figure 4 is a partial elevation view of the packaging container. FIG. 5 is a partial elevational view showing another embodiment.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウェハーやフォトマスクを収納するケースにおいて、ケ
ースの上蓋・下蓋の夫々に保合突起を突出せしめ、この
係合突起にスライド式係合部材を係止することを特徴と
するフォトマスク用包材容器。A packaging material for a photomask, in a case for storing wafers and photomasks, characterized in that retaining protrusions are projected from each of the upper and lower lids of the case, and a sliding engagement member is engaged with the engagement protrusions. container.
JP1981164971U 1981-11-04 1981-11-04 Packaging containers for photo masks Pending JPS5870386U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981164971U JPS5870386U (en) 1981-11-04 1981-11-04 Packaging containers for photo masks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981164971U JPS5870386U (en) 1981-11-04 1981-11-04 Packaging containers for photo masks

Publications (1)

Publication Number Publication Date
JPS5870386U true JPS5870386U (en) 1983-05-13

Family

ID=29957182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981164971U Pending JPS5870386U (en) 1981-11-04 1981-11-04 Packaging containers for photo masks

Country Status (1)

Country Link
JP (1) JPS5870386U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140651U (en) * 1987-03-05 1988-09-16
JP2010079109A (en) * 2008-09-27 2010-04-08 Hoya Corp Container for housing mask blank, method of housing mask blank, and mask blank package

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4721126U (en) * 1971-02-19 1972-11-09
JPS5227402B1 (en) * 1971-05-04 1977-07-20
JPS52113881A (en) * 1976-03-18 1977-09-24 Fluoroware Inc Siliconeewafer transporting container
JPS5311121U (en) * 1976-07-12 1978-01-30

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4721126U (en) * 1971-02-19 1972-11-09
JPS5227402B1 (en) * 1971-05-04 1977-07-20
JPS52113881A (en) * 1976-03-18 1977-09-24 Fluoroware Inc Siliconeewafer transporting container
JPS5311121U (en) * 1976-07-12 1978-01-30

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140651U (en) * 1987-03-05 1988-09-16
JP2010079109A (en) * 2008-09-27 2010-04-08 Hoya Corp Container for housing mask blank, method of housing mask blank, and mask blank package

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