JPS5868603A - Projecting machine - Google Patents

Abstract

PURPOSE:To make the device compact and to facilitate the quick inspection of projection, by utilizing zoom type lenses for the converging lens in a illuminating device and the projecting lens in an expansion projecting device. CONSTITUTION:A work on a mounting table 2 is illuminated by the illuminating device 1, and the transmitted light or the reflected light from the work configuration is formed on a screen 4 through the expansion projecting device 3. The converging lens 5 of said illuminating device 1 and the projecting lens 6 of the expansion projecting device are made to be the zoom type lenses, respectively. A tuning device is provided for matching the illuminating range of the converging lens 5 of the illuminating device 1 with the projection magnification of the projecting lens 6 of the expansion projecting device 3.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement of a projection inspection machine for inspecting cutting edges of machine tools, gears, etc. by enlarging projection.

Conventionally, as shown in FIG. 1, a workpiece table B for placing a workpiece on a light source, and an illumination device C that includes a condenser lens and illuminates the workpiece on the workpiece table B have been used. There is a projection inspection machine that has a projection device E that includes a projection lens and enlarges and images the shape of the workpiece onto a surface D using reflected light or transmitted light from the workpiece.

In such a conventional projection inspection machine, when changing the magnification of the image of the workpiece formed on the screen 1, C1 is changed by replacing the projection lens of the projection 1ii11E.
For example, the magnification is changed stepwise, such as 5.10 times, 20.50 times, etc.

However, with such a magnification switching structure, the set magnification is fixed, so fT cannot obtain the desired magnification, and moreover, it is necessary to change the projection lens and adjust the illumination device C to match the set magnification of the projection lens. The process is complicated, and historically, the projection device's
Q shadow lenses must be provided in accordance with the number of switching magnifications, and the configuration of the switching 4AH becomes complicated, resulting in a problem that the entire structure becomes a nuisance.

This invention was made in view of the problems of the conventional art, and it is possible to obtain an arbitrary magnification and easily obtain the optimum irradiation range of the illumination system according to the magnification. The purpose is to provide a projector.

The present invention provides a projector in which a workpiece on a stage is illuminated by an illumination device, and the shape of the workpiece by transmitted light or reflected light is imaged on a screen L via an enlarged projection device. The condensing lens and the projection lens of the enlarged projection @ Mongolia are zoom type lenses, and a tuning device is provided to make the illumination range of the condensing lens of the illumination device correspond to the projection magnification of the projection lens of the enlarged projection device. This achieves the above objective.

According to the present invention, in the projector, the tuning device -
is configured by a magnification setting device, an actuator that drives the projection lens based on the magnification signal from the magnification setting device, and an actuator that drives the IT lens based on the magnification signal. It accomplishes its purpose.

Further, in the projector, the tuning device is attached to one of the projection lens or the condensing lens and includes a detection device for detecting an enlargement magnification or an illumination range, and a detection signal of the detection device, The above object is achieved by comprising an actuator that drives the other of the projection lens or the condensing lens and sets the illumination range or magnification magnification corresponding to the detected magnification magnification or illumination range.

Further, in the projector, the tuning device includes a magnification setting device, an actuator for driving one of the projection lens or the condensing lens based on a magnification signal from the magnification setting device; A detection device is attached to a projection lens or a condensing lens driven by an actuator and detects its magnification or illumination range, and the other of said condensing lens or projection lens is driven based on a detection signal from this detection device. , and an actuator that sets the illumination range or magnification corresponding to the detected @ rate or illumination range, thereby achieving the above object.

Further, in the projector, the actuator is provided with a comparator that compares a detection signal of a magnification or illumination range detection device attached to a projection lens or a condensing lens that drives the actuator with a reference signal, and then feeds back a correction signal. The above object is achieved through control by controlling.

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 2 is an optical system layout diagram, including a partial block diagram, of an embodiment of the projector according to the present invention.

In this embodiment, as shown in the figure, a workpiece on a stage 20 is irradiated by an illumination device 1, and the shape of the workpiece by the transmitted light or reflected light is imaged on a C screen 4 via an enlarged projection device 3. In the projector, the condenser lens 5 of the illumination device 1 and the projection lens 6 of the enlarged projection device 13 are each zoom type lenses, and
1. Correlating the illumination range of the condenser lens 5 of the illumination 11111 with the projection magnification of the projection lens 6 of the enlargement projection device H3.
The system is equipped with M1 lecture equipment M7. Reference numeral 8 in the figure indicates a light source.

As shown in FIG. 3, the condensing lens 5 has a gear 9 coaxially integrated with the outside of a rotating lens barrel 5A that drives the movable lens.

The gear 9 meshes with a driving gear 13 attached to the output shaft of the motor 11 via the idle gear 10, so that the rotating mirror 115A is driven by the lever 11.

Further, a slit disk 14 that rotates integrally with the rotating mirror 115A is attached to the rotating mirror 115A. This slit disk 14 has an optical grating arranged around its circumference,
The light emitting element 15 and the light receiving element 16 provided on the optical grating of the slit disk 14 constitute a photoelectric transmission type one-coatary encoder, and this rotary encoder determines the rotational position of the rotating lens barrel 5A. The illumination range by the condensing lens 5 is detected. The reference numeral 5B in the figure is the fixed l of the zoom type condensing lens 5.
! Indicates im.

Further, as shown in FIG. 4, the rotary lens barrel 6A of the projection lens 6 also has teeth I1 as in the case of the condenser lens 5.
17, and a slit disk 18 are provided, and the teeth 117 mesh with a driving tooth medium 22 attached to the output shaft 21 of the motor 20 through the idle gear 19, so that the rotating lens barrel 6Δ is driven by the motor 20. It looks like this.

Further, the slit disk 18 constitutes a photoelectric transmission type rotary encoder between the light emitting element 23 and the light receiving element 24, whereby the rotation 1116A is rotated 1.
The M degree is detected, and based on this, the projection magnification of the projection lens 6 is detected. In the figure, reference numeral 6B indicates a fixed lens barrel, and 6C indicates a reflected illumination light receiving section.

The ml device 7, as shown in FIG.
an amplifier 26 that amplifies a control signal from 5 and outputs it to the motor 11; and the condenser lens 5 that includes the motor 11.
a driving device @ 27 for driving the rotation 111115A of the projection lens 6; an amplifier 2 for amplifying the control signal from the central processing unit 25 and outputting it to the motor 20; A drive device 29 for driving the lens barrel 6A, the slit disk 14, and the light emitting element 1
5 and a rotary encoder 30 including a light receiving element 16
a comparator 31 that compares the output signal from the rotary 1 encoder 30 with a reference signal from the central processing unit 25 and outputs it to the central processing unit 25; and the slit disk 18, the light emitting element 23, and the light receiving element. 24, and a comparator 33 that compares the output signal from the rotary encoder 32 with the 11 quasi-signal from the central processing unit [25] and outputs it to the central processing unit i25.
and a display 34 for displaying the magnification set by the magnification setting device 17 based on the signal from the central processing unit N25.

The central processing unit 25 in the tuning device 7 controls the drive device 29 to drive the rotation tltm6A of the projection lens 6 based on the set magnification command signal from the magnification setting device 17, and sets the magnification to the commanded magnification.'' At the same time, the driving device 27 is controlled via the amplifier 26 in parallel, thereby setting the illumination range of the condenser lens 5 to correspond to the magnification of the projection lens 6.

Here, the detection signals from the rotary encoders 32 and 30 reach the central processing unit 25 via the comparators 33 and 31, and the central processing unit 125 further outputs control signals to the motors 20 and 11 based on the detection signals, Feedback control is performed.

In this embodiment, when a magnification factor is commanded by the magnification setting device 17, the projection lens 6 and the condenser lens 5 are synchronously set to obtain the desired magnification magnification and the illumination range corresponding to this magnification magnification. Therefore, there is an advantage that projection inspection work etc. can be performed quickly and easily.

Furthermore, if the magnification factor and the corresponding illumination range are set by operating the magnification setting device 17 while viewing the magnification display on the display 34, projection inspection work, etc. can be made easier and faster. can do.

In the above embodiment, the illumination range of the condenser lens 5 in the illumination device 1 and the magnification of the projection lens 6 in the enlargement projection device 3 are set simultaneously by the magnification setting device 17, but the condenser lens 5 The illumination range and the magnification of the projection lens 6 may be set so that one follows the other, or the magnification or the illumination range of one may be set by manual operation.

Therefore, the present invention may be constructed as in the second to fourth embodiments shown in FIGS. 5 to 7.

FIG. 5 is an optical system layout diagram similar to FIG. 1, showing a second embodiment of the projector according to the present invention.

In this second embodiment, in the case of the first embodiment shown in FIG.
The magnification and illumination range of the condenser lens 5 are set, and the magnification of the projection lens 6 is first set by the magnification setting device 17, and the illumination range of the condenser lens 5 is set according to this magnification. This is how it is set. (
That is, the illumination range of the condenser lens 5 is cascade-controlled by the central processing unit I35 on the condenser lens 5 side in accordance with the magnification of the projection lens 6.

Since the other configurations are the same as those in FIG. 1, the explanation will be omitted by assigning the same reference numerals to the same or corresponding parts.

In the case of this second embodiment, compared to the case of the first embodiment shown in FIG. Since the range is controlled, there is an advantage that there is no fear of hunting in the control system.

Next, a third embodiment of the present invention shown in FIG. 6 will be described.

In this third embodiment, the rotary lens barrel 6A of the projection lens 6 is manually operated, and the magnification at this time is controlled by the rotary encoder 32.
Based on this detected value, the central processing unit 35 activates the drive device f2 as in the embodiment shown in FIG.
7 to iI11wJ, thereby controlling the rotating cylinder 5A of the condenser lens 5 so as to obtain an illumination range corresponding to the magnification of the projection lens 6.

Next, a fourth embodiment of the present invention shown in FIG. 7 will be described.

This fourth embodiment is opposite to the third embodiment shown in FIG.
The rotation cylinder 5A of the condensing lens 5 is manually operated, the illumination range at this time is detected by the rotary encoder 30, and based on the detected value, the central processing unit F25 controls the drive device 29 to control the condensing lens. The magnification of the projection lens 6 corresponds to the illumination range of the lens 5.

For other configurations, the same parts as in FIGS. 2, 5, and 6 are designated by the same reference numerals, and the explanation thereof will be omitted.

In the above embodiment, since the zoom ratio of the condenser lens 5 and the projection lens 6 is adjusted by rotating and rotating the i-tube 5A or 6A, they are driven by the motor 11 or 20 via gears. However, the zoom ratio of the condenser lens 5 and the projection lens 6 may be adjusted by other means. Therefore, the movable portion of the zoom lens may be moved in the straight direction.

The illumination range of the condensing lens 5 and the magnification of the projection lens 6 are detected by rotary encoders 30 and 3.
2, but this is not limited to the embodiment as long as it is a detection device that can detect these illumination ranges and magnifications. Therefore, for example, other detection devices such as a magnetic reading type or an electrostatic detection type may be used.

Since the present invention is configured as described above, it is possible to automatically synchronize the projection system and the illumination system in the projector to adjust the magnification and illumination range.Therefore, projection inspection can be performed easily and quickly, and the apparatus can be made compact. It has an excellent system of being able to do many things.

[Brief explanation of drawings]

FIG. 1 is a layout diagram of the optical system in a conventional projector, FIG. 2 is a layout diagram including a partial block diagram showing the optical system in an embodiment of the projector according to the present invention, and FIG. 3 is an illumination diagram in the same embodiment. FIG. 4 is an enlarged cross-sectional view showing the projection system in the same embodiment; FIGS. 5 to 7 show second to fourth embodiments of the projector according to the present invention. We accept the second
It is a layout similar to the figure. DESCRIPTION OF SYMBOLS 1... Illumination device, 2... Stage, 3... Enlargement projection device, 4... Screen, 5... Condensing lens, 5△
... Rotating lens barrel, 6... Projection lens, 6A... Rotating lens barrel, 7... Tuning device, 8... Light source, 11... Motor, 14... Slit disc, 15... Light emitting element,
16... Light receiving element, 17 Magnification ratio setter, 25... Central processing unit, 27... Drive device, 29... Drive device, 30... Rotary encoder, 32... Rotary encoder, 35 ...Central processing unit (proxy) Keisuke Matsuyama (and 1 other person) Figure 3 Figure 4

Claims (5)

[Claims] (1) In a projector in which a workpiece on a workpiece stage is illuminated by an illumination device, and the shape of the workpiece by transmitted light or reflected light is imaged on a screen via an enlarged projection device, the illumination device is The optical lens and the projection lens of the enlargement projection device are zoom type lenses, and a tuning device is provided to match the illumination range of the condensing lens of the illumination device with the projection magnification of the projection lens of the enlargement projection device. A projector. (2) The eleventh device includes a magnification setting device, an actuator for driving the projection lens based on the magnification signal from the magnification setting device, and an actuator for driving the condenser lens based on the magnification signal. The projector according to claim 1, characterized in that it has an actuator. (3) The tuning device includes a detection device that is attached to one of the projection lens or the condensing lens and detects the magnification or illumination range, and a detection device that detects the magnification or the illumination range based on the detection signal of the detection device. 2. The projector according to claim 1, further comprising an actuator that drives the other actuator to set an illumination range or magnification that corresponds to the detected magnification or illumination range. (4) The II device is driven by a magnification setting device, an actuator that drives either the projection lens or the condensing lens based on the magnification signal from the magnification setting device, and this actuator. a detection device attached to a projection lens or a condenser lens to detect its magnification or illumination range; and a detection device that drives the other of the condenser lens or projection lens based on a detection signal from this detection device, and detects the detected magnification. or an actuator for setting an illumination range or magnification corresponding to the illumination range. (5) The actuator detects the magnification or illumination range detection device attached to the projection lens or condensing lens to be driven (after comparing No. ii with a reference signal by a comparator,
5. The projector according to claim 2, wherein the projector is controlled by feeding back a correction signal.