JPS5866499A - Ultrasonic oscillator - Google Patents
Ultrasonic oscillatorInfo
- Publication number
- JPS5866499A JPS5866499A JP16612681A JP16612681A JPS5866499A JP S5866499 A JPS5866499 A JP S5866499A JP 16612681 A JP16612681 A JP 16612681A JP 16612681 A JP16612681 A JP 16612681A JP S5866499 A JPS5866499 A JP S5866499A
- Authority
- JP
- Japan
- Prior art keywords
- film
- plate
- pvdf
- ultrasonic wave
- piezoelectric material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims abstract description 16
- 239000002033 PVDF binder Substances 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims abstract description 13
- 238000013016 damping Methods 0.000 claims abstract description 5
- 229920000642 polymer Polymers 0.000 claims abstract 3
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 13
- 238000002604 ultrasonography Methods 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- 241000270708 Testudinidae Species 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000005923 long-lasting effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は超音波振動子に係り特に受信感度の向上を図
った超音波振動子に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultrasonic transducer, and particularly to an ultrasonic transducer with improved reception sensitivity.
最近超音波は超音波診断装置に代表されるように医療用
にも多く利用されている。Recently, ultrasound has been widely used for medical purposes, as typified by ultrasound diagnostic equipment.
しかして、従来このような医療用に多く使われる超音波
振動子として第１図に示すような亀のが両面に銀などの
電極（図示せず）が設けられてｌ／１て、外部の励振源
あるいは受信部に接続されてＧｌる。圧電板ｌの画面に
は例えば生体ｔζ効率よく超音波を伝達させるためのマ
ツチング層２を設けている。このマツチング層２にはエ
ポキシなどを超音波の波長の１７４の厚さにした所ＩＮ
λ／４板が用いられている。また、圧電板１の後面には
ダンピング層３を設けている。このダンピング層３は圧
電板ｌをパルスにて励振したとき発生する長時間持続の
固有振動を急速に減衰させｏｒ能な限り短いパルス状の
超音波をつくるためのものである。Conventionally, as an ultrasonic transducer commonly used for medical purposes, the tortoise transducer shown in Fig. 1 has electrodes (not shown) made of silver or the like on both sides of the tortoise transducer. Gl is connected to an excitation source or a receiver. For example, a matching layer 2 is provided on the screen of the piezoelectric plate 1 for efficiently transmitting ultrasonic waves to a living body tζ. This matching layer 2 is made of epoxy or the like to a thickness of 174 times the wavelength of the ultrasonic wave.
A λ/4 plate is used. Further, a damping layer 3 is provided on the rear surface of the piezoelectric plate 1. This damping layer 3 is for rapidly attenuating the long-lasting natural vibration that occurs when the piezoelectric plate 1 is excited with a pulse, or for creating a pulse-like ultrasonic wave as short as possible.
ところがこのように構成される超音波振動子は圧電板ｌ
の材料として現在戚も用いられるＰＺＴの場合、送［ｔ
ｃ ａする圧電定数ｄがｌｌ０ＸＩＯ−１１（ＩＱ／マ
）と大きな値を示すものの受信に関する圧電定数ｇがｌ
０ＸＩＯＩと圧電材料の中でも最も小さいグループ化属
するため現行の超音波診断装置などでは受信部に１００
ｄＢもの高利得アンプを用意しなければならない。この
ことは超音波診断装置に用いられるアンプはパルス状の
信号を取り扱うため広帯域のものが必要であるが上述の
高利得を保ったまま広帯域の条件を、満足するのはかな
り難しく、アンプとしてかなり高価なもの化なり超音波
診断装置の価格高騰の一因となっていた。またアンプ利
得を上げることはノイズが必然的に多くなり画質劣化を
引起す欠点もあった。However, the ultrasonic transducer configured in this way has a piezoelectric plate l.
In the case of PZT, which is currently used as a material for
c Although the piezoelectric constant d for a has a large value of ll0XIO-11 (IQ/ma), the piezoelectric constant g for reception is l
0XIOI belongs to the smallest group of piezoelectric materials, so current ultrasonic diagnostic equipment uses 100
A high gain amplifier of dB must be prepared. This means that amplifiers used in ultrasonic diagnostic equipment must have a wide band because they handle pulsed signals, but it is quite difficult to satisfy the broadband conditions while maintaining the above-mentioned high gain. This was one of the reasons for the soaring prices of ultrasound diagnostic equipment as they became more expensive. In addition, increasing the amplifier gain inevitably increases noise, which also has the disadvantage of causing deterioration in image quality.
この発明は上記欠点を除去するためなされたもので、マ
ツチング層に高分子圧電材料ＰｖＤＦを用いることによ
り超音波の受信感度を高めることができ、受信信号番増
幅するアンプの低廉化および画質向上に大いに寄与し得
る超音波振動子を提供することを目的とする。This invention was made to eliminate the above-mentioned drawbacks, and by using a polymeric piezoelectric material PvDF for the matching layer, it is possible to increase the receiving sensitivity of ultrasonic waves, and it is possible to reduce the cost of the amplifier that amplifies the received signal number and improve the image quality. The purpose is to provide an ultrasonic transducer that can greatly contribute to the present invention.
以下、この発明の一実施例を図面に従い説明する。An embodiment of the present invention will be described below with reference to the drawings.
第２図１ｃオいて％１１は圧電板で、この圧電板１１は
第１図で述べたと同様ＰＺＴ 、 ＢａＴｉ０ａなどの
圧戒材料からなり、両面番こ図示しない銀などの電極が
設けられるとと本に外部の励振源（図示せず）は圧電板
１１をパルスにて励振したとき発生する長啼関持続の固
有振動を急速に減衰させ可能な限り短いパルス状の超音
波をつくるためのダンピング層１２を設けている。In FIG. 2, 1c, %11 is a piezoelectric plate, and this piezoelectric plate 11 is made of a pressure material such as PZT or BaTiO as described in FIG. An external excitation source (not shown) is used to rapidly attenuate the long-lasting natural vibrations that occur when the piezoelectric plate 11 is excited with pulses, and to create ultrasonic waves with the shortest possible pulses. A layer 12 is provided.
圧電板１１の前面には高分子圧′１材料ＰＶＤＦ例えば
ＰＶＤＦフィルム１３を設けてＧ、）る。このＰＶＤＦ
フィルム１３は高分子圧電材料の中で最も圧電効果が大
きいポリフッ化ビニリデンをフィルム状ζこしたもので
、機械→電気交換の効率が圧電板１１をなすＰＺＴのそ
れに比べ１７倍をなし、しかも密ｇ １．７８ｇ／ｊ
、音速２３００ｍ／ｓｅｅで第１図で述べたマツチング
層のエポキシの密度１．５ ｇ／ｊ、音速２７００ｎ７
ｓｅｃ＃ｃ近似しマツチング層の作用を有するものであ
る。これ−こより、 ＰＶＤＦフィルム１３はその膜厚
を伝搬される超音波の波長の１／４にしている。On the front surface of the piezoelectric plate 11, a polymeric material PVDF, for example, a PVDF film 13, is provided. This PVDF
The film 13 is made of polyvinylidene fluoride, which has the highest piezoelectric effect among polymeric piezoelectric materials, and has a mechanical to electrical exchange efficiency 17 times that of PZT, which makes up the piezoelectric plate 11, and is dense. g 1.78g/j
, the density of the epoxy of the matching layer described in FIG. 1 is 1.5 g/j, the sound speed is 2700 n7,
It approximates sec#c and has the function of a matching layer. Because of this, the thickness of the PVDF film 13 is set to 1/4 of the wavelength of the transmitted ultrasonic wave.
つまり、−例として超音波の使用周波数が５ ＭＨｚの
とき膜厚が約１２０１ｔｍのものが用いられる。またこ
のよりなＰＶＤＦ’フィルム１３の両面に例えばＡＩ！
の電極（図示せず）を蒸着などにより設けこれらを図示
しない受信部に接続している。That is, for example, when the frequency used for ultrasonic waves is 5 MHz, a film having a thickness of about 1201 tm is used. Also, for example, AI!
Electrodes (not shown) are provided by vapor deposition or the like, and these are connected to a receiving section (not shown).
なお図中１４は圧電板１ｔとＰＶＤＦフィルム１３の間
−こ介挿され電極間を絶縁するためのエポキシなどの薄
膜からなる絶縁層である。In the figure, reference numeral 14 denotes an insulating layer made of a thin film of epoxy or the like which is inserted between the piezoelectric plate it and the PVDF film 13 to insulate between the electrodes.
次にそ）作用を説明する。Next, we will explain its effect.
フィルム１３を介して観察対象例えば生体中ζζ伝搬さ
れる。□この場合、ＰＶＤＦフィルム１３はマツチング
層として作用し、生体と圧電板１１との間の゛反射を低
減し生体中に効率よく超音波を伝えるようになる。The ζζ is propagated through the film 13 into an object to be observed, for example, a living body. □ In this case, the PVDF film 13 acts as a matching layer, reduces reflection between the living body and the piezoelectric plate 11, and efficiently transmits ultrasonic waves into the living body.
次に、受信時は生体中からのエコー信号をＰＹＤＦフィ
ルム１３にて受信する。この場合ｆｆＤＦフィルム１３
は良好な機械→踵気変換効率を有し、高−率の受波器と
して作動するので超音波の受信感度を高めることができ
るとと参に高利得の受信信号を受信部側に送出すること
ができる。ちなみにＰＺＴ単体の振動子に比べ２５ｄＢ
の受信感度の向上がみられた。Next, at the time of reception, the echo signal from inside the living body is received by the PYDF film 13. In this case, ffDF film 13
has good mechanical-to-heel-to-air conversion efficiency and operates as a high-efficiency receiver, so it sends out a high-gain received signal to the receiver side in order to increase the reception sensitivity of ultrasonic waves. be able to. By the way, it is 25 dB compared to a single PZT resonator.
An improvement in reception sensitivity was observed.
がみられた。was seen.
これにより受信部側のアンプに低利得のものを用いるこ
とができるのでアンプとして低価格化を図ることができ
、かかるアンプを用いる超音波診断装置の低廉化に寄与
し得るとともにアンプの利得を低くできるためノイズも
少なくでき画質の向上にも大いに寄与することができる
。As a result, it is possible to use a low-gain amplifier for the receiver side, which makes it possible to reduce the price of the amplifier, which contributes to lowering the cost of ultrasound diagnostic equipment that uses such an amplifier, and to lower the gain of the amplifier. As a result, noise can be reduced and this can greatly contribute to improving image quality.
なお、この発明は上記実施例Ｉこのみ限定されず要旨を
変更しない範囲で適宜変形して実施できる。It should be noted that the present invention is not limited to the above-mentioned embodiment I, and can be practiced with appropriate modifications within the scope without changing the gist.
例えば上述では送信時は圧電板１１を励振し、エコー信
号はＰＶＤＦ’フィルム１３にて受信するようにしたが
、ＰＶＤＦフィルム１３は剛体とみなせる圧電板１１に
設けられているので送信時に励振をすることが可能であ
り、圧電板１１とＰＶＤＦフィルム１３を同位相で励振
すると、このときの送信効率を２０〜３０チも向上する
ことができ、また受信時圧電板１１からも出力を取り出
せば約８優受信感度の向上を図ることができる。For example, in the above description, the piezoelectric plate 11 is excited during transmission, and the echo signal is received by the PVDF' film 13. However, since the PVDF film 13 is provided on the piezoelectric plate 11, which can be regarded as a rigid body, it is excited during transmission. If the piezoelectric plate 11 and the PVDF film 13 are excited in the same phase, the transmission efficiency at this time can be improved by 20 to 30 inches, and if the output is also taken from the piezoelectric plate 11 during reception, approximately It is possible to improve the 8-superior reception sensitivity.
以上述べたようにこの発明によれば超音波の受信感度を
高めることができ、受信信号を増巾するアンプの低廉化
および画質向上に太いｔこ寄与し得る超音波振動子を提
供できる。As described above, according to the present invention, it is possible to provide an ultrasonic transducer that can increase the receiving sensitivity of ultrasonic waves, and can significantly contribute to reducing the cost of an amplifier that amplifies received signals and improving image quality.
第１図は従来の超音波振動子の一例を示す概略的構成図
、第２図はこの発明の一実施例を示概略的構成図、であ
る。
■、１１・・・圧電板 ２・・・マツチング層３
．１２・・・ダンピング層 １３・・・ＰＶｒ）Ｆフィ
ルム１４・・・絶縁層
第１因
第２図
１４ １】FIG. 1 is a schematic block diagram showing an example of a conventional ultrasonic transducer, and FIG. 2 is a schematic block diagram showing an embodiment of the present invention. ■, 11...Piezoelectric plate 2...Matching layer 3
．． 12... Damping layer 13... PVr) F film 14... Insulating layer 1st factor Figure 2 14 1]
Claims (1)
電板と、この圧電板の裏面に設けられたダンピング層と
、上記圧電板の前面に設けられ且つ両面ζこ電極が設け
られた高分子圧電材料ＰＶＤＰと。 上記圧電板と高分子圧電材料ＰＶＤＰの間に介挿される
絶縁層とを具備したことを特徴とする超音波振動子。 （２）上記高分子圧電材料ＰＶＤＦはＰＶＤＦ’フィル
ムからなることを特徴とする特許請求の範囲第１項記載
の超音波振動子。[Claims] (Violet) A piezoelectric plate made of a piezoelectric material and provided with electrodes on both sides, a damping layer provided on the back side of the piezoelectric plate, and a double-sided ζ electrode provided on the front side of the piezoelectric plate. A polymer piezoelectric material PVDP provided with. An ultrasonic transducer comprising an insulating layer interposed between the piezoelectric plate and the polymeric piezoelectric material PVDP. (2) The ultrasonic transducer according to claim 1, wherein the polymeric piezoelectric material PVDF is a PVDF' film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16612681A JPS5866499A (en) | 1981-10-16 | 1981-10-16 | Ultrasonic oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16612681A JPS5866499A (en) | 1981-10-16 | 1981-10-16 | Ultrasonic oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5866499A true JPS5866499A (en) | 1983-04-20 |
Family
ID=15825509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16612681A Pending JPS5866499A (en) | 1981-10-16 | 1981-10-16 | Ultrasonic oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5866499A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106311584B (en) * | 2016-09-22 | 2018-05-22 | 中国科学院声学研究所 | A kind of thickness mode piezoelectricity sky coupling ultrasonic transducer of active matching |
-
1981
- 1981-10-16 JP JP16612681A patent/JPS5866499A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106311584B (en) * | 2016-09-22 | 2018-05-22 | 中国科学院声学研究所 | A kind of thickness mode piezoelectricity sky coupling ultrasonic transducer of active matching |
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