JPS5856440U - バキユ−ムピンセツト - Google Patents

バキユ−ムピンセツト

Info

Publication number
JPS5856440U
JPS5856440U JP15180681U JP15180681U JPS5856440U JP S5856440 U JPS5856440 U JP S5856440U JP 15180681 U JP15180681 U JP 15180681U JP 15180681 U JP15180681 U JP 15180681U JP S5856440 U JPS5856440 U JP S5856440U
Authority
JP
Japan
Prior art keywords
tweezers
main body
fitted
vacuum
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15180681U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6122772Y2 (enrdf_load_stackoverflow
Inventor
隆雄 松田
Original Assignee
日本テキサス・インスツルメンツ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本テキサス・インスツルメンツ株式会社 filed Critical 日本テキサス・インスツルメンツ株式会社
Priority to JP15180681U priority Critical patent/JPS5856440U/ja
Publication of JPS5856440U publication Critical patent/JPS5856440U/ja
Application granted granted Critical
Publication of JPS6122772Y2 publication Critical patent/JPS6122772Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP15180681U 1981-10-13 1981-10-13 バキユ−ムピンセツト Granted JPS5856440U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15180681U JPS5856440U (ja) 1981-10-13 1981-10-13 バキユ−ムピンセツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15180681U JPS5856440U (ja) 1981-10-13 1981-10-13 バキユ−ムピンセツト

Publications (2)

Publication Number Publication Date
JPS5856440U true JPS5856440U (ja) 1983-04-16
JPS6122772Y2 JPS6122772Y2 (enrdf_load_stackoverflow) 1986-07-08

Family

ID=29944488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15180681U Granted JPS5856440U (ja) 1981-10-13 1981-10-13 バキユ−ムピンセツト

Country Status (1)

Country Link
JP (1) JPS5856440U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100317320B1 (ko) * 1999-05-24 2001-12-22 김영환 반도체소자 제조를 위한 화학기상증착 공정용 웨이퍼 핸들링 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4957498A (enrdf_load_stackoverflow) * 1972-10-04 1974-06-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4957498A (enrdf_load_stackoverflow) * 1972-10-04 1974-06-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100317320B1 (ko) * 1999-05-24 2001-12-22 김영환 반도체소자 제조를 위한 화학기상증착 공정용 웨이퍼 핸들링 장치

Also Published As

Publication number Publication date
JPS6122772Y2 (enrdf_load_stackoverflow) 1986-07-08

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