JPS5853724U - 被処理物の吸入収納装置 - Google Patents
被処理物の吸入収納装置Info
- Publication number
- JPS5853724U JPS5853724U JP14700881U JP14700881U JPS5853724U JP S5853724 U JPS5853724 U JP S5853724U JP 14700881 U JP14700881 U JP 14700881U JP 14700881 U JP14700881 U JP 14700881U JP S5853724 U JPS5853724 U JP S5853724U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- suction
- air flow
- storage device
- silencer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Air Transport Of Granular Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14700881U JPS5853724U (ja) | 1981-10-01 | 1981-10-01 | 被処理物の吸入収納装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14700881U JPS5853724U (ja) | 1981-10-01 | 1981-10-01 | 被処理物の吸入収納装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5853724U true JPS5853724U (ja) | 1983-04-12 |
JPS6132907Y2 JPS6132907Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-09-25 |
Family
ID=29939883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14700881U Granted JPS5853724U (ja) | 1981-10-01 | 1981-10-01 | 被処理物の吸入収納装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5853724U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007316588A (ja) * | 2006-04-26 | 2007-12-06 | Orc Mfg Co Ltd | 露光装置および露光方法 |
-
1981
- 1981-10-01 JP JP14700881U patent/JPS5853724U/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007316588A (ja) * | 2006-04-26 | 2007-12-06 | Orc Mfg Co Ltd | 露光装置および露光方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6132907Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-09-25 |
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