JPS5853018A - Magnetic head and its manufacture - Google Patents

Magnetic head and its manufacture

Info

Publication number
JPS5853018A
JPS5853018A JP15159281A JP15159281A JPS5853018A JP S5853018 A JPS5853018 A JP S5853018A JP 15159281 A JP15159281 A JP 15159281A JP 15159281 A JP15159281 A JP 15159281A JP S5853018 A JPS5853018 A JP S5853018A
Authority
JP
Japan
Prior art keywords
magnetic
permeability layer
layer
magnetic permeability
high magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15159281A
Other languages
Japanese (ja)
Inventor
Hiroyasu Karimoto
博保 刈本
Yoshio Watanabe
由雄 渡辺
Nobuaki Furuya
古谷 伸昭
Yasuhiko Nakayama
中山 靖彦
Hiroshi Miyama
博 深山
Nobuhide Matsuda
松田 信英
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15159281A priority Critical patent/JPS5853018A/en
Publication of JPS5853018A publication Critical patent/JPS5853018A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/1278Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To increase a reproduced output, by forming a main magnetic pole with the 1st high permeability layer of strip shape clipped with holders and the 2nd high permeability layer almost horizontally extended to the recording medium surface. CONSTITUTION:A main magnetic pole 22 and an auxiliary magnetic pole 23 are arranged so that a magnetic recording medium 19 can be clipped, and the auxiliary magnetic pole 23 is formed by winding a coil 21 around a ferromagnetic substance core 20. The main magnetic pole 22 thus used is formed by providing the 2nd high permeability layer 17 which holds the 1st high permeability layer 14 of strip shape with nonmagnetic substance holders 11 and 11', contacts one end of the layer 14 at the side opposite to the medium 19 and is almost orthogonal to the layer 14, and a ferromagnetic substance 18 is arranged in contact with the layer 17. Thus, high-density recording can be done and a high reproducing output can be obtained.

Description

【発明の詳細な説明】 本発明は磁気記録媒体表面に対し垂直におかれた磁極か
ら磁束を入射させて磁気記録する垂直記録方式に用いる
磁気ヘッドとその製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic head used in a perpendicular recording method in which magnetic recording is performed by injecting magnetic flux from a magnetic pole perpendicular to the surface of a magnetic recording medium, and a method for manufacturing the same.

垂直記録方式に用いる従来の磁気ヘッドは第1図に示す
ようにパーマロイのような強磁性薄膜層2をセラミック
ス、ガラス等の非磁性材1ではさみこんだ形の主磁極6
と、強磁性体コア4に励磁用コイル5を巻いた補助磁極
7とより構成され、主磁極6と補助磁極7の両者は磁気
記録媒体3を介し対向するごとく配置して構成されてい
る。補助磁極7より発生した磁界が主磁極60作用で媒
体3に接触する部分に強く、鋭い分布の垂直磁界を発生
し、媒体3を垂直方向に磁化する。このヘッドについて
は再生出力が充分得られず、充分なS/Nがとれないた
めデジタル機器等の信号処理に対して信頼性よく出力を
出せないという欠点がある。一般に電磁誘導型の磁気ヘ
ッドにおいては記録信号が書き込まれた微少領域からの
微少漏洩磁束を如何に効率よくかつ多量にとり出し、コ
イル中に集束するかということが問題とされる。コイル
中を横切る磁束が多いということは出力信号、の増大と
いうことであり、大きい出力は信号処理回路にとって判
断エラーを少なくするという利点につながる。
As shown in Figure 1, a conventional magnetic head used for perpendicular recording has a main magnetic pole 6 in which a ferromagnetic thin film layer 2 such as permalloy is sandwiched between non-magnetic materials 1 such as ceramics or glass.
and an auxiliary magnetic pole 7 in which an excitation coil 5 is wound around a ferromagnetic core 4, and both the main magnetic pole 6 and the auxiliary magnetic pole 7 are arranged so as to face each other with the magnetic recording medium 3 in between. The magnetic field generated by the auxiliary magnetic pole 7 acts on the main magnetic pole 60 to generate a strong and sharply distributed perpendicular magnetic field at the portion where it contacts the medium 3, thereby magnetizing the medium 3 in the perpendicular direction. This head has drawbacks in that it cannot provide a sufficient reproduction output and cannot provide a sufficient S/N ratio, so it cannot output reliably for signal processing in digital equipment and the like. Generally, in an electromagnetic induction type magnetic head, the problem is how to efficiently extract a large amount of minute leakage magnetic flux from a minute area where a recording signal is written and focus it in a coil. More magnetic flux passing through the coil means an increase in the output signal, and a larger output has the advantage of reducing decision errors for the signal processing circuit.

本発明は出力を増大させることにより出力が微少なるが
故にエラー率の増大するという欠点を解決せんとするも
ので、以下に図面を用いてその一実施例を説明する。
The present invention aims to solve the problem of increasing the error rate due to the small output by increasing the output.One embodiment of the present invention will be described below with reference to the drawings.

本発明の特徴は主磁極の構造およびその製造方法にある
のでそれについて詳しく説明する。まず22の製造工程
を詳細に示すもので、第2図において、ガラス、チタン
酸バリウム、フォルステライト等の非磁性の保持材料1
1上に例えば80%Ni−FeのパーマOイや、55%
Ni−30%Fe−16%CO合金等の膜厚1.0μm
の第1の高透磁率層12をスパッタまたは蒸着法によっ
て形成しく第2図a)、その上に感光性樹脂13によっ
てマスクを形成しく第2図b)、高透磁率磁性層12を
エツチングする(第2図C)。14はエツチング後の第
1の高透磁率層を示す。この状態を斜視図で示したのが
第3図aである。次にもう一枚の非磁性の保持材11を
エポキシ等の接着剤16で貼り合わせる(第3図b)。
Since the present invention is characterized by the structure of the main pole and its manufacturing method, this will be explained in detail. First, the manufacturing process of No. 22 is shown in detail.
For example, 80% Ni-Fe perm on 1 or 55%
Film thickness of Ni-30%Fe-16%CO alloy, etc. 1.0μm
A first high magnetic permeability layer 12 is formed by sputtering or vapor deposition (FIG. 2a), a mask is formed thereon with a photosensitive resin 13 (FIG. 2b), and the high permeability magnetic layer 12 is etched. (Figure 2C). 14 shows the first high magnetic permeability layer after etching. FIG. 3a shows this state in a perspective view. Next, another non-magnetic holding material 11 is pasted with an adhesive 16 such as epoxy (FIG. 3b).

次に第3図Cに示すように機械的研磨法によって表面1
6の曲率が適切な量になるように表面を研磨する。次に
第3図Cで示した保持材11の底部にさらにパーマロイ
等の第2の高透磁率層17をスパッタまたは蒸着法を用
い数μmの厚みに形□1 成する。
Next, as shown in FIG. 3C, the surface 1 is polished by mechanical polishing.
Polish the surface so that the curvature of 6 is the appropriate amount. Next, on the bottom of the holding material 11 shown in FIG. 3C, a second high magnetic permeability layer 17 of permalloy or the like is formed to a thickness of several μm using sputtering or vapor deposition.

次に第4図に示すように、高透磁率を有するフェライト
等の強磁性材18を前述の非磁性の保持材料11および
11′の底部に形成された第20高透磁率層17にエポ
キシ等の接着剤で接続する。
Next, as shown in FIG. 4, a ferromagnetic material 18 such as ferrite having high magnetic permeability is applied to the 20th high magnetic permeability layer 17 formed at the bottom of the non-magnetic holding material 11 and 11' using epoxy or the like. Connect with adhesive.

本発明の一実施例の主磁極は以上のような製造方法で形
成されている。
The main pole of one embodiment of the present invention is formed by the manufacturing method described above.

この製造方法において、第2の高透磁率層17と第1の
高透磁率層14との接続部分の磁気抵抗を小さくできる
ように形成されている。というのは第2の高透磁率層1
7をスパッタ法または蒸着法で形成する際、第1の高透
磁率層14の一端面が基板11および11′の底部と同
一面上になく、多少内部に入っていても、スパッタ法や
蒸着法を用いるとその中に入り込んでいくため第2の高
透磁率層17と第1の高透磁率層14を完全に接続する
ことができ、接続部の磁気抵抗を小さくすることができ
るという特徴がある。
In this manufacturing method, the magnetic resistance of the connecting portion between the second high magnetic permeability layer 17 and the first high magnetic permeability layer 14 can be reduced. This is because the second high permeability layer 1
7 by sputtering or vapor deposition, even if one end surface of the first high magnetic permeability layer 14 is not on the same plane as the bottom of the substrates 11 and 11' and is slightly inside, the sputtering or vapor deposition When using the method, the second high magnetic permeability layer 17 and the first high magnetic permeability layer 14 can be completely connected because it penetrates into the layer, and the magnetic resistance of the connection part can be reduced. There is.

第4図に示した主磁極を用いた本発明の磁気記録装置の
構成を第5図に示す。
FIG. 5 shows the configuration of a magnetic recording device of the present invention using the main magnetic pole shown in FIG. 4.

磁気記録媒体19を挾むように主磁極22と補助磁極2
3が設けられており、補助磁極23は強磁性体コア20
にコイル21を巻いた構成であり、主磁極22は第1の
高透磁率層14が非磁性の保持材11および11′で保
持されてお9、記録媒体と反対側には第1の高透磁率層
14の一端に接しかつ第1の高透磁率層14にほぼ直交
して配された第2の高透磁率層17を有し、さらにこの
第2の高透磁率層17に接して強磁性材18が設けられ
ている。この主磁極22を用い第6図に示すような構成
で記録された信号を再生すると第6図に示すような出力
が得られた。すなわち高透磁率層14の非磁性の保持材
11の底部から測定した高さ6μmを″横軸にして再生
出力をプロットすると、dが小さくなるにつれて出力が
著しく増大することが認められ、d=100μmでは出
力が4倍近くも上昇した。図の中で破線で示しているレ
ベルは第1図に示した従来の磁気ヘッドを用いた場合の
再生出力を示している。本発明の主磁極を用いると出力
が大幅に増加することが分る。この原因は主磁極を本発
明のような構成にすることによって補助磁極先端面の減
磁率が実効的に減少するためであると考えられる。
A main magnetic pole 22 and an auxiliary magnetic pole 2 sandwich the magnetic recording medium 19.
3 is provided, and the auxiliary magnetic pole 23 is a ferromagnetic core 20
The main pole 22 has a first high magnetic permeability layer 14 held by non-magnetic holding materials 11 and 11', and a first high permeability layer 9 on the side opposite to the recording medium. It has a second high magnetic permeability layer 17 disposed in contact with one end of the magnetic permeability layer 14 and substantially perpendicular to the first high magnetic permeability layer 14, and further in contact with the second high magnetic permeability layer 17. A ferromagnetic material 18 is provided. When a signal recorded in the configuration shown in FIG. 6 was reproduced using this main pole 22, an output as shown in FIG. 6 was obtained. That is, when the reproduction output is plotted using the height 6 μm measured from the bottom of the non-magnetic holding material 11 of the high magnetic permeability layer 14 as the horizontal axis, it is observed that the output increases significantly as d becomes smaller, and d= At 100 μm, the output increased nearly four times.The level indicated by the broken line in the figure shows the reproduction output when using the conventional magnetic head shown in Fig. 1. It can be seen that the output increases significantly when used.The reason for this is thought to be that by configuring the main pole as in the present invention, the demagnetization rate of the tip surface of the auxiliary pole is effectively reduced.

本実施例で高透磁率層14の厚みを0.7−1.7μm
、)ラック方向の厚みを1M%dを100μm程度にし
て記録、再生した場合、記録密度は30KBPI以上に
のび、さらに出力は2mVとなって87Nが大幅に改善
された。またビットエラー率が10 以下となり実用の
領域に入ることが確認されている。なお記録密度をあげ
るためには高透磁率層14の厚みをさらに薄くすれば、
再生出力に少々の低下がみられるものの記録密度を50
KBPI以上にすることができる。本実施例によると再
生出力を従来に比して4倍以上も増大でき、それによっ
てビットエラー率を104倍改善できる。また製造方法
においても従来からあるスパッターや蒸着法によって形
成できるので量産化の段階においても容易に製造工程に
導入できる等の利点を有している。
In this example, the thickness of the high magnetic permeability layer 14 is 0.7-1.7 μm.
,) When the thickness in the rack direction was set to 1M%d to approximately 100 μm for recording and reproduction, the recording density increased to 30 KBPI or more, and the output became 2 mV, which was a significant improvement from 87N. It has also been confirmed that the bit error rate is 10 or less, which is within the practical range. Note that in order to increase the recording density, if the thickness of the high magnetic permeability layer 14 is further reduced,
Although there is a slight decrease in playback output, the recording density has been increased to 50%.
It can be made higher than KBPI. According to this embodiment, the reproduction output can be increased by more than four times compared to the conventional method, and the bit error rate can thereby be improved by 104 times. Furthermore, since it can be formed by conventional sputtering or vapor deposition methods, it has the advantage that it can be easily introduced into the manufacturing process even at the stage of mass production.

本発明の製造方法においては第3図Cで示した保持材1
1の底部に第2の高透磁率層17をス・くツタ法で形成
し前記第1の高透磁°率層14と接続させ接続部の磁気
抵抗を低くしている。しかし、第2の高透磁率層17と
して板状の高透磁率材を基板の底部にエポキシで接続し
た場合、接続部の磁気抵抗はある程度増加するものの、
従来の磁気ヘッドに比して再生出力を増大させることが
できる。この場合も前述したのと同様の効果によるもの
と考えられる。
In the manufacturing method of the present invention, the holding material 1 shown in FIG.
A second high magnetic permeability layer 17 is formed on the bottom of the first high magnetic permeability layer 17 by the suction method, and is connected to the first high magnetic permeability layer 14 to lower the magnetic resistance of the connecting portion. However, when a plate-shaped high magnetic permeability material is connected to the bottom of the substrate with epoxy as the second high magnetic permeability layer 17, although the magnetic resistance of the connection increases to some extent,
The reproduction output can be increased compared to conventional magnetic heads. This case is also considered to be due to the same effect as described above.

本発明の第2の実施例を第7図に示す。第1の実施例で
は第6図に示すようにフェライトのような強磁性材18
を保持材11の底部にある高透磁率層18にエポキシで
接続して主磁極22を構成している。しかし第7図に示
すように第1の実施例から強磁性材18を除いた構成に
おいても第1の実施例に示したような再実出力は得られ
ないが、第1図に示した従来の垂直磁気記録ヘッドに比
して再生時に数倍の高出力が得られることが分った。
A second embodiment of the invention is shown in FIG. In the first embodiment, as shown in FIG. 6, a ferromagnetic material 18 such as ferrite is used.
is connected to the high magnetic permeability layer 18 at the bottom of the holding material 11 with epoxy to form the main magnetic pole 22. However, as shown in FIG. 7, even in the configuration in which the ferromagnetic material 18 is removed from the first embodiment, the re-actual output as shown in the first embodiment cannot be obtained. It was found that an output several times higher than that of the perpendicular magnetic recording head can be obtained during reproduction.

第7図に示す構成では強磁性材18の構成部品が不要に
なると同時に製造工程もすされるので磁気へ、ドのコス
トダウンをはかることができるという利点がある。
The configuration shown in FIG. 7 has the advantage that the component of the ferromagnetic material 18 is not required and the manufacturing process is also shortened, so that the cost of magnetism can be reduced.

本発明は補助磁極励磁形の磁気ヘッドを実施例、 とし
て述べたが、本発明はこれに限定されるものではなく、
主磁極励磁形の主磁極としても前述したのと同様な効果
が得られることはもちろんである。
Although the present invention has been described using an auxiliary pole excitation type magnetic head as an example, the present invention is not limited to this.
It goes without saying that the same effects as described above can be obtained using the main magnetic pole of the main magnetic pole excitation type.

以上のように本発明は記録媒体にほぼ垂直方向に設けら
れた短冊状の第1の高透磁率層の両側を非磁性の保持材
で挾持し、上記の第1の高透磁率層の記録媒体と反対側
の端面に接しかつ記録媒体にほぼ平行な方向に延伸させ
た第2の高透磁率層を設けた主磁極を有するもので、高
密度記録ができる利点を備えたままで高再生出力を得る
ことができ、構成上も非常に単純であるという利点を備
えているので、実用上極めて有効である。
As described above, the present invention comprises sandwiching both sides of a first high magnetic permeability layer in the form of a rectangle provided in a direction substantially perpendicular to a recording medium with non-magnetic holding materials, and recording data on the first high magnetic permeability layer. It has a main magnetic pole with a second high magnetic permeability layer that is in contact with the end surface on the opposite side of the medium and extends in a direction almost parallel to the recording medium, allowing for high reproduction output while still having the advantage of high-density recording. It has the advantage of being very simple in structure and extremely effective in practice.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の垂直磁気記録用の磁気ヘッドを示す概略
構成図、第2図a % C、第3図a % d、第4図
は本発明の磁気ヘッドの製造工程を順に示す図、第6図
は本発明の一実施例における磁気ヘッドの正面図、第6
図は本発明の磁気ヘッドを用いた場合の再生出力を示す
図、第7図は本発明の他の実施例を示す正面図である。 22・・・・・・主磁極、11・・・・・・非磁性の保
持材料、14・・・・・・高透磁率層、17・・・・・
・高透磁率材、18・・・・・・強磁性材、19・・・
・・・磁気記録媒体、2o・・・・・・強磁性体コア、
21・・・・・・励磁コイル、23・・・・・・補助磁
極。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図 2 (−一と−) 第2図 2 第3図 第4図 #!5図 第6図 d (yto’だり 17図 2ρ
FIG. 1 is a schematic configuration diagram showing a conventional magnetic head for perpendicular magnetic recording, FIG. 2 a % C, FIG. 3 a % d, and FIG. FIG. 6 is a front view of a magnetic head in an embodiment of the present invention;
This figure is a diagram showing reproduction output when using the magnetic head of the present invention, and FIG. 7 is a front view showing another embodiment of the present invention. 22...Main magnetic pole, 11...Nonmagnetic holding material, 14...High magnetic permeability layer, 17...
・High magnetic permeability material, 18...Ferromagnetic material, 19...
...magnetic recording medium, 2o...ferromagnetic core,
21...Excitation coil, 23...Auxiliary magnetic pole. Name of agent: Patent attorney Toshio Nakao and 1 other person 1st
Figure 2 (-1 and -) Figure 2 Figure 2 Figure 3 Figure 4 #! Figure 5 Figure 6 d (yto'dari 17 Figure 2ρ

Claims (1)

【特許請求の範囲】 (1)磁気記録媒体の磁性層を垂直方向に磁化する主磁
極を有し、前記主磁極が、保持材で挟持された短冊状の
第1の高透磁率層と、前記第1の高透磁率層の端面1;
接し、記録媒体面とほぼ水平に延設された第2の高透磁
率層とを具備することを特徴とする磁気ヘッド。 @)第1の高透磁率層の厚みが1.7μm以下であるこ
とを特徴とする特許請求の範囲第1項記載の磁気ヘッド
。 (3)第2の高透磁率層に接して強磁性材を設けたこと
を特徴とする特許請求の範囲第1項または第2項記載の
磁気ヘッド。 (4)主磁極の製造工程が短冊状の高透磁率層の両側を
非磁性の保持材で挾みこむ工程と、前記保持材の底部に
他の高透磁率層を形成する工程を少なくとも含むことを
特徴とする磁気ヘッドの製造方法。 @)他の高透磁率層をスパッタ法によって形成すること
を特徴とする特許請求の範囲第4項記載の磁気ヘッドの
製造方法。
[Scope of Claims] (1) A first high magnetic permeability layer having a rectangular shape having a main magnetic pole that magnetizes a magnetic layer of a magnetic recording medium in the perpendicular direction, the main magnetic pole being sandwiched between holding materials; end surface 1 of the first high magnetic permeability layer;
A magnetic head characterized by comprising a second high magnetic permeability layer that is in contact with and extends substantially horizontally to a surface of a recording medium. @) The magnetic head according to claim 1, wherein the first high magnetic permeability layer has a thickness of 1.7 μm or less. (3) A magnetic head according to claim 1 or 2, characterized in that a ferromagnetic material is provided in contact with the second high magnetic permeability layer. (4) The manufacturing process of the main pole includes at least the step of sandwiching both sides of a strip-shaped high magnetic permeability layer with a non-magnetic holding material, and the step of forming another high magnetic permeability layer on the bottom of the holding material. A method for manufacturing a magnetic head characterized by: @) The method for manufacturing a magnetic head according to claim 4, characterized in that the other high magnetic permeability layer is formed by a sputtering method.
JP15159281A 1981-09-24 1981-09-24 Magnetic head and its manufacture Pending JPS5853018A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15159281A JPS5853018A (en) 1981-09-24 1981-09-24 Magnetic head and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15159281A JPS5853018A (en) 1981-09-24 1981-09-24 Magnetic head and its manufacture

Publications (1)

Publication Number Publication Date
JPS5853018A true JPS5853018A (en) 1983-03-29

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ID=15521882

Family Applications (1)

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JP (1) JPS5853018A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111124A (en) * 1981-12-25 1983-07-02 Seiko Epson Corp Production of magnetic head
JPS58115613A (en) * 1981-12-28 1983-07-09 Seiko Epson Corp Magnetic head
JPS62285205A (en) * 1986-06-02 1987-12-11 Ricoh Co Ltd Perpendicular magnetic recording head

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5634129A (en) * 1979-08-24 1981-04-06 Matsushita Electric Ind Co Ltd Magnetic head

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5634129A (en) * 1979-08-24 1981-04-06 Matsushita Electric Ind Co Ltd Magnetic head

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111124A (en) * 1981-12-25 1983-07-02 Seiko Epson Corp Production of magnetic head
JPS58115613A (en) * 1981-12-28 1983-07-09 Seiko Epson Corp Magnetic head
JPS62285205A (en) * 1986-06-02 1987-12-11 Ricoh Co Ltd Perpendicular magnetic recording head

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