JPS5852861U - ion pump - Google Patents
ion pumpInfo
- Publication number
- JPS5852861U JPS5852861U JP14359181U JP14359181U JPS5852861U JP S5852861 U JPS5852861 U JP S5852861U JP 14359181 U JP14359181 U JP 14359181U JP 14359181 U JP14359181 U JP 14359181U JP S5852861 U JPS5852861 U JP S5852861U
- Authority
- JP
- Japan
- Prior art keywords
- ion pump
- utility
- cooling water
- recorded
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来のイオンポンプの断面図、第2図は本考案
の一実施例の断面図である。
1.11・・・・・・イオンポンプ素子、2.12・・
・・・・イオンポンプ本体、3.13・・・・・・加熱
用ヒー、夕、14・・・・・・水冷パイプ、15・・・
・・・カバー。FIG. 1 is a sectional view of a conventional ion pump, and FIG. 2 is a sectional view of an embodiment of the present invention. 1.11...Ion pump element, 2.12...
... Ion pump body, 3.13 ... Heater for heating, evening, 14 ... Water cooling pipe, 15 ...
···cover.
Claims (1)
を溶接した事を特徴とするイオンポンプ。An ion pump characterized by a pipe welded around the outer circumference of the ion pump through which cooling water can flow.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14359181U JPS5852861U (en) | 1981-09-28 | 1981-09-28 | ion pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14359181U JPS5852861U (en) | 1981-09-28 | 1981-09-28 | ion pump |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5852861U true JPS5852861U (en) | 1983-04-09 |
Family
ID=29936570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14359181U Pending JPS5852861U (en) | 1981-09-28 | 1981-09-28 | ion pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5852861U (en) |
-
1981
- 1981-09-28 JP JP14359181U patent/JPS5852861U/en active Pending
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