JPS5852861U - ion pump - Google Patents

ion pump

Info

Publication number
JPS5852861U
JPS5852861U JP14359181U JP14359181U JPS5852861U JP S5852861 U JPS5852861 U JP S5852861U JP 14359181 U JP14359181 U JP 14359181U JP 14359181 U JP14359181 U JP 14359181U JP S5852861 U JPS5852861 U JP S5852861U
Authority
JP
Japan
Prior art keywords
ion pump
utility
cooling water
recorded
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14359181U
Other languages
Japanese (ja)
Inventor
中「村」 明男
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP14359181U priority Critical patent/JPS5852861U/en
Publication of JPS5852861U publication Critical patent/JPS5852861U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のイオンポンプの断面図、第2図は本考案
の一実施例の断面図である。 1.11・・・・・・イオンポンプ素子、2.12・・
・・・・イオンポンプ本体、3.13・・・・・・加熱
用ヒー、夕、14・・・・・・水冷パイプ、15・・・
・・・カバー。
FIG. 1 is a sectional view of a conventional ion pump, and FIG. 2 is a sectional view of an embodiment of the present invention. 1.11...Ion pump element, 2.12...
... Ion pump body, 3.13 ... Heater for heating, evening, 14 ... Water cooling pipe, 15 ...
···cover.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] イオンポンプの外周に冷却水を流すことのできるパイプ
を溶接した事を特徴とするイオンポンプ。
An ion pump characterized by a pipe welded around the outer circumference of the ion pump through which cooling water can flow.
JP14359181U 1981-09-28 1981-09-28 ion pump Pending JPS5852861U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14359181U JPS5852861U (en) 1981-09-28 1981-09-28 ion pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14359181U JPS5852861U (en) 1981-09-28 1981-09-28 ion pump

Publications (1)

Publication Number Publication Date
JPS5852861U true JPS5852861U (en) 1983-04-09

Family

ID=29936570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14359181U Pending JPS5852861U (en) 1981-09-28 1981-09-28 ion pump

Country Status (1)

Country Link
JP (1) JPS5852861U (en)

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