JPS5852616A - Beam expander device - Google Patents

Beam expander device

Info

Publication number
JPS5852616A
JPS5852616A JP15064181A JP15064181A JPS5852616A JP S5852616 A JPS5852616 A JP S5852616A JP 15064181 A JP15064181 A JP 15064181A JP 15064181 A JP15064181 A JP 15064181A JP S5852616 A JPS5852616 A JP S5852616A
Authority
JP
Japan
Prior art keywords
holder
expander device
frequency filter
vacuum
spatial frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15064181A
Other languages
Japanese (ja)
Inventor
Yasuki Kiyohara
清原 耕来
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP15064181A priority Critical patent/JPS5852616A/en
Publication of JPS5852616A publication Critical patent/JPS5852616A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/46Systems using spatial filters

Abstract

PURPOSE:To obtain sharp expanded light by unitizing beam expander device structure, and eliminating electrolytic dissociation which occurs specially when the energy of high-power laser converges to one point. CONSTITUTION:A beam B from a laser, etc., is focused at a focal point through a small-diameter convex lens 8, filtered through a space-frequency filter 9, and transmitted through a large-diameter lens 7 to be emitted as expanded light. In this case, a vacuum is produced at least near the filter 9 to eliminate the possibility of electrolytic dissociation even if a high-power laser beam is converged to generate high energy.

Description

【発明の詳細な説明】 イクスパングー装置に関するものであって,ビームイク
スパンダー装置構造をユニット化すると共に,%にハイ
パワーレザーのエネルギーが一点に集中した場合に生じ
る電離現象を排除して鮮明な拡大光を得ることを目的と
するものである。
[Detailed Description of the Invention] This relates to an expander device, in which the structure of the beam expander device is unitized, and the ionization phenomenon that occurs when the energy of a high-power laser is concentrated in one point is eliminated to achieve clear expansion. The purpose is to obtain light.

従来よシレザー等のビームを拡大させる手段は。Conventionally, there is a means to expand the beam such as a scissor.

所謂ガリレオ型とケプレル型と称される二つの装置が代
表的である。
Two typical devices are the so-called Galileo type and Kepreel type.

カリレオ型は,所定の間隔をおいて凹レンズと凸レンズ
とを配置固定し,凹レンズに入射されたビームを拡大さ
せ,更に凸レンズを介して拡大さるものであるが,ビー
ムを集光させることが出来ないので空間周波数フィルタ
リングが行なわれず。
In the Carileo type, a concave lens and a convex lens are arranged and fixed at a predetermined interval, and the beam incident on the concave lens is expanded and then further expanded through the convex lens, but the beam cannot be focused. Therefore, no spatial frequency filtering is performed.

凹レンズに対する純粋な平行光のみを抽出することが出
来ない憾みがあった。
There was a regret that it was not possible to extract only pure parallel light to the concave lens.

これに対してケプレル型は,所定間隔全おいて一対の凸
しンズケ配置固定し一方の凸レンズに入射するビームを
一担集光し,この焦点位置で空間周波数フィルターによ
ってフィルタリングし,他方の凸レンズで更に拡大させ
る方式であるが,前記ビームがハイパワーのレザーであ
ると,一点に集中させた際のエネルギーが極めて太きい
ものとなる為に電離現象が生じ,衝撃音だけでなく,透
過した拡大光に著しい乱れが生じることになる欠点があ
った。
On the other hand, in the Kepreel type, a pair of convex lenses is fixed at a predetermined interval, and the beam incident on one convex lens is focused once, filtered by a spatial frequency filter at this focal position, and then the beam is filtered by the other convex lens. This method further expands the beam, but if the beam is a high-power laser, the energy when concentrated at one point is extremely large, causing ionization, which causes not only the impact sound but also the transmitted expansion. The drawback was that it resulted in significant disturbances in the light.

従って従来は,ハイパワーレザーの場合には前記ガリレ
オ型イクスパンダー装置を採用せざるを得す、フィルタ
リングに大きな問題点が残存したのである。
Therefore, in the past, in the case of high-power lasers, the Galileo type expander device had to be adopted, and a major problem remained in filtering.

1だイクスパンダー装置は、所定のレンズを一定位置に
固定させなければならず、実施に際してのその設定も捷
た甚だ困難を極める。
The single expander device requires a predetermined lens to be fixed at a fixed position, and its setting is extremely difficult to implement.

本発明は、フィルタリングに関する上述のケプレル型の
利点を生かしながらもその欠点を解消し。
The present invention utilizes the above-mentioned advantages of Kepreel filtering while eliminating its disadvantages.

更には装置の一体ユニット化を図るべく開発されたビー
ムイクスパングー装置であって、筒形状の保持体の両開
口端に一対のレンズ等の光梨光体を配して保持体全密封
すると共に、該保持体内の少なくとも焦点部分を真空に
したものであり、以下本発明の一実施例を図面に従って
説明する。
Furthermore, the Beam Expansion device was developed to integrate the device into an integrated unit, and the holder is completely sealed by placing a pair of optical elements such as lenses at both open ends of the cylindrical holder. In addition, at least the focal point inside the holder is evacuated.An embodiment of the present invention will be described below with reference to the drawings.

先ず図中符号Iは筒形状の所定長さを有する保持体であ
って、その筒壁2の一部には、保持体1内と連通ずる吸
気筒3がコック4を介して開閉自在に取り付けら゛れ、
この吸気筒3の先端はバキューム装置(図示せず)と連
通している。
First, reference numeral I in the figure is a cylindrical holder having a predetermined length, and an intake cylinder 3 communicating with the inside of the holder 1 is attached to a part of the cylindrical wall 2 via a cock 4 so as to be openable and closable. Rare,
The tip of this intake cylinder 3 communicates with a vacuum device (not shown).

両端が開[二1した前記保持体1の一方端には内径の大
きい内鍔5,1だ他方端には内径の小さい内鍔6が人々
周設され、6上記両内鍔5,6の開口には、光年光体と
して夫々所定の凸レンズ7.8が同一の光軸線」−に対
向して接着剤等を介して気密に嵌め込丑れて、更に保持
体]内にあって、小径ノ凸レンズ8の焦点位置には、ピ
ンホール、或いは直線状、くさひ状等のスリット等を有
する空間周波数フィルター9が固定されている。
Both ends of the holding body 1 are open, and one end thereof is provided with an inner collar 5, 1 having a large inner diameter, and the other end is provided with an inner collar 6 having a small inner diameter. In the aperture, predetermined convex lenses 7 and 8 as optical bodies are fitted airtightly through an adhesive or the like, facing the same optical axis, and further within the holder, A spatial frequency filter 9 having a pinhole, linear or wedge-shaped slit, etc. is fixed at the focal point of the small diameter convex lens 8.

従って前記コック4を閉鎖することによって保持体Jは
密封されることになるが1本発明に係るイクスパング一
体は前述のバキューム装置によって保持体1内の空気を
所望量だけ抜いて密封した状態としている。
Therefore, by closing the cock 4, the holding body J is sealed. However, in the expander assembly according to the present invention, a desired amount of air is removed from the holding body 1 by the vacuum device described above, and the air is sealed. .

これは、使用目的、状況に応じて自由に真空度を調整し
得るようにする為であるが、場合によっては前記コック
4を配さす、製作時に吸気筒3音13分で所定量の空気
を抜いた後ガラス等にょる溶着シールを施す形態として
もよい。
This is so that the degree of vacuum can be adjusted freely depending on the purpose and situation of use, but in some cases, the cock 4 may be installed to pump a predetermined amount of air into the intake cylinder in 3 sounds and 13 minutes. It is also possible to apply a welding seal using glass or the like after removing it.

丑だ上記実施例では保持体1内全体全真空とする場合に
ついて述べたが、後述するように本発明では空間周波数
フィルター9のピンホール等ノ近傍のみが真空であれば
よいのであるから、従って。
Unfortunately, in the above embodiment, the case where the entire inside of the holder 1 is completely vacuum has been described, but as will be described later, in the present invention, only the vicinity of the pinhole etc. of the spatial frequency filter 9 needs to be vacuum. .

空間周波数フィルター9を固定した短筒形状の保持体]
の両端を平板ガラスで密封して空気を抜いた状態とし、
この保持体1の前後方所足位置に夫々凸レンズを配する
構成とすることも自在である。
[Short cylindrical holder with fixed spatial frequency filter 9]
Both ends are sealed with flat glass to remove air,
It is also possible to arrange convex lenses at the front and rear positions of the holder 1, respectively.

以」二説明したような構成を表わした図面にあって、レ
ザー等のビームBは小径の凸レンズ8を透過して焦点位
置で集光されて空間周波数フィルター9によりフィルタ
リングされ、大径のレンズ7を透過して拡大光として射
出される。
In the drawings showing the configuration as described above, a laser beam B passes through a small diameter convex lens 8, is condensed at the focal point, is filtered by a spatial frequency filter 9, and then passes through a large diameter lens 7. It passes through and is emitted as enlarged light.

との」烏合本発明では、内部の少なくともフィルター9
近傍では真空となっているので、ハイパワーのレザービ
ームが集光されて高いエネルギーが発生しても電離現象
が生じる屓れはないのである。
In the present invention, at least the internal filter 9
Since there is a vacuum in the vicinity, even if a high-power laser beam is focused and high energy is generated, there will be no ionization phenomenon.

但し内部の真空度をどの程度とするかは、ビームのパワ
ー状態に従って設定されることになろう。
However, the degree of vacuum inside will be determined according to the power state of the beam.

尚9本発明のイクスパンダー装置体を利用し。In addition, 9 uses the expander device body of the present invention.

真空状態とする代りに内部にアルゴン等のガスを刺入す
る手段も考えられるが、瞬間的に生じる電誰現象に対し
てどこまで有効に作用し得るか疑問なしとしない。
Instead of creating a vacuum state, a method of injecting a gas such as argon into the interior could be considered, but there is no doubt as to how effectively it would work against the instantaneous electromagnetic phenomenon.

本発明に係る当ビームイクスパングー装置は以上説明し
たような構成をとり作用を営む。従って新開ケプレル型
方式によってハイパワーのレザービームを拡大させても
真空なるが故に電#現象力;生ずることはないので、得
られた拡大光が乱れることは全ぐl〈9 しかも空間周
波数フィルタリングが行えるので、拡大光が極めて鮮明
なものとなる。
The beam expanding device according to the present invention has the structure and functions as described above. Therefore, even if a high-power laser beam is expanded using the new Kepreel type method, since it is a vacuum, no electromagnetic force will be generated, so the obtained expanded light will not be disturbed at all.9 Moreover, spatial frequency filtering As a result, the expanded light becomes extremely clear.

また、一対の凸レンズ及びフィルターを保持体を介して
確固と一体保持す゛ることか出来るので。
In addition, it is possible to securely hold the pair of convex lenses and the filter together via the holder.

複雑なセツティング作業を必要とせず、実施に際しての
省力化が大いに期待出来る。
It does not require complicated setting work, and can be expected to greatly save labor during implementation.

而して不発明は、構成が簡単であって製造が容易であり
、所望の鮮明な拡大光を得ることが出来。
The invention has a simple structure and is easy to manufacture, and it is possible to obtain the desired clear magnified light.

ユニット化によって作業性を高めることが出来る等、多
くの優れた作用効果全奏する画期的なものである。
It is an epoch-making product that has many excellent functions and effects, such as being able to improve workability by unitizing it.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明に係るビームイクスパンダー装置体の断面
図である。 符号のh分明 ]・・保持体、3・吸気筒、7,8・・・凸レンズ。 9・空間周波数フィルター1、 出願人(発明者)  清 原 耕 来 代理人(弁理士)  荒 井 俊 之 ソ 12
The drawing is a sectional view of a beam expander device body according to the present invention. Symbol h division]... Holder, 3. Intake cylinder, 7, 8... Convex lens. 9. Spatial frequency filter 1, Applicant (inventor) Koki Kiyohara Agent (patent attorney) Toshiyuki Arai 12

Claims (1)

【特許請求の範囲】[Claims] 筒形状の保持体の両開口端に一対のレンズ等の光集光体
を対向配置すると共に、上記保持体内の所定位置に空間
周波数フィルターを固定し、更に内部の少なくとも前記
空間周波数フィルターのピンホール若くは所望形態のス
リット近傍を、真空状態にしたことを特徴とするビーム
イクスパンダー装置。
A pair of light condensers such as lenses are disposed facing each other at both opening ends of a cylindrical holder, a spatial frequency filter is fixed at a predetermined position within the holder, and a pinhole of at least the spatial frequency filter is fixed inside the holder. A beam expander device characterized in that the vicinity of a slit having a desired shape is kept in a vacuum state.
JP15064181A 1981-09-25 1981-09-25 Beam expander device Pending JPS5852616A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15064181A JPS5852616A (en) 1981-09-25 1981-09-25 Beam expander device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15064181A JPS5852616A (en) 1981-09-25 1981-09-25 Beam expander device

Publications (1)

Publication Number Publication Date
JPS5852616A true JPS5852616A (en) 1983-03-28

Family

ID=15501284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15064181A Pending JPS5852616A (en) 1981-09-25 1981-09-25 Beam expander device

Country Status (1)

Country Link
JP (1) JPS5852616A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63271312A (en) * 1987-04-30 1988-11-09 Chuo Seiki Kk Spacial filter
JPH06110010A (en) * 1992-09-29 1994-04-22 Toshiba Corp Optical device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63271312A (en) * 1987-04-30 1988-11-09 Chuo Seiki Kk Spacial filter
JPH0332046B2 (en) * 1987-04-30 1991-05-09 Chuo Seiki Kk
JPH06110010A (en) * 1992-09-29 1994-04-22 Toshiba Corp Optical device

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