JPS58500186A - 放出型電子顕微鏡 - Google Patents
放出型電子顕微鏡Info
- Publication number
- JPS58500186A JPS58500186A JP57500360A JP50036082A JPS58500186A JP S58500186 A JPS58500186 A JP S58500186A JP 57500360 A JP57500360 A JP 57500360A JP 50036082 A JP50036082 A JP 50036082A JP S58500186 A JPS58500186 A JP S58500186A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- region
- electron microscope
- electrons
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 claims description 197
- 230000004907 flux Effects 0.000 claims description 35
- 230000000903 blocking effect Effects 0.000 claims description 25
- 230000005855 radiation Effects 0.000 claims description 16
- 238000004458 analytical method Methods 0.000 claims description 15
- 238000001514 detection method Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 8
- 230000007935 neutral effect Effects 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000002265 prevention Effects 0.000 claims description 6
- 230000000638 stimulation Effects 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 2
- 230000007423 decrease Effects 0.000 claims description 2
- 230000035699 permeability Effects 0.000 claims description 2
- 230000004936 stimulating effect Effects 0.000 claims description 2
- 241000257303 Hymenoptera Species 0.000 claims 1
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 239000000523 sample Substances 0.000 description 106
- 238000000034 method Methods 0.000 description 18
- 230000007246 mechanism Effects 0.000 description 8
- 238000001420 photoelectron spectroscopy Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 229910052740 iodine Inorganic materials 0.000 description 4
- 239000011630 iodine Substances 0.000 description 4
- 239000012472 biological sample Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000001941 electron spectroscopy Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000013598 vector Substances 0.000 description 2
- 241000252233 Cyprinus carpio Species 0.000 description 1
- 241000220324 Pyrus Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 235000021017 pears Nutrition 0.000 description 1
- 238000002186 photoelectron spectrum Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000002366 time-of-flight method Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/285—Emission microscopes, e.g. field-emission microscopes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/825—Apparatus per se, device per se, or process of making or operating same
- Y10S505/879—Magnet or electromagnet
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB8101364 | 1981-01-16 | ||
| GB8101364 | 1981-01-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58500186A true JPS58500186A (ja) | 1983-02-03 |
| JPH0367301B2 JPH0367301B2 (enExample) | 1991-10-22 |
Family
ID=10519026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57500360A Granted JPS58500186A (ja) | 1981-01-16 | 1982-01-15 | 放出型電子顕微鏡 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4486659A (enExample) |
| EP (1) | EP0069750B1 (enExample) |
| JP (1) | JPS58500186A (enExample) |
| DE (1) | DE3276143D1 (enExample) |
| WO (1) | WO1982002624A1 (enExample) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2122806B (en) * | 1982-06-17 | 1986-01-22 | Thor Cryogenics Ltd | X-ray source apparatus |
| FR2534688A1 (fr) * | 1982-10-19 | 1984-04-20 | Commissariat Energie Atomique | Dispositif d'examen d'echantillons par emission electronique |
| US4554457A (en) * | 1983-07-08 | 1985-11-19 | Surface Science Laboratories, Inc. | Magnetic lens to rotate transverse particle momenta |
| US5045696A (en) * | 1989-03-31 | 1991-09-03 | Shimadzu Corporation | Photoelectron microscope |
| US5128543A (en) * | 1989-10-23 | 1992-07-07 | Charles Evans & Associates | Particle analyzer apparatus and method |
| JP2590417B2 (ja) * | 1992-06-19 | 1997-03-12 | 工業技術院長 | オージェ電子分光装置 |
| US5569916A (en) * | 1992-07-09 | 1996-10-29 | Agency Of Industrial Science & Technology, Ministry Of International Trade & Industry | Electron spectroscopy apparatus |
| US6326617B1 (en) * | 1997-09-04 | 2001-12-04 | Synaptic Pharmaceutical Corporation | Photoelectron spectroscopy apparatus |
| US6198299B1 (en) | 1998-08-27 | 2001-03-06 | The Micromanipulator Company, Inc. | High Resolution analytical probe station |
| US6744268B2 (en) | 1998-08-27 | 2004-06-01 | The Micromanipulator Company, Inc. | High resolution analytical probe station |
| JP2005257538A (ja) * | 2004-03-12 | 2005-09-22 | Riken Keiki Co Ltd | 光電子測定装置 |
| US7399963B2 (en) * | 2005-09-27 | 2008-07-15 | Revera Incorporated | Photoelectron spectroscopy apparatus and method of use |
| US7608838B1 (en) | 2007-01-15 | 2009-10-27 | Raymond Browning | Electron optical component |
| US7569816B1 (en) | 2007-01-15 | 2009-08-04 | Raymond Browning | Electron spectrometer |
| US7718961B1 (en) | 2007-01-15 | 2010-05-18 | Raymond Browning | Photoelectron microscope |
| US20110006205A1 (en) * | 2009-07-12 | 2011-01-13 | Raymond Browning | Ambient pressure photoelectron microscope |
| US20110017909A1 (en) * | 2009-07-21 | 2011-01-27 | Raymond Browning | Electron imaging apparatus with image processing |
| US8295443B2 (en) | 2010-07-07 | 2012-10-23 | King Fahd University Of Petroleum And Minerals | X-ray system with superconducting anode |
| US20120298861A1 (en) * | 2011-05-23 | 2012-11-29 | Raymond Browning | Vector Potential Photoelectron Microscope |
| DE102013006535B4 (de) * | 2013-04-15 | 2025-11-06 | Carl Zeiss Microscopy Gmbh | Raster-Partikelstrahlmikroskop mit energiefilterndem Detektorsystem |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3822382A (en) * | 1971-08-17 | 1974-07-02 | Jeol Ltd | Apparatus for analyzing electron energy |
| US4096386A (en) * | 1977-04-04 | 1978-06-20 | Taylor-Kincaid Company | Light reflecting electrostatic electron lens |
-
1982
- 1982-01-15 WO PCT/GB1982/000008 patent/WO1982002624A1/en not_active Ceased
- 1982-01-15 EP EP82900282A patent/EP0069750B1/en not_active Expired
- 1982-01-15 JP JP57500360A patent/JPS58500186A/ja active Granted
- 1982-01-15 US US06/420,223 patent/US4486659A/en not_active Expired - Fee Related
- 1982-01-15 DE DE8282900282T patent/DE3276143D1/de not_active Expired
Non-Patent Citations (1)
| Title |
|---|
| THE COLLIMATING AND MAGNIFYING.PROPERTIES OF A SUPER CONDUCTING FIELD PHOTOELECTRON SPECTROMETER=1980 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO1982002624A1 (en) | 1982-08-05 |
| US4486659A (en) | 1984-12-04 |
| DE3276143D1 (en) | 1987-05-27 |
| EP0069750B1 (en) | 1987-04-22 |
| EP0069750A1 (en) | 1983-01-19 |
| JPH0367301B2 (enExample) | 1991-10-22 |
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