JPS5844835U - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS5844835U
JPS5844835U JP14031481U JP14031481U JPS5844835U JP S5844835 U JPS5844835 U JP S5844835U JP 14031481 U JP14031481 U JP 14031481U JP 14031481 U JP14031481 U JP 14031481U JP S5844835 U JPS5844835 U JP S5844835U
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
manufacturing equipment
core tube
lid body
furnace core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14031481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6223085Y2 (enrdf_load_stackoverflow
Inventor
牛山　洋一
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP14031481U priority Critical patent/JPS5844835U/ja
Publication of JPS5844835U publication Critical patent/JPS5844835U/ja
Application granted granted Critical
Publication of JPS6223085Y2 publication Critical patent/JPS6223085Y2/ja
Granted legal-status Critical Current

Links

JP14031481U 1981-09-21 1981-09-21 半導体製造装置 Granted JPS5844835U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14031481U JPS5844835U (ja) 1981-09-21 1981-09-21 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14031481U JPS5844835U (ja) 1981-09-21 1981-09-21 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS5844835U true JPS5844835U (ja) 1983-03-25
JPS6223085Y2 JPS6223085Y2 (enrdf_load_stackoverflow) 1987-06-12

Family

ID=29933476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14031481U Granted JPS5844835U (ja) 1981-09-21 1981-09-21 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS5844835U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6446920A (en) * 1988-06-24 1989-02-21 Sony Corp Open-close mechanism for cover body
JPH03116823A (ja) * 1989-09-29 1991-05-17 Toshiba Corp 炉芯管開閉装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750846U (enrdf_load_stackoverflow) * 1980-09-09 1982-03-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750846U (enrdf_load_stackoverflow) * 1980-09-09 1982-03-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6446920A (en) * 1988-06-24 1989-02-21 Sony Corp Open-close mechanism for cover body
JPH03116823A (ja) * 1989-09-29 1991-05-17 Toshiba Corp 炉芯管開閉装置

Also Published As

Publication number Publication date
JPS6223085Y2 (enrdf_load_stackoverflow) 1987-06-12

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