JPS5842793B2 - Brazing material for diffusion bonding and its manufacturing method - Google Patents

Brazing material for diffusion bonding and its manufacturing method

Info

Publication number
JPS5842793B2
JPS5842793B2 JP14872181A JP14872181A JPS5842793B2 JP S5842793 B2 JPS5842793 B2 JP S5842793B2 JP 14872181 A JP14872181 A JP 14872181A JP 14872181 A JP14872181 A JP 14872181A JP S5842793 B2 JPS5842793 B2 JP S5842793B2
Authority
JP
Japan
Prior art keywords
brazing material
brazing
diffusion bonding
base
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14872181A
Other languages
Japanese (ja)
Other versions
JPS5850194A (en
Inventor
周一 小松
博光 竹田
昌子 中橋
専治 島貫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP14872181A priority Critical patent/JPS5842793B2/en
Publication of JPS5850194A publication Critical patent/JPS5850194A/en
Publication of JPS5842793B2 publication Critical patent/JPS5842793B2/en
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0233Sheets, foils

Description

【発明の詳細な説明】 本発明は拡散接合用ロウ材及びその製造方法、更に詳し
くは母材間の相対位置がずれることなく極めて高精度で
母材を容易に接合することのできる拡散接合用ロウ材と
その製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a brazing material for diffusion bonding and a method for manufacturing the same, and more particularly, to a soldering material for diffusion bonding that allows base materials to be easily joined with extremely high precision without shifting the relative positions of the base materials. Concerning brazing material and its manufacturing method.

最近、各種機械類、部品の複雑化及びそれに伴う高精度
化への要望が高まり、そのため、各種部品への高度な接
合技術の開発が進められている。
BACKGROUND ART Recently, various machines and parts have become more complex and demands for higher precision have increased, and therefore, advanced joining techniques for various parts are being developed.

多くの接合技術のうち、ロウ接法は、外部からは客扱に
みられるように直接施工することが不可能である内部の
接合も可能とする方法であって、近時、複雑な形状部品
の接合には広く適用されている。
Among the many joining techniques, brazing is a method that can also be used to join internally, which is impossible to do directly from the outside as seen in customer service. It is widely applied for joining.

このロウ接法は、接合すべき母材の間に、該母材より低
融点であって、一般には該母材と材料組成の異なるロウ
材を介在させ、接合部を所定温度に加熱して該ロウ材を
溶融、流動化せしめ該接合部に充分行きわたらせた後、
冷却して凝固せしめるという方法である。
This brazing method involves interposing a brazing material between the base materials to be joined, which has a lower melting point than the base materials and generally has a different material composition from the base materials, and heats the joint to a predetermined temperature. After melting and fluidizing the brazing material and sufficiently distributing it to the joint,
This method involves cooling and solidifying it.

したがって、この方法で接合された部材は、当然にもそ
の使用温度が接合に用いたロウ材0)融点以下であり、
しかも接合部の機械的強度はロウ材の強度によって規定
されるという本質的な制約条件がある。
Therefore, the working temperature of the members joined by this method is naturally below the melting point of the brazing material used for joining,
Moreover, there is an essential constraint that the mechanical strength of the joint is determined by the strength of the brazing material.

このような問題を解決して開発されたのが拡散接合方法
である。
The diffusion bonding method was developed to solve these problems.

この方法は、接合すべき母材とその材料組成がほぼ同質
のロウ材(拡散接合用ロウ材)を用い、液相拡散の原理
を適用したものである。
This method uses a brazing material (diffusion bonding brazing material) that has substantially the same material composition as the base material to be joined, and applies the principle of liquid phase diffusion.

このようなロウ材としては、例えば、N1jCrを主成
分とし、B、Si、P等を融点低下元素として含有する
メトグラスMFB80(商品名)が知られている。
As such a brazing material, for example, Metglass MFB80 (trade name), which contains N1jCr as a main component and contains B, Si, P, etc. as melting point lowering elements, is known.

その方法の一例を示せば以下のとおりである。An example of the method is as follows.

まず接合すべき母材の接合面にあわせてロウ材を切断・
加工する(工程1)、つぎに該ロウ材を母材の接合面に
配置する(工程2)、全体を所定の押し型内に設置する
(工程3)、ついで全体を所定温度の炉内に入れてロウ
材を溶融する(工程4)、その温度に所定時間保持し、
溶融したロウ材を母材に液相拡散せしめることによって
母材を接合する(工程5)という一連の工程から成り立
つものである。
First, cut the brazing material to match the joining surface of the base materials to be joined.
Processing (Step 1), Next, the brazing material is placed on the joint surface of the base metal (Step 2), The whole is placed in a predetermined pressing die (Step 3), Then the whole is placed in a furnace at a predetermined temperature. to melt the brazing material (step 4), hold it at that temperature for a predetermined time,
This process consists of a series of steps in which the base materials are bonded by liquid-phase diffusion of molten brazing filler metal into the base materials (step 5).

工程5においては、ロウ材の等温凝固現象が起っている
In step 5, isothermal solidification of the brazing material occurs.

この方法によれば、ロウ材は母材へ液相拡散して等温凝
固するので、得られた接合部は母材とほぼ同質の組成と
なり、したがって、その耐熱性、機械的強度などは母材
に比べても遜色のないものとなる。
According to this method, the brazing metal diffuses into the base metal in a liquid phase and solidifies isothermally, so the resulting joint has a composition that is almost the same as that of the base metal, and therefore its heat resistance, mechanical strength, etc. It is comparable to that of .

すなわち、接合部の材質特性はより優れたものとなる。In other words, the material properties of the joint become more excellent.

しかしながら、この方法における大きな問題点は、母材
間の接合精度を高めるために、高精度の押し型及びその
付帯設備を必要とすることである。
However, a major problem with this method is that it requires a high-precision press die and its ancillary equipment in order to improve the joining accuracy between the base materials.

ロウ材は工程4において完全に溶融する。The brazing material is completely melted in step 4.

したがって、母材は相互に水平又は垂直方向に遊動し得
る状態となる。
Therefore, the base materials can move horizontally or vertically relative to each other.

接合部の寸法精度を高めるためには、この遊動状態にあ
る母材の動きを抑制しなければならない。
In order to improve the dimensional accuracy of the joint, it is necessary to suppress the movement of the base material in this floating state.

型は、そのために用いられるからである。This is because the type is used for that purpose.

接合部の形状が複雑になれば、それに対応して用いる型
も複雑となり、また、接合すべき母材が多種異形の場合
には、それに合わせて型も個々に対応させなければなら
ない。
As the shape of the joint becomes more complex, the molds used also become more complex, and when the base materials to be joined have a variety of different shapes, the molds must be individually adapted to suit them.

本発明者らは、拡散接合方法における上記のような欠点
がロウ材の溶融に基づく母材の遊動に基因するものであ
ることに着目した。
The present inventors have focused on the fact that the above-mentioned drawbacks of the diffusion bonding method are due to the movement of the base material due to melting of the brazing material.

しかしながら一方では溶融したロウ材の母材への液相拡
散は、時間の経過とともに、その液相温度を高温側に移
行せしめるという等温凝固現象にも着目し、この現象を
有効に利用することによって母材の遊動を招かない拡散
接合用ロウ材とその製造方法を開発するに到った。
However, on the other hand, we also focused on the isothermal solidification phenomenon in which the liquid phase diffusion of molten brazing material into the base metal causes the liquid phase temperature to shift to a higher temperature side as time passes, and by making effective use of this phenomenon. We have developed a brazing material for diffusion bonding that does not cause movement of the base material, and a method for manufacturing the same.

本発明は、接合すべき母材を遊動させることがないので
押し型を用いることを不要とし、かつ、高精度で母材を
容易に接合し得る拡散接合用ロウ材とその製造方法を提
供することに目的がある。
The present invention provides a brazing material for diffusion bonding and a method for manufacturing the same, which eliminates the need to use a press die because the base materials to be joined do not move freely, and which can easily join the base materials with high precision. It has a purpose.

本発明のロウ材は、融点の異なる2種類のロウ材の薄帯
が帯幅方向に交互に連接した一体的構造を有し、その製
造方法は、複数個の耐熱容器のそれぞれの中で、融点の
異なる2種類のロウ材の原料を別々に溶融し;溶融した
ロウ材のそれぞれを、該容器に設けられたノズルであっ
て、それぞれが交互に並夕lルて配設された複数個のノ
ズル群から、回転体の回転面に、同時に射出して冷却す
ることを特徴とするものである。
The brazing material of the present invention has an integral structure in which thin strips of two types of brazing materials with different melting points are alternately connected in the band width direction, and the method for manufacturing the brazing material is as follows: Two types of brazing materials having different melting points are melted separately; each of the molten brazing materials is passed through a plurality of nozzles provided in the container, each of which is arranged alternately in a row. It is characterized by simultaneously injecting and cooling the rotating surface of the rotating body from the nozzle group.

第1図に、本発明のロウ材の1例を一部切欠斜視図とし
て示した。
FIG. 1 shows an example of the brazing material of the present invention as a partially cutaway perspective view.

図において、1.1’はそれぞれ融点の異なるロウ材(
以後、ロウ材1を低融点ロウ材(融点T1)、ロウ材1
′を高融点ロウ材(融点T2)という。
In the figure, 1.1' are brazing materials with different melting points (
Thereafter, the brazing material 1 will be replaced with a low melting point brazing material (melting point T1) and the brazing material 1.
' is called a high melting point brazing material (melting point T2).

)の薄帯である。各薄帯は、図のようにその帯幅方向に
沿って、交互に複数枚連続して一体化している。
) thin strip. As shown in the figure, a plurality of thin strips are alternately and consecutively integrated along the width direction of the strip.

図は、各薄帯2枚、計4枚を連設して成る例であるが、
本発明のロウ材はこれに限らず、融点の異なる2種類の
薄帯が交互に帯幅方向に接合しているものであればその
薄帯の枚数は何枚であってもよい。
The figure shows an example in which two thin strips of each type are installed in a row, a total of four strips.
The brazing material of the present invention is not limited to this, and the number of thin strips may be any number as long as two types of thin strips having different melting points are alternately joined in the width direction of the strip.

本発明のロウ材は、次のようにして拡散接合に供される
The brazing material of the present invention is used for diffusion bonding as follows.

すなわち、接合すべき母材の接合面の間に、このロウ材
を介在させ、全体を例えば真空ホットプレス中に挿入し
て母材間に圧力を印加して、該ロウ材を接合面の間に固
定する。
That is, the brazing material is interposed between the joining surfaces of the base materials to be joined, and the entire body is inserted into a vacuum hot press, for example, and pressure is applied between the base materials, so that the brazing material is inserted between the joining surfaces. Fixed to.

このとき、母材とロウ材との接触界面では、微視的にみ
れば、両者は点接触状態となっている。
At this time, at the contact interface between the base material and the brazing material, microscopically, the two are in a point contact state.

ついで、接合部をT1より高く、かつ、T2より低い温
度に加熱して該温度に所定時間保持する。
Next, the joint is heated to a temperature higher than T1 and lower than T2, and held at this temperature for a predetermined period of time.

ロウ材1は溶融して液相状態になり母材との間では点接
触状態から面接触状態になって両者間の接触面積が増大
する。
The brazing material 1 melts into a liquid state, and changes from a point contact state to a surface contact state with the base metal, increasing the contact area between the two.

ロウ材1′は溶融しないで固相状態のまま存在し、母材
との間で接触面積の小さい点接触状態を維持する。
The brazing material 1' does not melt but exists in a solid state, and maintains a point contact state with a small contact area with the base material.

溶融したロウ材1は、時間の経過とともに面接触状態に
ある母材との接触界面を介して母材へ液相拡散し、その
結果、等温凝固してその液相温度T3が上昇する。
As time passes, the melted brazing material 1 diffuses into the base material through the contact interface with the base material in a surface contact state, and as a result, isothermally solidifies and its liquidus temperature T3 increases.

一方、このとき、ロウ材1′中の融点降下剤も母材へ拡
散していく性向を示すが、しかし、上記したようにロウ
材′と母材とは点接触状態にあって両者間の接触面積は
著しく小さいので、該融点降下剤が母材中に拡散してい
くということは実質的には生じない。
On the other hand, at this time, the melting point depressant in the brazing material 1' also shows a tendency to diffuse into the base material, but as mentioned above, the brazing material' and the base material are in point contact and there is a gap between them. Since the contact area is extremely small, there is virtually no diffusion of the melting point depressant into the matrix.

T3がT2よりも充分大きくなった時点で、接合部をT
2より高く、かつT3より低い温度に加熱して該温度で
所定時間保持する。
When T3 becomes sufficiently larger than T2, the joint is
2 and lower than T3 and held at that temperature for a predetermined time.

ロウ材1′は溶融するが、液相拡散しているロウ材1は
T3がT2より高いため溶融せず固相状態にある。
The brazing material 1' melts, but the brazing material 1, which has undergone liquid phase diffusion, does not melt and remains in a solid state because T3 is higher than T2.

溶融したロウ材1′は時間の経過とともに、母材へ液相
拡散して等温凝固する。
As time passes, the molten brazing material 1' diffuses into the base metal in a liquid phase and solidifies isothermally.

本発明のロウ材を用いて母材を拡散接合すれば、上記の
説明であきらかなように、接合時にあっては、ロウ材1
及びロウ材1′のいずれかは固相状態にあり両者が同時
に溶融することがないので、母材の遊動することがない
If the base materials are diffusion bonded using the brazing material of the present invention, as is clear from the above explanation, the brazing material 1
Either the brazing material 1' and the brazing material 1' are in a solid state and do not melt at the same time, so there is no movement of the base material.

したがって、押し型を用いることなく、母材をセットし
た時と同一の状態でそのまま接合することができる。
Therefore, without using a pressing die, the base materials can be joined in the same state as when they were set.

したがって、その接合の精度は自ずから高まる。Therefore, the accuracy of the joining increases naturally.

本発明のロウ材は次のようにして製造することができる
The brazing material of the present invention can be manufactured as follows.

第2図は、本発明ロウ材を製造するための装置の1例を
示す概念的模式図で、11゜11′は例えが石英ガラス
のような耐熱材料から成る容器で、その中には融点の異
なるロウ材の原料がそれぞれ別々に収容されている。
FIG. 2 is a conceptual diagram showing an example of an apparatus for producing the brazing material of the present invention. Reference numeral 11° and 11' denote a container made of a heat-resistant material such as quartz glass; The raw materials for different brazing materials are stored separately.

容器11゜11′には高周波加熱コイルのような加熱手
段12が周設され、該手段を作動して該原料が溶融され
る。
A heating means 12 such as a high frequency heating coil is disposed around the container 11, 11', and the raw material is melted by activating the means.

13 、13’はそれぞれ溶融している融点の異なるロ
ウ材である。
13 and 13' are melted brazing materials having different melting points.

容器11 、11 ’の底部には、複数本(図では各3
本)のノズル14a、14b、14c、14’a。
At the bottom of the containers 11 and 11', there are multiple tubes (3 each in the figure).
(book) nozzles 14a, 14b, 14c, 14'a.

14’b 、 14’cが設けられている。14'b and 14'c are provided.

各ノズルは、例えば図のように14a、14’a、14
b。
Each nozzle is, for example, 14a, 14'a, 14 as shown in the figure.
b.

14’b 、14c 、14’cと交互に並列(図では
横一線である。
14'b, 14c, and 14'c are alternately arranged in parallel (in the figure, they are a horizontal line).

)に配設される。15は、容器11゜11′から、溶融
したロウ材13 、13’を、それぞれ対応したノズル
に供給するための弁である。
). Reference numeral 15 indicates a valve for supplying the molten brazing filler metals 13 and 13' from the containers 11° and 11' to the corresponding nozzles, respectively.

並列する各ノズルの下には、所定の距離を置いて、例え
ば銅製ロールのような回転体16が配設され、矢印P方
向に回転する。
A rotating body 16, such as a copper roll, is disposed at a predetermined distance below each of the parallel nozzles and rotates in the direction of arrow P.

溶融したロウ材13 、13’は、容器11.11’の
上方開口端に気密に接続されるガス圧入装置(図示しな
い)から圧入されたガスによって、各ノズルから回転体
16の回転面に射出されて急冷する。
The molten brazing filler metals 13 and 13' are injected from each nozzle onto the rotating surface of the rotating body 16 by gas press-injected from a gas injection device (not shown) airtightly connected to the upper open end of the container 11, 11'. and then cooled quickly.

このとき、ノズル相互間の間隔、回転体の速度、射出量
等を適宜に選択することによって、各ノズルから射出さ
れたロウ材の薄片は、相互にその側面で接触し、そのま
ま急冷されることによって、全体として各薄帯が帯幅方
向に交互に連接した一体的なロウ材17を連続的に製造
することができる。
At this time, by appropriately selecting the distance between the nozzles, the speed of the rotating body, the injection amount, etc., the thin pieces of brazing material injected from each nozzle can contact each other on their sides and be rapidly cooled as they are. As a result, it is possible to continuously manufacture an integrated brazing material 17 in which the ribbons are alternately connected in the width direction.

なお、図では1つの容器に3本のノズルを設けた例を示
したが、装置の態様は限定されることはない。
Note that although the figure shows an example in which one container is provided with three nozzles, the aspect of the apparatus is not limited.

要は、融点の異なる2種類のロウ材を射出するノズルが
交互に並列して配設されることによってのみ、本発明の
ロウ材の製造が可能である。
In short, the brazing material of the present invention can only be produced by alternately arranging nozzles that inject two types of brazing materials having different melting points in parallel.

以下に本発明を実施例に基づいて説明する。The present invention will be explained below based on examples.

実施例 第2図に示した装置を組立てた。Example The apparatus shown in FIG. 2 was assembled.

各ノズルの開口部の断面形状は長さ3 am、幅0.4
7!mの矩形であった。
The cross-sectional shape of each nozzle opening is 3 am long and 0.4 am wide.
7! It was a rectangle of m.

これらのノズルは、そのノズル壁の肉厚部分に相当する
長さだけ互い違いに前後にずらしてジグザグに配列され
、実質的には各ノズルの開口部がその幅方向で連続する
ように横に並べられている。
These nozzles are arranged in a zigzag pattern, staggered back and forth by a length corresponding to the thickness of the nozzle wall, and are arranged side by side so that the opening of each nozzle is substantially continuous across its width. It is being

また、ノズルとロールとの間隔は0.2朋であった。Further, the distance between the nozzle and the roll was 0.2 mm.

まず、容器11に組成がN i −15,2Cr−4B
(融点1065℃)のロウ材、容器11′に組成がNi
−7Cr−3Fe−4,58i−3,2B(融点100
0℃)のロウ材を充填し、高周波加熱コイル12を作動
して上記ロウ材を1350℃まで加熱して、全量を溶融
した。
First, the composition of the container 11 is N i -15,2Cr-4B.
(melting point 1065°C), the composition of the container 11' is Ni.
-7Cr-3Fe-4,58i-3,2B (melting point 100
0° C.), and the high-frequency heating coil 12 was activated to heat the brazing material to 1350° C. to melt the entire amount.

ついで、溶融ロウ材13.13’にアルゴンガスを用い
て0.2気圧のガス圧をかけ、弁15を開いて、各ノズ
ルから、200Orpmで回転する銅製ロール16の回
転面に、溶融ロウ材を射出した。
Next, a gas pressure of 0.2 atm is applied to the molten brazing material 13, 13' using argon gas, the valve 15 is opened, and the molten brazing material is poured from each nozzle onto the rotating surface of the copper roll 16 rotating at 200 rpm. ejected.

融点の異なる薄帯が交互に連接した一体的構造のロウ材
の帯17が得られた。
A braze material strip 17 having an integral structure in which thin strips having different melting points were alternately connected was obtained.

厚みは35μmであった。ついで、このロウ材の帯をそ
のまま、Ni基超超合金lN738製部品の間に挟み込
み、部品押え用の型を用いることなくそ0まま全体に0
.3kg//Im2の圧力を上下方向に加えて、2X1
0−5Torrの真空中で、まず1010℃で1時間加
熱処理し、ついで1070℃で1.5時間加熱処理した
The thickness was 35 μm. Next, this band of brazing material is sandwiched as it is between parts made of Ni-based superalloy lN738, and the entire part is completely zeroed without using a mold to hold the parts.
.. Applying pressure of 3kg//Im2 in the vertical direction, 2X1
In a vacuum of 0-5 Torr, heat treatment was first performed at 1010°C for 1 hour, and then at 1070°C for 1.5 hours.

部品間の相対位置のいずれは全く起らず、極めて高精度
の接合が可能であった。
There was no deviation in the relative position between the parts, and extremely high-precision joining was possible.

本発明のロウ材は以上の説明で明らかなように、押し型
を用いることなく、極めて精度の高い拡散接合を可能と
するのでその工業的価値は犬である。
As is clear from the above description, the brazing material of the present invention has great industrial value because it enables highly accurate diffusion bonding without using a press die.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明ロウ材の1例の一部切欠斜祝図、第2図
は本発明ロウ材の製造装置の1例を示す概念的模式図で
ある。 1・・・低融点ロウ材の薄帯、1′・・・高融点ロウ材
の薄帯、11,11’・・・容器、12・・・加熱手段
(高周波加熱コイル)、13.13’・・・溶融したロ
ウ材、14a〜14c 、 14’a〜147c・・・
ノズル、15・・・弁、16・・・回転体、17・・・
本発明のロウ材、P・・・回転方向を示す矢印。
FIG. 1 is a partially cutaway perspective view of an example of the brazing material of the present invention, and FIG. 2 is a conceptual diagram showing an example of an apparatus for manufacturing the brazing material of the present invention. 1... Thin strip of low melting point brazing material, 1'... Thin strip of high melting point brazing material, 11, 11'... Container, 12... Heating means (high frequency heating coil), 13.13' ...Melted brazing filler metal, 14a to 14c, 14'a to 147c...
Nozzle, 15... Valve, 16... Rotating body, 17...
Brazing material of the present invention, P... An arrow indicating the rotation direction.

Claims (1)

【特許請求の範囲】 1 融点の異なる2種類のロウ材の薄帯が、帯幅方向に
交互に連接した一体的構造の拡散接合用ロウ材。 2 複数個の耐熱容器のそれぞれの中で、融点の異なる
2種類のロウ材の原料を別々に溶融し;溶融したロウ材
のそれぞれを、該容器に設けられたノズルであって、そ
れぞれが交互に並列して配設された複数個のノズル群か
ら、回転体り回転面に同時に射出して冷却することを特
徴とする拡散接合用ロウ材の製造方法。
[Scope of Claims] 1. A brazing material for diffusion bonding having an integral structure in which thin strips of two types of brazing materials having different melting points are alternately connected in the width direction of the band. 2. In each of a plurality of heat-resistant containers, two types of brazing materials having different melting points are separately melted; 1. A method for producing a brazing material for diffusion bonding, which comprises simultaneously injecting onto a rotating surface of a rotating body and cooling it from a plurality of nozzle groups arranged in parallel.
JP14872181A 1981-09-22 1981-09-22 Brazing material for diffusion bonding and its manufacturing method Expired JPS5842793B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14872181A JPS5842793B2 (en) 1981-09-22 1981-09-22 Brazing material for diffusion bonding and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14872181A JPS5842793B2 (en) 1981-09-22 1981-09-22 Brazing material for diffusion bonding and its manufacturing method

Publications (2)

Publication Number Publication Date
JPS5850194A JPS5850194A (en) 1983-03-24
JPS5842793B2 true JPS5842793B2 (en) 1983-09-21

Family

ID=15459111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14872181A Expired JPS5842793B2 (en) 1981-09-22 1981-09-22 Brazing material for diffusion bonding and its manufacturing method

Country Status (1)

Country Link
JP (1) JPS5842793B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109562494A (en) * 2016-08-17 2019-04-02 三菱电机株式会社 The manufacturing method and manufacturing device of plate solder

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012000629A (en) * 2010-06-16 2012-01-05 Hitachi Ltd Connection material, semiconductor device, and method for manufacturing same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109562494A (en) * 2016-08-17 2019-04-02 三菱电机株式会社 The manufacturing method and manufacturing device of plate solder

Also Published As

Publication number Publication date
JPS5850194A (en) 1983-03-24

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