JPS5835952U - liquid spray device - Google Patents

liquid spray device

Info

Publication number
JPS5835952U
JPS5835952U JP1981131484U JP13148481U JPS5835952U JP S5835952 U JPS5835952 U JP S5835952U JP 1981131484 U JP1981131484 U JP 1981131484U JP 13148481 U JP13148481 U JP 13148481U JP S5835952 U JPS5835952 U JP S5835952U
Authority
JP
Japan
Prior art keywords
liquid
spray device
pipe
liquid spray
pass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1981131484U
Other languages
Japanese (ja)
Inventor
高瀬　則義
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP1981131484U priority Critical patent/JPS5835952U/en
Publication of JPS5835952U publication Critical patent/JPS5835952U/en
Pending legal-status Critical Current

Links

Landscapes

  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Nozzles (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の液体噴霧装置の原理を説明するための構
成略図、第２図はこの考案の一実施例を示す構成略図で
ある。 図中、１は加圧式タンク、２はスプレーノズル、３．８
は気体、４．　６．　９はパイプ、５は液体、　　　　
・７．１０は電磁バルブ、１１は大径部である。なお、
図中の同一符号は同一または相当部分を示す。FIG. 1 is a schematic structural diagram for explaining the principle of a conventional liquid spraying device, and FIG. 2 is a schematic structural diagram showing an embodiment of this invention. In the figure, 1 is a pressurized tank, 2 is a spray nozzle, 3.8
is a gas, 4. 6. 9 is a pipe, 5 is a liquid,
・7.10 is a solenoid valve, 11 is a large diameter part. In addition,
The same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 加圧式タンクからパイプを介して液体をスプレーノズル
に導き噴霧する液体噴霧装置において、前記パイプを前
記スプレーノズルより高い位置を経過させ低い位置を経
過しない構成とし、かつ、前記高い位置部分のパイプの
一部を太くした大径部を設けたことを特徴とする液体噴
霧装置。In a liquid spraying device that leads liquid from a pressurized tank to a spray nozzle through a pipe and sprays the liquid, the pipe is configured to pass through a position higher than the spray nozzle and not pass through a lower position, and the pipe in the high position portion is A liquid spray device characterized by having a large-diameter portion that is partially thickened.
JP1981131484U 1981-09-03 1981-09-03 liquid spray device Pending JPS5835952U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981131484U JPS5835952U (en) 1981-09-03 1981-09-03 liquid spray device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981131484U JPS5835952U (en) 1981-09-03 1981-09-03 liquid spray device

Publications (1)

Publication Number Publication Date
JPS5835952U true JPS5835952U (en) 1983-03-09

Family

ID=29925059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981131484U Pending JPS5835952U (en) 1981-09-03 1981-09-03 liquid spray device

Country Status (1)

Country Link
JP (1) JPS5835952U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5977225U (en) * 1982-11-15 1984-05-25 ソニー株式会社 Semiconductor device manufacturing equipment
JPS6242240U (en) * 1985-08-30 1987-03-13
JPH01205423A (en) * 1988-02-10 1989-08-17 Tokyo Electron Ltd Resist coater

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5977225U (en) * 1982-11-15 1984-05-25 ソニー株式会社 Semiconductor device manufacturing equipment
JPS6242240U (en) * 1985-08-30 1987-03-13
JPH01205423A (en) * 1988-02-10 1989-08-17 Tokyo Electron Ltd Resist coater

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