JPS5834398U - マイクロ波放電光源用電源装置 - Google Patents

マイクロ波放電光源用電源装置

Info

Publication number
JPS5834398U
JPS5834398U JP12893481U JP12893481U JPS5834398U JP S5834398 U JPS5834398 U JP S5834398U JP 12893481 U JP12893481 U JP 12893481U JP 12893481 U JP12893481 U JP 12893481U JP S5834398 U JPS5834398 U JP S5834398U
Authority
JP
Japan
Prior art keywords
relay
light source
power supply
voltage
discharge light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12893481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6118640Y2 (enrdf_load_html_response
Inventor
憲治 吉沢
勲 正田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12893481U priority Critical patent/JPS5834398U/ja
Publication of JPS5834398U publication Critical patent/JPS5834398U/ja
Application granted granted Critical
Publication of JPS6118640Y2 publication Critical patent/JPS6118640Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
JP12893481U 1981-08-31 1981-08-31 マイクロ波放電光源用電源装置 Granted JPS5834398U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12893481U JPS5834398U (ja) 1981-08-31 1981-08-31 マイクロ波放電光源用電源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12893481U JPS5834398U (ja) 1981-08-31 1981-08-31 マイクロ波放電光源用電源装置

Publications (2)

Publication Number Publication Date
JPS5834398U true JPS5834398U (ja) 1983-03-05
JPS6118640Y2 JPS6118640Y2 (enrdf_load_html_response) 1986-06-05

Family

ID=29922613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12893481U Granted JPS5834398U (ja) 1981-08-31 1981-08-31 マイクロ波放電光源用電源装置

Country Status (1)

Country Link
JP (1) JPS5834398U (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS6118640Y2 (enrdf_load_html_response) 1986-06-05

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