JPS5834281U - Dark field image detection device for scanning transmission electron microscope - Google Patents

Dark field image detection device for scanning transmission electron microscope

Info

Publication number
JPS5834281U
JPS5834281U JP12768581U JP12768581U JPS5834281U JP S5834281 U JPS5834281 U JP S5834281U JP 12768581 U JP12768581 U JP 12768581U JP 12768581 U JP12768581 U JP 12768581U JP S5834281 U JPS5834281 U JP S5834281U
Authority
JP
Japan
Prior art keywords
electron microscope
transmission electron
field image
detection device
scanning transmission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12768581U
Other languages
Japanese (ja)
Inventor
雅夫 井上
江藤　輝一
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP12768581U priority Critical patent/JPS5834281U/en
Publication of JPS5834281U publication Critical patent/JPS5834281U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、散乱角と原子散乱因子との関係を示すための
図、第２図は本考案の一実施例を示すための図である。 １、　２．　３：円環状検出素子、４：軸、５，６゜７
：増幅器、８：信号処理回路。FIG. 1 is a diagram showing the relationship between the scattering angle and the atomic scattering factor, and FIG. 2 is a diagram showing an embodiment of the present invention. 1, 2. 3: Annular detection element, 4: Axis, 5, 6°7
: Amplifier, 8: Signal processing circuit.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 透過電子線の中心ビームを共通中心軸として設置された
複数の円環状検出素子から成る装置において、該複数の
円環状検出素子の環の幅を中心軸から離れた検出素子は
ど大きくなるように構成したことを特徴とする走査透過
電子顕微鏡用暗視野像検出装置。In a device consisting of a plurality of annular detection elements installed with the central beam of a transmitted electron beam as a common central axis, the width of the ring of the plurality of annular detection elements is set so that the width of the ring of the plurality of annular detection elements becomes larger as the distance from the central axis increases. 1. A dark-field image detection device for a scanning transmission electron microscope, characterized by comprising:
JP12768581U 1981-08-28 1981-08-28 Dark field image detection device for scanning transmission electron microscope Pending JPS5834281U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12768581U JPS5834281U (en) 1981-08-28 1981-08-28 Dark field image detection device for scanning transmission electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12768581U JPS5834281U (en) 1981-08-28 1981-08-28 Dark field image detection device for scanning transmission electron microscope

Publications (1)

Publication Number Publication Date
JPS5834281U true JPS5834281U (en) 1983-03-05

Family

ID=29921406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12768581U Pending JPS5834281U (en) 1981-08-28 1981-08-28 Dark field image detection device for scanning transmission electron microscope

Country Status (1)

Country Link
JP (1) JPS5834281U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004259516A (en) * 2003-02-25 2004-09-16 Fujitsu Ltd Scanning transmission electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004259516A (en) * 2003-02-25 2004-09-16 Fujitsu Ltd Scanning transmission electron microscope

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