JPS5833307A - Supporting structure of tuning fork type piezoelectric oscillator - Google Patents
Supporting structure of tuning fork type piezoelectric oscillatorInfo
- Publication number
- JPS5833307A JPS5833307A JP466182A JP466182A JPS5833307A JP S5833307 A JPS5833307 A JP S5833307A JP 466182 A JP466182 A JP 466182A JP 466182 A JP466182 A JP 466182A JP S5833307 A JPS5833307 A JP S5833307A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- tuning fork
- vibrator
- fork type
- oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
- H03H9/0519—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は音叉型圧III振動子の固定、支持構造に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a fixing and supporting structure for a tuning fork type pressure III vibrator.
本発明の目的は齢記振動子の単純な支持構造を提出する
ことでるる。An object of the present invention is to provide a simple support structure for a resonator.
本発明は圧電振動子一般について適用されるものでるる
か、例として実験的経験量の多い水晶振動子を用いて説
明する。The present invention is applicable to piezoelectric vibrators in general, and will be explained using a crystal vibrator as an example, which has a large amount of experimental experience.
近年、水晶振動子の小型化がすすみ、これら振動子を時
間標準として用いた水lI&時計が数多く発表されるよ
うになった。このような用途の振動子に対して求められ
る条件は、1iiIiNfKシて小型、安価でるるとい
うことでるる、この目的に沿って開発された薄い音叉型
圧111!kR動子は、従来の機械的な方法ではなく、
写真技術と化学腐食技術を用いて作られるので、大朦生
産に適しているなど多くの長所を持っている。In recent years, crystal oscillators have become smaller, and many water clocks and clocks using these oscillators as time standards have been released. The conditions required for a vibrator for such purposes are that it be small, inexpensive, and thin. The kR mover is not a traditional mechanical method,
It is made using photographic technology and chemical corrosion technology, so it has many advantages such as being suitable for daytime production.
以下、とのLうにして開発された2**の音叉型水晶振
動子およびその従来例としての固定、結線方法についで
詳述する。Below, the 2** tuning fork type crystal resonator developed as described above and its conventional fixing and wiring method will be described in detail.
腑1図に示すのは第1の従来例でめシ、振動子1は厚さ
数100ミフロンNTカツト晶板↓如前述の写真−化学
腐食法によって抜きとら扛る。The first conventional example is shown in the figure, and the vibrator 1 is extracted from a NT cut crystal plate with a thickness of several 100 microfrons by chemical etching.
図の2,3は振動子に電界を加えるためのm極を示す、
を極2.5はワイヤー4.5をボンディングすることに
よって端子6.7に接続される。振動子1の裏面の電極
!の形状は11.2mK示される。2 and 3 in the figure show m poles for applying an electric field to the vibrator.
Pole 2.5 is connected to terminal 6.7 by bonding wire 4.5. Electrode on the back side of vibrator 1! The shape of is shown as 11.2mK.
振動子1は裏面電極の一部、第2図の10で示される部
分KLって電極端子を葦ねぇ固定台8に装着される。そ
の際、接着剤には合金ハンダ等導電性のものが用いられ
る。The vibrator 1 is mounted on a fixing base 8 with a part of the back electrode, a part KL indicated by 10 in FIG. 2, and an electrode terminal. At that time, a conductive adhesive such as alloy solder is used as the adhesive.
第S図は振動子1の抜き取られる方向を示す図であり、
X軸、Y軸、2軸は水晶の結晶軸である。FIG. S is a diagram showing the direction in which the vibrator 1 is extracted,
The X-axis, Y-axis, and 2-axis are the crystal axes of the crystal.
図のaは最初の回転角を、bは2に目の回転角を示し、
それぞれg9..1g’、55″〜70″の範囲内にと
られる。を極2.!、9にニジ第4図に示すように電界
が加えられると振動子1社音叉蚕動を始める1図ては簡
単にするために角aを零にしである。In the figure, a shows the initial rotation angle, b shows the eye rotation angle in 2,
each g9. .. 1g', taken within the range of 55'' to 70''. The pole 2. ! , 9. When an electric field is applied to oscillators 1 and 9, as shown in FIG. 4, the tuning fork begins to move. In FIG.
上記の振動子は非常に小型のものが容易に大量生産でき
るのであるが、第4wJK示されたとおり、振動子の駆
動に役立つのは電界11.12の内のX軸方向の成分1
3.14だけであるので角βが大きくなると勘インピー
ダンスは(2)雪βに反比例して大きくなる。また、周
波数一温度特性の零温度係数が得られる温度は角βが大
きい#lど高く、βは75@′e20℃となυ、そのと
き動インピーダンスは1MΩ以上にな・る、従って腕時
計用の水晶振動子として必要な零温f係畝の得られる温
度が25℃前後という条件を満すためKは角βを75″
′↓υさらに大きくしなければならず、この時動インピ
ーダンスは数10MΩとなシ、上記の脅叉脂水晶振動子
は腕時計に用いることは困難になる。The above-mentioned vibrators are extremely small and can be easily mass-produced, but as shown in the 4th wJK, only the component in the X-axis direction of the electric field 11.12 is useful for driving the vibrator.
3.14, so as the angle β increases, the impedance (2) increases in inverse proportion to the snow β. In addition, the temperature at which the zero temperature coefficient of the frequency-temperature characteristic is obtained is higher as the angle β is larger, and β is 75@'e20℃, υ, then the dynamic impedance is 1MΩ or more.Therefore, for wristwatches. In order to satisfy the condition that the temperature required for a crystal oscillator is 25°C, the temperature at which the ridges can be obtained is around 25°C, so K has an angle β of 75″.
'↓υ must be made even larger, and the dynamic impedance at this time is several tens of MΩ, making it difficult to use the above-mentioned crystalline crystal oscillator in a wristwatch.
舘5図はw42の従来例でめ〕、電極形状を変えること
ICよって上記$1の例の欠点をなくした厚さ200ミ
クロンを超えない薄い音叉型水晶振動子の概観図でめる
。Figure Tate 5 is a conventional example of W42], which is an overview of a thin tuning fork type crystal resonator with a thickness not exceeding 200 microns, which eliminates the drawbacks of the above $1 example by changing the electrode shape and IC.
wi6図は第5図の振動子の裏側からの概Ii!図であ
る。振動子15はal171WK示された水晶板から写
真−化学腐食法を用いて抜きとられる0図の角Tは09
〜10°の範囲内にとられる。館5−の16゜17.9
4図の25.26はそれぞれ振動子に電界を加えるため
の励振電極である。Figure wi6 is a general view from the back side of the vibrator in Figure 5! It is a diagram. The oscillator 15 is taken out from the crystal plate shown in al171WK using a photo-chemical corrosion method.
~10°. Hall 5-16°17.9
Reference numerals 25 and 26 in Fig. 4 are excitation electrodes for applying an electric field to the vibrator.
第8図はこの振動子の電極の配置を示す図でるる、[界
は図の中の矢印で示されるようにX軸に平行に加えられ
るため、第5図の改良された音叉型水晶振動子の動イン
ピーダンスは約50にΩで謝1図のIjiRwJ子と比
較して非常に小さく、周波数−温1+%性の零温f係数
の得られる温度は角γを変えることに1って勧インピー
ダンスを変化させずに20℃〜40℃の範囲に自由に変
化させることができる。とのf!勧子は性能が良く、非
常に小型であるので腕時計用の水晶振動子として適して
いる。Figure 8 is a diagram showing the arrangement of the electrodes of this vibrator. The dynamic impedance of the coil is about 50 Ω, which is very small compared to the IjiRwJ coil shown in Figure 1, and it is recommended that the temperature at which the zero temperature f coefficient of the frequency-temperature 1+% relationship is obtained can be obtained by changing the angle γ. The temperature can be freely changed within the range of 20°C to 40°C without changing the impedance. f! Because it has good performance and is very small, it is suitable as a crystal oscillator for wristwatches.
さてI JII5@お工ひ#16図にFiまた。このよ
うな電界をかけるために行なわれている従来からの結線
方法も描かれている。両面Km畿電極を端え九振動子1
5は裏面電極25,24の一部、27゜28によって絶
縁性物質からなる固定台24の上mK蒸着、焼結等によ
って振動子の固着電極部27.28に合わせてつくられ
友金属膜113.19に接着され、電極t6.25jl
Pよび電極17.26はワイヤー20.21をボンディ
ングすることにより%電極端子22,25tlCそれぞ
れ接続される。Now, let's look at Figure #16 of JII5 @ Worker again. Conventional wiring methods used to apply such electric fields are also illustrated. Nine oscillators 1 with two-sided Km electrodes
Reference numeral 5 denotes a part of the back electrodes 25 and 24, and 27.degree. 28 is a friend metal film 113 made on the fixed base 24 made of an insulating material by mK vapor deposition, sintering, etc. to match the fixed electrode portions 27 and 28 of the vibrator. .19, electrode t6.25jl
P and electrode 17.26 are connected to electrode terminals 22, 25tlC, respectively, by bonding wires 20.21.
しかしながら、上記の方法によれば、41別に作られた
固定台が必要であるから、低価格化および小型化の上で
大きな障害となつ次、またポンティング工程が必要でる
9、これも會理化のさまたげとなっていた。However, according to the above method, a separately manufactured fixing stand is required, which becomes a major obstacle in reducing the price and size.Furthermore, a ponting process is required9, which also requires a It was a hindrance.
本発明は、以下に説明するように、ケース内外を貫通す
るリードピンの一端に水晶振動子を[!!向定すること
Kよって前記欠点を解決しようとするものでめる。As explained below, in the present invention, a crystal resonator is attached to one end of a lead pin that passes through the inside and outside of the case. ! This is an attempt to solve the above-mentioned drawbacks.
m9図は本発明の第1の実施例であり、水晶振動子27
には2つの孔28と29があけられている。ハーメチッ
クシール30を介してケース内に突出するピン!11と
32は前記孔18と29に挿入され、合金・・ンダ等の
接着剤を用いて振動子27の固定電極部6Sと54に固
着石れるとともに導通がとられる。Figure m9 shows the first embodiment of the present invention, in which the crystal oscillator 27
Two holes 28 and 29 are drilled in it. A pin that protrudes into the case through the hermetic seal 30! 11 and 32 are inserted into the holes 18 and 29, and are fixed to the fixed electrode parts 6S and 54 of the vibrator 27 using an adhesive such as alloy powder, and conduction is established.
第11@は115図の実施例でめ夛、論1の実施例と違
う点は、振動子40には孔ではなく、千円形の切欠き4
1.42が設けられていることでるる、ビン45.44
がこの切欠きに挿入される点は前と同じでbる。No. 11 is the embodiment shown in Fig. 115. The difference from the embodiment of theory 1 is that the vibrator 40 has a thousand-round notch 4 instead of a hole.
1.42 is provided, bin 45.44
The point that b is inserted into this notch is the same as before.
次K111面図を用いて改良され九実施例を説明しよう
。Next, nine improved embodiments will be explained using the K111 top view.
第11図は第9図の例を横から見たもので、ビン52と
振動子27は上下両面からハンダ49で固着されている
。FIG. 11 is a side view of the example shown in FIG. 9, in which the bottle 52 and the vibrator 27 are fixed with solder 49 from both the upper and lower sides.
第12図はさらに一層を強化したもので、ビン50には
ふくらみ51が設けられている。このふくら+Fi4m
リングをハンダづけあるいはカシメで固定しである。る
るいはビン自体をこのような形状に加工することも可能
である。In FIG. 12, the bottle 50 is further strengthened, and the bottle 50 is provided with a bulge 51. This calf + Fi4m
The ring is fixed by soldering or caulking. It is also possible to process the Rurui bottle itself into such a shape.
第15図の例は第14図のものをさらに9I!J化した
もので、振動子27の上がらさらにリング52をはめて
、上下両方から振動子を固定するようになっている。The example in Figure 15 is 9I more than the one in Figure 14! A ring 52 is further fitted on the top of the vibrator 27 to fix the vibrator from both the top and bottom.
また水晶振動子とビンの同定を確夾にするためには一ハ
ンダ等の溶着剤の量を多くす熟ば良いが、従来はハンダ
等の溶着剤が多すぎるとそれが振動盃を生じている所K
まで流れてしまい振動特性に悪影響を与える惧れがあっ
た。しかしながら本発明の構成によれば、水晶振動子の
電極膜がビンとの固着電極部と音叉1ii#子の励振電
極部の2分部に分かれ、しかもその固着電極部と励振電
&部の間にスリット(IIt極を配置しない1部分)を
設けてめるために、ハンダ等の溶着剤の量を多くしても
。Also, in order to ensure the identification of the crystal resonator and bottle, it is best to increase the amount of welding agent such as solder, but conventionally, if there is too much welding agent such as solder, it will cause a vibrating cup. Where I am K
There was a risk that the vibration characteristics would be adversely affected. However, according to the configuration of the present invention, the electrode film of the crystal resonator is divided into two parts: the fixed electrode part with the bottle and the excitation electrode part of the tuning fork 1ii#, and moreover, between the fixed electrode part and the excitation electrode part Even if the amount of welding agent such as solder is increased in order to provide a slit (the part where the IIt electrode is not placed).
そのスリットがハンダの流れ防止となるため振動に悪影
響を与えることは全く無い、即ち本発明に使用している
水晶振動子は第6図に示されるように固着電極部27,
28と励振電極部25の間にスリット15aを配置した
ものでめシ、本発明によれば@?図及び1ii111図
から明らかなように、固着電極部55.54にビン51
.52をハンダ固着し、支持と導通を同時に行うととも
に、固着電極部55.54と励振@lil i@S 5
5 a 、 54 aとの間にスリン)27aを設けて
めるので、ハンダの波山が完全に防止され、小型で高精
度の音叉型水晶振動子を提し得るものである。また本発
明の池の実施ガでめるw410図においても固着電極部
45゜46と励振電極545a、46mの間にスリット
40aが配置されている*f#Js固着電極と励振電極
の間を接続する電極パターンはたいへん細く形成されて
いるためにハンダ等溶着剤の流出Kitとんど影響を4
えることは無い、ま九この細く形成された電極パターン
部(例えば第9mgの64b)は、ビンと水晶振動子の
同着F#PK於ける熱が固着電極から励振電極に伝導さ
れるのを少なく押えることができ、励振電極及び水晶片
自体の変質を防止している。Since the slit prevents the solder from flowing, there is no adverse effect on vibration.In other words, the crystal resonator used in the present invention has a fixed electrode part 27, as shown in FIG.
According to the present invention, the slit 15a is arranged between the excitation electrode section 28 and the excitation electrode section 25. As is clear from the figure and figure 1ii111, the bottle 51 is attached to the fixed electrode part 55.54.
.. 52 is fixed with solder to perform support and conduction at the same time, and the fixed electrode part 55.54 and excitation @lili@S5
5a and 54a, the wave crests of the solder are completely prevented, and a small and highly accurate tuning fork type crystal resonator can be provided. In addition, in the drawing W410 showing the implementation of the pond of the present invention, a slit 40a is arranged between the fixed electrode part 45°46 and the excitation electrodes 545a and 46m.*f#JsThe fixed electrode and the excitation electrode are connected Since the electrode pattern is formed very thin, the outflow of welding agents such as solder will affect the kit.
This thinly formed electrode pattern part (for example, 64b of No. 9 mg) prevents the heat generated when the bottle and the crystal resonator are attached together to be conducted from the fixed electrode to the excitation electrode. This prevents deterioration of the excitation electrode and the crystal piece itself.
以上の詳細な説明て明らかなように、本発明により以下
のような多くの改良がなされたものである。As is clear from the above detailed description, the present invention has made many improvements as described below.
1、 特別の一定台が不要でるる
l ’IJ−rIIIKよる接続が不要である五 水
晶片にスリットを有する電極膜構造にることによって、
水晶片の固定時に於けるハンダ材或いはロー材が表間歪
の大なる水晶片の脚根元付近への流出を防止し、且つ多
量のハンダ材等の溶着剤を投入することが出来、水晶片
の支持固定力の強化安定と共に耐衝撃性に優れた水晶振
動子が梅現される。又、水晶片に形成されたq#に水晶
片の圧電駆動に係る励振用の電極膜への熱の伝導が少な
くなシ熱に孟る励振用のW:*膜及び水晶片の性能の劣
化を少なくすることができる。1. There is no need for a special fixed stand. 5. By using an electrode film structure with slits in the crystal piece,
When fixing the crystal blank, the solder material or brazing material prevents the crystal blank with large surface distortion from flowing out near the base of the crystal blank, and a large amount of welding agent such as solder material can be poured into the crystal blank. A crystal oscillator with improved support and fixing force, stability, and excellent shock resistance is now available. In addition, the conduction of heat to the electrode film for excitation related to the piezoelectric drive of the crystal piece is reduced due to the q# formed on the crystal piece, and the W for excitation due to heat: * Deterioration of the performance of the film and crystal piece. can be reduced.
4 表裏の電極間の導通も同時にとれる& ビンのたわ
みにより衝撃が吸収され邊勅子が守られる。4. Continuity can be established between the front and back electrodes at the same time & shock is absorbed by the bending of the bottle, protecting the beech.
直 ビンのたわみにより、/・−メチツクシールを構成
する部材と振動子の熱膨張率の差による応力が緩和され
る。The deflection of the straight bottle relieves the stress caused by the difference in thermal expansion coefficient between the members constituting the mesh seal and the vibrator.
また、この振動子をフォトエツチング技術で形成するな
らば、複雑な形状の振動子でも容易に量産可能でめるか
ら、さらに特長が発揮される。Furthermore, if this resonator is formed using photoetching technology, even resonators with complicated shapes can be easily mass-produced, which brings out even more advantages.
本発明の@動子は小型にして低価格であるから、特に腕
時計用の振動子として優れている。Since the @ vibrator of the present invention is small and inexpensive, it is particularly excellent as a vibrator for wristwatches.
第1図および第2図は化学腐食法で作られた水晶振動子
の表および裏よシの概観図。
第5図は上記振動子の切シ出し角を示す図。
第4図は上記振動子の駆動法を示す断面図である。
第5図および11+6湘は化学腐食法で作られた別の水
晶振動子の表および裏より概m図。
#s7図は上記珈動子の切シ出し角を示す図。
wJ8図は上記嶽動子の駆動法を示す断面図でるる。
第9図は本褪明の第1の実施例を示す図でめる。
#!1G図は本発明の第3の実施例。
餉11図は鮪1の実施例の側面図でめる。
$9112因は第11図の実施例を改曳した実施例の1
li1面図でるる。
第13図は第1図の実施例をさらに改曳した実施例の側
面図である。
以 上
出願人 株式会社 趣訪精工舎
代理人 弁理士 最 上 務
′g4図
′IJy+刀
第91図
2/ρ図Figures 1 and 2 are general views of the front and back sides of a crystal resonator made by chemical corrosion. FIG. 5 is a diagram showing the cutting angle of the vibrator. FIG. 4 is a sectional view showing a method of driving the vibrator. Figures 5 and 11+6 are schematic views of the front and back of another crystal resonator made by chemical corrosion. Figure #s7 is a diagram showing the cutting angle of the above-mentioned cone. Figure wJ8 is a cross-sectional view showing the method of driving the above-mentioned rotor. FIG. 9 is a diagram showing a first embodiment of the present discoloration. #! Figure 1G shows a third embodiment of the present invention. Figure 11 is a side view of an embodiment of the tuna 1. The reason for $9112 is 1 of the embodiment which is a modification of the embodiment shown in Fig. 11.
Li 1 page drawing Ruru. FIG. 13 is a side view of an embodiment further modified from the embodiment shown in FIG. Applicant Shuwa Seikosha Co., Ltd. Agent Patent Attorney Tsutomu Mogami'g4 Figure'IJy + Katana Figure 91 Figure 2/ρ Figure
Claims (1)
ための電極膜を設けるとともに、前記電極膜が少くも前
記水晶片の叉部に配置される励振用電極部と、前記水晶
片の基部付近で溶着剤によシ外部リード端子と固着され
る固着電極部とを有する水晶振動子において、前記水晶
片の基部付近に配置される前記固着電極部と少くと4前
記水晶片の叉部に配置される励振用電極部との間に前記
溶着剤の流出を防止するスリットを設けたことを特徴と
する水晶撮動子の支持構造。(1) A crystal piece having a tuning fork shape is provided with an electrode film for exciting the crystal piece, and an excitation electrode part in which the electrode film is arranged at least on the fork part of the crystal piece, and the crystal piece In a crystal resonator having a fixed electrode part which is fixed to an external lead terminal by a welding agent near the base of the crystal piece, the fixed electrode part disposed near the base of the crystal piece and at least four prongs of the crystal piece. A support structure for a crystal camera, characterized in that a slit is provided between the part and the excitation electrode part to prevent the welding agent from flowing out.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP466182A JPS6048925B2 (en) | 1982-01-14 | 1982-01-14 | Support structure of tuning fork crystal resonator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP466182A JPS6048925B2 (en) | 1982-01-14 | 1982-01-14 | Support structure of tuning fork crystal resonator |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP721475A Division JPS5181589A (en) | 1975-01-16 | 1975-01-16 | ONSAGATAATSUDENSHINDOSHINOSHIJIHOHO |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58115703A Division JPS6048926B2 (en) | 1983-06-27 | 1983-06-27 | Support structure of tuning fork type piezoelectric vibrator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5833307A true JPS5833307A (en) | 1983-02-26 |
JPS6048925B2 JPS6048925B2 (en) | 1985-10-30 |
Family
ID=11590110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP466182A Expired JPS6048925B2 (en) | 1982-01-14 | 1982-01-14 | Support structure of tuning fork crystal resonator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6048925B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6274984A (en) * | 1985-09-28 | 1987-04-06 | Hiroshima Kasei Kk | Anticorrosive, water-expandable composition |
DE10083545C2 (en) * | 1999-10-18 | 2003-04-30 | Matsushita Electric Ind Co Ltd | Angular velocity sensor |
-
1982
- 1982-01-14 JP JP466182A patent/JPS6048925B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6274984A (en) * | 1985-09-28 | 1987-04-06 | Hiroshima Kasei Kk | Anticorrosive, water-expandable composition |
JPH0437872B2 (en) * | 1985-09-28 | 1992-06-22 | Hiroshima Kasei Kk | |
DE10083545C2 (en) * | 1999-10-18 | 2003-04-30 | Matsushita Electric Ind Co Ltd | Angular velocity sensor |
Also Published As
Publication number | Publication date |
---|---|
JPS6048925B2 (en) | 1985-10-30 |
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