JPS583033B1 - - Google Patents
Info
- Publication number
- JPS583033B1 JPS583033B1 JP1657571A JP1657571A JPS583033B1 JP S583033 B1 JPS583033 B1 JP S583033B1 JP 1657571 A JP1657571 A JP 1657571A JP 1657571 A JP1657571 A JP 1657571A JP S583033 B1 JPS583033 B1 JP S583033B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1657571A JPS583033B1 (en) | 1971-03-24 | 1971-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1657571A JPS583033B1 (en) | 1971-03-24 | 1971-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS583033B1 true JPS583033B1 (en) | 1983-01-19 |
Family
ID=11920074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1657571A Pending JPS583033B1 (en) | 1971-03-24 | 1971-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS583033B1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02135734A (en) * | 1988-11-17 | 1990-05-24 | Fujitsu Ltd | Cleaning method |
| JPH02280328A (en) * | 1989-04-21 | 1990-11-16 | Fujitsu Ltd | Cleaning method for wafer, mask, etc. |
-
1971
- 1971-03-24 JP JP1657571A patent/JPS583033B1/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02135734A (en) * | 1988-11-17 | 1990-05-24 | Fujitsu Ltd | Cleaning method |
| JPH02280328A (en) * | 1989-04-21 | 1990-11-16 | Fujitsu Ltd | Cleaning method for wafer, mask, etc. |