JPS58292U - 冷却兼冷凍装置 - Google Patents

冷却兼冷凍装置

Info

Publication number
JPS58292U
JPS58292U JP9378381U JP9378381U JPS58292U JP S58292 U JPS58292 U JP S58292U JP 9378381 U JP9378381 U JP 9378381U JP 9378381 U JP9378381 U JP 9378381U JP S58292 U JPS58292 U JP S58292U
Authority
JP
Japan
Prior art keywords
secondary refrigerant
drum
branch pipe
cooling
freezing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9378381U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6227821Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
二郎 土屋
Original Assignee
同和機器工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 同和機器工業株式会社 filed Critical 同和機器工業株式会社
Priority to JP9378381U priority Critical patent/JPS58292U/ja
Publication of JPS58292U publication Critical patent/JPS58292U/ja
Application granted granted Critical
Publication of JPS6227821Y2 publication Critical patent/JPS6227821Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Devices That Are Associated With Refrigeration Equipment (AREA)
JP9378381U 1981-06-26 1981-06-26 冷却兼冷凍装置 Granted JPS58292U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9378381U JPS58292U (ja) 1981-06-26 1981-06-26 冷却兼冷凍装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9378381U JPS58292U (ja) 1981-06-26 1981-06-26 冷却兼冷凍装置

Publications (2)

Publication Number Publication Date
JPS58292U true JPS58292U (ja) 1983-01-05
JPS6227821Y2 JPS6227821Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-07-16

Family

ID=29888751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9378381U Granted JPS58292U (ja) 1981-06-26 1981-06-26 冷却兼冷凍装置

Country Status (1)

Country Link
JP (1) JPS58292U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01169793U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-05-20 1989-11-30
JPH0629369A (ja) * 1985-10-24 1994-02-04 Texas Instr Inc <Ti> ウェーハ処理ステーション

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629369A (ja) * 1985-10-24 1994-02-04 Texas Instr Inc <Ti> ウェーハ処理ステーション
JPH0645425A (ja) * 1985-10-24 1994-02-18 Texas Instr Inc <Ti> ウェーハ移送方法及びウェーハ処理モジュール
JPH01169793U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-05-20 1989-11-30

Also Published As

Publication number Publication date
JPS6227821Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-07-16

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