JPS5825040U - Semiconductor device manufacturing automation equipment - Google Patents
Semiconductor device manufacturing automation equipmentInfo
- Publication number
- JPS5825040U JPS5825040U JP11877681U JP11877681U JPS5825040U JP S5825040 U JPS5825040 U JP S5825040U JP 11877681 U JP11877681 U JP 11877681U JP 11877681 U JP11877681 U JP 11877681U JP S5825040 U JPS5825040 U JP S5825040U
- Authority
- JP
- Japan
- Prior art keywords
- automation equipment
- semiconductor device
- device manufacturing
- manufacturing automation
- attributes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Control By Computers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図、第2図、第3図は、IDカード判読装置を有す
る半導体装置の製造自動化装置の実施例を示すブロック
図である。
1−IDカード、11・・・ウェーハ貯蔵装置、12・
・・ウェハ搬送路、13・・・処理装置(製造装置)、
−14・・・IDカード判読装置、15・・・計算機、
16・・・信号伝送路、17・・・ウェハ貯蔵装置、1
8・・・コントローラである。FIG. 1, FIG. 2, and FIG. 3 are block diagrams showing an embodiment of a semiconductor device manufacturing automation apparatus having an ID card reading device. 1-ID card, 11... wafer storage device, 12.
... Wafer transport path, 13... Processing equipment (manufacturing equipment),
-14... ID card reading device, 15... Calculator,
16... Signal transmission path, 17... Wafer storage device, 1
8... Controller.
Claims (1)
導体ウェーハの属性等を記録したIDカードの判読装置
と、該判読装置からの情報により製造装置を制御する制
御装置を有することを特徴とする半導体装置の製造自動
化装置。It is characterized by having an ID card reading device that records the attributes of the semiconductor device to be manufactured and the attributes of the semiconductor wafer to be processed, etc., and a control device that controls the manufacturing device based on the information from the reading device. Manufacturing automation equipment for semiconductor devices.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11877681U JPS5825040U (en) | 1981-08-12 | 1981-08-12 | Semiconductor device manufacturing automation equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11877681U JPS5825040U (en) | 1981-08-12 | 1981-08-12 | Semiconductor device manufacturing automation equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5825040U true JPS5825040U (en) | 1983-02-17 |
Family
ID=29912881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11877681U Pending JPS5825040U (en) | 1981-08-12 | 1981-08-12 | Semiconductor device manufacturing automation equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5825040U (en) |
-
1981
- 1981-08-12 JP JP11877681U patent/JPS5825040U/en active Pending
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