JPS5825040U - Semiconductor device manufacturing automation equipment - Google Patents

Semiconductor device manufacturing automation equipment

Info

Publication number
JPS5825040U
JPS5825040U JP11877681U JP11877681U JPS5825040U JP S5825040 U JPS5825040 U JP S5825040U JP 11877681 U JP11877681 U JP 11877681U JP 11877681 U JP11877681 U JP 11877681U JP S5825040 U JPS5825040 U JP S5825040U
Authority
JP
Japan
Prior art keywords
automation equipment
semiconductor device
device manufacturing
manufacturing automation
attributes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11877681U
Other languages
Japanese (ja)
Inventor
井沢　龍一
船越　清彦
岡部　隆博
井坂　光明
川野　隆春
笹川　達夫
金子　憲二
Original Assignee
株式会社日立製作所
日立マイクロコンピユ−タエンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所, 日立マイクロコンピユ−タエンジニアリング株式会社 filed Critical 株式会社日立製作所
Priority to JP11877681U priority Critical patent/JPS5825040U/en
Publication of JPS5825040U publication Critical patent/JPS5825040U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図、第２図、第３図は、ＩＤカード判読装置を有す
る半導体装置の製造自動化装置の実施例を示すブロック
図である。 １−ＩＤカード、１１・・・ウェーハ貯蔵装置、１２・
・・ウェハ搬送路、１３・・・処理装置（製造装置）、
−１４・・・ＩＤカード判読装置、１５・・・計算機、
１６・・・信号伝送路、１７・・・ウェハ貯蔵装置、１
８・・・コントローラである。FIG. 1, FIG. 2, and FIG. 3 are block diagrams showing an embodiment of a semiconductor device manufacturing automation apparatus having an ID card reading device. 1-ID card, 11... wafer storage device, 12.
... Wafer transport path, 13... Processing equipment (manufacturing equipment),
-14... ID card reading device, 15... Calculator,
16... Signal transmission path, 17... Wafer storage device, 1
8... Controller.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 製造されるべき半導体装置の属性や被処理対象となる半
導体ウェーハの属性等を記録したＩＤカードの判読装置
と、該判読装置からの情報により製造装置を制御する制
御装置を有することを特徴とする半導体装置の製造自動
化装置。It is characterized by having an ID card reading device that records the attributes of the semiconductor device to be manufactured and the attributes of the semiconductor wafer to be processed, etc., and a control device that controls the manufacturing device based on the information from the reading device. Manufacturing automation equipment for semiconductor devices.
JP11877681U 1981-08-12 1981-08-12 Semiconductor device manufacturing automation equipment Pending JPS5825040U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11877681U JPS5825040U (en) 1981-08-12 1981-08-12 Semiconductor device manufacturing automation equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11877681U JPS5825040U (en) 1981-08-12 1981-08-12 Semiconductor device manufacturing automation equipment

Publications (1)

Publication Number Publication Date
JPS5825040U true JPS5825040U (en) 1983-02-17

Family

ID=29912881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11877681U Pending JPS5825040U (en) 1981-08-12 1981-08-12 Semiconductor device manufacturing automation equipment

Country Status (1)

Country Link
JP (1) JPS5825040U (en)

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