JPS5819849A - Mass spectrometer - Google Patents

Mass spectrometer

Info

Publication number
JPS5819849A
JPS5819849A JP56119917A JP11991781A JPS5819849A JP S5819849 A JPS5819849 A JP S5819849A JP 56119917 A JP56119917 A JP 56119917A JP 11991781 A JP11991781 A JP 11991781A JP S5819849 A JPS5819849 A JP S5819849A
Authority
JP
Japan
Prior art keywords
ion
opening plate
mass
sensitivity
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56119917A
Other languages
Japanese (ja)
Inventor
Tsunezo Takeda
武田 常蔵
Kouzou Miishi
御石 浩三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP56119917A priority Critical patent/JPS5819849A/en
Publication of JPS5819849A publication Critical patent/JPS5819849A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/42Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons

Abstract

PURPOSE:To improve total sensitivity and reduce differential sensitivity due to mass by properly applying optional voltage to an opening plate which restricts an ion beam on the ion exit side end of a quadrupole. CONSTITUTION:Voltage is applied properly to an opening plate P for restricting an ion beam so as to form an electric field in the direction where an ion is accelerated between the ion beam restricting opening plate P located on the ion exit side end of a quadrupole QP and the electrode end of the QP. This opening plate P is connected to a variable voltage power supply V. The specified mass number ion proceeds in the arrow direction, passes through an open A, and is incident on an ion detector FC. When a positive ion is handled, the ion which passes between the QP electrodes is absorbed in the opening plate P by applying negative voltage to the opening plate P, accelerated, and passes through the QP end edge. As a result, sensitivity is improved and differential sensitivity can be reduced due to mass.

Description

【発明の詳細な説明】 本発明は四重種型質量分析装置に関する。四重種型質量
分析装置では四重極(以後Q、Pと略記する)間を安定
軌道を採って通過した特定質量のイオンもQPの端部に
形成されている端縁電場を通過する際イオンビームの断
面が拡がシ、このことは四重種型質量分析装置の感度の
低下、マスディスクリミネーション(質量が高くなるに
つれ感度が低下する)、質量スペクトルのピークのプロ
フィルの幅の拡り、質量選別作用の低下等の悪影響を与
えている。本発明はQPの端縁電場の上述した悪影響を
軽減することを目的としてなされた。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a quadruple species mass spectrometer. In a quadruple seed mass spectrometer, ions of a specific mass that have passed between the quadrupole (hereinafter abbreviated as Q and P) in a stable orbit also pass through the edge electric field formed at the end of the QP. The cross-section of the ion beam is broadened, which leads to decreased sensitivity in quadruple-species mass spectrometers, mass discrimination (sensitivity decreases as the mass increases), and a broadened peak profile in the mass spectrum. This has an adverse effect such as a decrease in mass selection effect. The present invention was made with the aim of reducing the above-mentioned adverse effects of the edge electric field of QP.

QPの端縁場がイオンに及ぼす影響の大きさはイオンが
端縁場を通過するのに要する時間に依存しておシ、この
時間が長い程端縁場から受ける影響が大きい。イオンが
端縁場に滞在している時間tは、端縁場の長さをL1イ
オンの質量をM、イオンの運動エネルギーをEとすると で表わされる。(1)式によればイオンの運動エネルギ
ーが太きければイオンの端縁場内滞在時間が減少して端
縁場の影響が軽減されることが予想される。通常イオン
の運動エネルギーはイオンをQP電場内に入射させると
きの加速電圧によって定まっている。本発明はQPのイ
オン出射側の端に設けられているイオンビーム制限用の
開口板とQPの電極端との間に4オンを加速する方向の
電場を形成するように上記開口板に適当な電圧を印加す
るようにした質量分析装置を提供するものである。
The magnitude of the influence that the edge field of QP has on ions depends on the time required for the ions to pass through the edge field, and the longer this time, the greater the influence from the edge field. The time t that an ion stays in the edge field is expressed by the length of the edge field, the mass of the L1 ion as M, and the kinetic energy of the ion as E. According to equation (1), it is predicted that if the kinetic energy of the ion is large, the residence time of the ion in the edge field will be reduced, and the influence of the edge field will be reduced. Usually, the kinetic energy of an ion is determined by the accelerating voltage when the ion is introduced into the QP electric field. The present invention provides a suitable aperture plate for forming an electric field in the direction of accelerating the ion beam between the ion beam limiting aperture plate provided at the end of the ion exit side of the QP and the electrode end of the QP. The present invention provides a mass spectrometer that applies voltage.

このようにすることによってQP電場にイオンを入射さ
せる際与えた運動エネルギーの上にQP電極端と開口板
との間の電場による運動エネルギーの増加分を加えるこ
とにより上記(1)式の右辺のEを大ならしめ端縁場の
影響が軽減される。
By doing this, by adding the increase in kinetic energy due to the electric field between the QP electrode end and the aperture plate to the kinetic energy given when the ions are introduced into the QP electric field, the right side of the above equation (1) can be expressed. By increasing E, the influence of the edge field is reduced.

←図は本発明の一実施例の要部を示し、R1、R2はQ
P電極棒の中の一対を示し、Pは開口板でAがイオンビ
ーム制限用の開口であり、FCはイオン検出器である。
←The figure shows the main part of one embodiment of the present invention, R1 and R2 are Q
A pair of P electrode rods are shown, P is an aperture plate, A is an aperture for limiting the ion beam, and FC is an ion detector.

開口板Pは可変電圧電源Vに接続されている。特定質量
のイオンが図矢印方向に進行し開口Aを通過してイオン
検出器FCに入射する。正イオンを扱っている場合開口
板Pに負電圧を印加するとQP電極間を通過したイオン
は開口板Pに吸引されるため加速されてQPの端縁場を
通過することになる。このため開口板Pの電圧をアース
から負側に高くして行くに従い端縁場の影響が減少しイ
オン検出出力が増加して行く。下表は開口板Pをアース
したときと負電圧を印加したときとの質量分析装置全体
としてのイオン透過率の変化を2種の正イオンについて
比較したものである。
The aperture plate P is connected to a variable voltage power supply V. Ions of a specific mass advance in the direction of the arrow in the figure, pass through the aperture A, and enter the ion detector FC. When dealing with positive ions, when a negative voltage is applied to the aperture plate P, the ions that have passed between the QP electrodes are attracted to the aperture plate P, so they are accelerated and pass through the edge field of the QP. Therefore, as the voltage of the aperture plate P increases from the ground to the negative side, the influence of the edge field decreases and the ion detection output increases. The table below compares the change in ion transmittance of the mass spectrometer as a whole when the aperture plate P is grounded and when a negative voltage is applied for two types of positive ions.

m:質量 2:電荷量(電子単位) 上表から見ると開口板にイオン加速電圧を与えることの
効果は質量の犬なるイオンにおいて特に顕著であり、全
体的な感度向上と共に質量による感度差を縮少する効果
も得られる。
m: mass 2: amount of charge (in electron units) As seen from the above table, the effect of applying an ion acceleration voltage to the aperture plate is particularly remarkable for ions, which are the dog of mass, and it not only improves the overall sensitivity but also reduces the sensitivity difference due to mass. You can also get the effect of reducing the size.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明の一実施例装置の要部側面図である。 R1,R2・・・Q、P電極棒、P・・・開口板、A・
・・イオンビーム制限用開口、FC・・・イオン検出器
、■・・・可変電圧電源。 代理人 弁理士  縣   浩  介
The drawing is a side view of a main part of an apparatus according to an embodiment of the present invention. R1, R2...Q, P electrode rod, P... aperture plate, A.
...Ion beam limiting aperture, FC...Ion detector, ■...Variable voltage power supply. Agent Patent Attorney Kosuke Agata

Claims (1)

【特許請求の範囲】[Claims] 四重種型質量分析装置において四重極のイオン出射側の
端においてイオンビームを制限する開口板に任意電圧を
印加できるようにした質量分析装置。
A quadruple seed mass spectrometer in which an arbitrary voltage can be applied to the aperture plate that limits the ion beam at the ion exit end of the quadrupole.
JP56119917A 1981-07-30 1981-07-30 Mass spectrometer Pending JPS5819849A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56119917A JPS5819849A (en) 1981-07-30 1981-07-30 Mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56119917A JPS5819849A (en) 1981-07-30 1981-07-30 Mass spectrometer

Publications (1)

Publication Number Publication Date
JPS5819849A true JPS5819849A (en) 1983-02-05

Family

ID=14773374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56119917A Pending JPS5819849A (en) 1981-07-30 1981-07-30 Mass spectrometer

Country Status (1)

Country Link
JP (1) JPS5819849A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007095702A (en) * 1995-08-11 2007-04-12 Mds Health Group Ltd Spectrometer with axial electric field

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007095702A (en) * 1995-08-11 2007-04-12 Mds Health Group Ltd Spectrometer with axial electric field
JP4511505B2 (en) * 1995-08-11 2010-07-28 エムディーエス アナリティカル テクノロジーズ Analyzer with axial electric field

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