JPS58195083U - cryopump - Google Patents

cryopump

Info

Publication number
JPS58195083U
JPS58195083U JP9301982U JP9301982U JPS58195083U JP S58195083 U JPS58195083 U JP S58195083U JP 9301982 U JP9301982 U JP 9301982U JP 9301982 U JP9301982 U JP 9301982U JP S58195083 U JPS58195083 U JP S58195083U
Authority
JP
Japan
Prior art keywords
cryopump
chevron
flat tube
longitudinal direction
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9301982U
Other languages
Japanese (ja)
Inventor
松原　清一
川西　康平
誠 藤原
栗林　志頭眞
Original Assignee
三菱重工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱重工業株式会社 filed Critical 三菱重工業株式会社
Priority to JP9301982U priority Critical patent/JPS58195083U/en
Publication of JPS58195083U publication Critical patent/JPS58195083U/en
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の複合クライオポンプを示す模型図、第２
図および第３図はそれぞれ第１図のシェブロンを示す部
分拡大図、第４図は本考案の一実施例を示す斜視図、第
５図および第６図はそれぞれ第４図のシェブロンを示す
部分拡大図、第７図および第８図はそれぞれ第５図、第
６図の部分拡大図である。 １０１．１０２・・・・・・偏平管、１０３・・・・・
・ヘッダＯFigure 1 is a model diagram showing a conventional compound cryopump, Figure 2
Figures 5 and 3 are partially enlarged views showing the chevron in Figure 1, Figure 4 is a perspective view showing an embodiment of the present invention, and Figures 5 and 6 are parts showing the chevron in Figure 4, respectively. The enlarged views, FIGS. 7 and 8, are partially enlarged views of FIGS. 5 and 6, respectively. 101.102...Flat tube, 103...
・Header O

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 内部に長手方向に延びる冷却通路を有する偏平管を山型
に形成することによりシェブロンを構成したことを特徴
とするクライオポンプ。A cryopump characterized in that a chevron is formed by forming a flat tube into a chevron shape, which has a cooling passage extending in the longitudinal direction inside.
JP9301982U 1982-06-23 1982-06-23 cryopump Pending JPS58195083U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9301982U JPS58195083U (en) 1982-06-23 1982-06-23 cryopump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9301982U JPS58195083U (en) 1982-06-23 1982-06-23 cryopump

Publications (1)

Publication Number Publication Date
JPS58195083U true JPS58195083U (en) 1983-12-24

Family

ID=30223564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9301982U Pending JPS58195083U (en) 1982-06-23 1982-06-23 cryopump

Country Status (1)

Country Link
JP (1) JPS58195083U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56154176A (en) * 1980-04-01 1981-11-28 Pennwalt Corp Cryopump apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56154176A (en) * 1980-04-01 1981-11-28 Pennwalt Corp Cryopump apparatus

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