JPS58191544U - 流体の漏れ検知装置 - Google Patents

流体の漏れ検知装置

Info

Publication number
JPS58191544U
JPS58191544U JP8937182U JP8937182U JPS58191544U JP S58191544 U JPS58191544 U JP S58191544U JP 8937182 U JP8937182 U JP 8937182U JP 8937182 U JP8937182 U JP 8937182U JP S58191544 U JPS58191544 U JP S58191544U
Authority
JP
Japan
Prior art keywords
rate
change
output
detector
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8937182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6344748Y2 (enrdf_load_stackoverflow
Inventor
雅一 高野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP8937182U priority Critical patent/JPS58191544U/ja
Publication of JPS58191544U publication Critical patent/JPS58191544U/ja
Application granted granted Critical
Publication of JPS6344748Y2 publication Critical patent/JPS6344748Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP8937182U 1982-06-15 1982-06-15 流体の漏れ検知装置 Granted JPS58191544U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8937182U JPS58191544U (ja) 1982-06-15 1982-06-15 流体の漏れ検知装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8937182U JPS58191544U (ja) 1982-06-15 1982-06-15 流体の漏れ検知装置

Publications (2)

Publication Number Publication Date
JPS58191544U true JPS58191544U (ja) 1983-12-20
JPS6344748Y2 JPS6344748Y2 (enrdf_load_stackoverflow) 1988-11-21

Family

ID=30097994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8937182U Granted JPS58191544U (ja) 1982-06-15 1982-06-15 流体の漏れ検知装置

Country Status (1)

Country Link
JP (1) JPS58191544U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6344748Y2 (enrdf_load_stackoverflow) 1988-11-21

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