JPS58189534U - Wafer alignment device - Google Patents
Wafer alignment deviceInfo
- Publication number
- JPS58189534U JPS58189534U JP8540982U JP8540982U JPS58189534U JP S58189534 U JPS58189534 U JP S58189534U JP 8540982 U JP8540982 U JP 8540982U JP 8540982 U JP8540982 U JP 8540982U JP S58189534 U JPS58189534 U JP S58189534U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- roller
- driving means
- alignment device
- wafer alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例に係るウェハの位置合わせ装
置の斜視図、第２図は同平面図、第３図は同垂直断面図
、第４図は上記実施例の位置検出機構の正面図、第５図
に同じくスリット板の平面図である。第６図乃至第８図
は上記ウェハ位置合わせ装置の作用の説明図である。
１・・・ウェハ、１ａ・・・オリフラ、ａｌ・・・可動
ベース、Ｃ２・・・回動ブラケット、Ｃ３・・・ピン、
Ｃ４，Ｃ５・・・ローラ、Ｃ６・・・スプリング、Ｃ７
・・・モータ、Ｃ８・・・ベルト、ｂｌ・・・可動ベー
ス、ｂ２．ｂ３．ｂ４・・・ローラ、ｂ５・・・ピボッ
ト軸受穴、ｂ６・・・ピボット軸、ｂｌ・・・ソレノイ
ド手段、Ｃ１・・・可動ベース、Ｃ２゜Ｃ３，Ｃ４・・
印−ラ、ｄｌ・・・軸、Ｃ２・・・レバー、Ｃ３，Ｃ４
・・・ローラ、Ｃ５・・・スプリング、Ｃ６・・・スリ
ット板、Ｃ７・・・スリット、Ｃ８・・・ランプ、Ｃ９
・・・光センサ、ｄｌｏ・・・軸受、ｅｌ・・・エアシ
リンダ、Ｃ２，Ｃ３・・・カム、Ｃ４，Ｃ５・・・カム
オロワ、Ｃ６・・・レバー、Ｃ３，Ｃ９・・・軸、ｅｌ
Ｏ，ｅｉ １・・・支点ピン。
第１図
第４図FIG. 1 is a perspective view of a wafer alignment device according to an embodiment of the present invention, FIG. 2 is a plan view of the same, FIG. 3 is a vertical sectional view of the same, and FIG. It is a front view and a plan view of the slit plate similar to FIG. 5. FIGS. 6 to 8 are explanatory diagrams of the operation of the wafer alignment device. 1... Wafer, 1a... Orientation flat, al... Movable base, C2... Rotating bracket, C3... Pin,
C4, C5...roller, C6...spring, C7
...Motor, C8...Belt, bl...Movable base, b2. b3. b4... Roller, b5... Pivot bearing hole, b6... Pivot shaft, bl... Solenoid means, C1... Movable base, C2° C3, C4...
Mark-RA, dl...shaft, C2...lever, C3, C4
...Roller, C5...Spring, C6...Slit plate, C7...Slit, C8...Lamp, C9
... Optical sensor, dlo... Bearing, el... Air cylinder, C2, C3... Cam, C4, C5... Cam follower, C6... Lever, C3, C9... Shaft, el
O,ei 1...Fulcrum pin. Figure 1 Figure 4
Claims (1)
ラ機構を設けてその内の１組にローラ回転駆動手段を備
えるとともに、上記３ｉのローラ機構の内生なくとも１
組をウェハの中心に接近、離間せしめる駆動手段を設け
、かつ、回動自在に支承したレバーに２個のローラを軸
支してこれらのローラをウェハの外周に接触せしめる方
向に付勢するとともに上記レバーの回動を検出する手段
を備え、その検出信号に基づいて前記ローラ機構の回転
駆動手段を制御するように構成したことを特徴とするウ
ェハの位置合わせ装置。Three sets of roller mechanisms are provided to contact the outer periphery of the wafer and hold the wafer, and one set of the roller mechanisms is provided with a roller rotation driving means, and at least one roller mechanism is provided internally in the roller mechanism of 3i above.
A driving means is provided for moving the assembly toward and away from the center of the wafer, and two rollers are pivotally supported on a rotatably supported lever, and the rollers are biased in a direction to contact the outer periphery of the wafer. A wafer positioning apparatus comprising means for detecting rotation of the lever, and configured to control rotational driving means for the roller mechanism based on the detection signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8540982U JPS58189534U (en) | 1982-06-10 | 1982-06-10 | Wafer alignment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8540982U JPS58189534U (en) | 1982-06-10 | 1982-06-10 | Wafer alignment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58189534U true JPS58189534U (en) | 1983-12-16 |
Family
ID=30094282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8540982U Pending JPS58189534U (en) | 1982-06-10 | 1982-06-10 | Wafer alignment device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58189534U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5666036A (en) * | 1979-11-05 | 1981-06-04 | Canon Inc | Wafer positioner |
-
1982
- 1982-06-10 JP JP8540982U patent/JPS58189534U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5666036A (en) * | 1979-11-05 | 1981-06-04 | Canon Inc | Wafer positioner |
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