JPS58184902A - Reflecting mirror - Google Patents

Reflecting mirror

Info

Publication number
JPS58184902A
JPS58184902A JP6732082A JP6732082A JPS58184902A JP S58184902 A JPS58184902 A JP S58184902A JP 6732082 A JP6732082 A JP 6732082A JP 6732082 A JP6732082 A JP 6732082A JP S58184902 A JPS58184902 A JP S58184902A
Authority
JP
Japan
Prior art keywords
specular surface
alloy
machining
reflecting mirror
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6732082A
Other languages
Japanese (ja)
Inventor
Akira Hashimoto
章 橋本
Susumu Saito
進 斉藤
Akira Arimoto
昭 有本
Kenji Morita
健二 森田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koki Holdings Co Ltd
Hitachi Ltd
Original Assignee
Hitachi Ltd
Hitachi Koki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Koki Co Ltd filed Critical Hitachi Ltd
Priority to JP6732082A priority Critical patent/JPS58184902A/en
Publication of JPS58184902A publication Critical patent/JPS58184902A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/08Mirrors
    • G02B5/09Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

PURPOSE:To obtain a metallic reflecting mirror having high reflectivity, lightness and high accuracy by coating a pure metal or the like on the surface of a light alloy or a material of low thermal expansion and machining the surface to a specular surface. CONSTITUTION:An Al material of high purity is coated on the outside circumference of a rotary polyhedral mirror base plate 1 consisting of an Al alloy having high tensile strength and the outside circumferential surface thereof is machined to a specular surface. A material having the property suited for the light reflection characteristics of the wavelength used is selected for the material 2 and the treating stage for increasing reflectivity is omitted simply by forming a protective film 3 for the specular surface after formation of the specular surface by machining.

Description

【発明の詳細な説明】 本発明は光学的反射伊、特に高反射率で研磨が困難な軟
質金属を切削加工によって光学的鋳面を形成した金属反
射鏡に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an optical reflecting mirror, and particularly to a metal reflecting mirror in which an optical casting surface is formed by cutting a soft metal that has a high reflectance and is difficult to polish.

従来の切削ψ面材料には、^を合金やCu等が一般に使
用されている。しかし、これらの材料では、波長領域に
よって異なるが光の反射率と剛性との間に相反する性質
がある。例えば、人tの場合高反射率が得られる純kt
では剛性、硬度が低下する。また、Cuの場合は更に重
量が大となり構造材に適さない欠点がめる。
Conventional cutting ψ surface materials generally include alloys, Cu, and the like. However, these materials have contradictory properties between light reflectance and rigidity, which vary depending on the wavelength range. For example, in the case of person t, pure kt that provides high reflectance
In this case, the rigidity and hardness decrease. Moreover, in the case of Cu, the weight is even larger, which makes it unsuitable for use as a structural material.

本発明の目的は、金属の光の高反射性を生かし、機械的
な強度不足と不純物等に起因する材料欠陥による光の反
射損失が少なく、高反射率で、軽量。
The object of the present invention is to take advantage of the high light reflectivity of metals, reduce light reflection loss due to insufficient mechanical strength and material defects caused by impurities, etc., have high reflectance, and be lightweight.

大口径−〇形成、又は熱的変形を受は難い高?lf度金
属反射使、更に高抗張力を必要とする回転多面鐘等を安
価に提供することにある。
Large diameter - Is it too high to be susceptible to formation or thermal deformation? The object of the present invention is to provide low-cost rotating multi-faceted bells that require high tensile strength as well as lf-degree metal reflectors.

而して光反射率の高い金属材料として、At。As a metal material with high light reflectance, At.

Cu、^” t A g等が従来使用されている。これ
ら金属材料では、純度が高くなると共に不純物による光
反射損失が少なくなる。しかし、これらの金属材料では
純度が高まるに従って抗張力、硬度。
Conventionally, Cu, ^"tAg, etc. have been used. As the purity of these metal materials increases, the light reflection loss due to impurities decreases. However, as the purity of these metal materials increases, the tensile strength and hardness decrease.

耐力等機械的強度が低下し、更にこれ等軟質金属の光学
研磨は困難となる。
Mechanical strength such as yield strength decreases, and optical polishing of these soft metals becomes difficult.

さらに1従来の回転多面鈍では次のような欠点を有する
のである。即ち、第1図及び第2図は、従来の回転多面
値の一部断面を示す斜視図であり何れも光学研磨による
鋳面仕上工程が必要である。
Furthermore, the conventional rotary polygon blunt has the following drawbacks. That is, FIGS. 1 and 2 are perspective views showing partial cross sections of conventional rotary polygons, and both require a casting surface finishing process by optical polishing.

第1図は、硝子基板4の外周を研磨し、反射率増加膜5
 (At又蝶Au等)を研磨面にコーティングし、更に
金属膜5の保霞膜6を真空蒸着等でコートし、反射鏡を
構成する。硝子の場合、光学的性能にすぐれ、回転一基
板として軽量ではあるが、抗張力が小さく、高速回転体
には適さない。
In FIG. 1, the outer periphery of a glass substrate 4 is polished and a reflectance increasing film 5 is polished.
A reflective mirror is constructed by coating the polished surface with At or Au, etc., and further coating with a protective film 6 of the metal film 5 by vacuum deposition or the like. Glass has excellent optical performance and is lightweight as a rotating substrate, but it has low tensile strength and is not suitable for high-speed rotating bodies.

第2図は、硝子の抗張力の低い欠点をカバーし高速回転
用多面鋼として使用されているものの一例である。基板
7は抗張力が大きく軽量なAt合金を使用し、外周に光
学研Wjを可能にするための被覆材8を化学メッキし、
(Ni等)このNi合金8を光学的に研磨し、鏡面を得
る。但しNiの光反射率が低いため、kt、^U等の反
射増加膜9全真空蒸着して、反射特性を改善する。更に
前記反射増加膜9ヶ保膿するための透明膜12をコーテ
ィングして反射−を構成する。
Fig. 2 is an example of a multifaceted steel for high-speed rotation, which overcomes the drawback of glass having low tensile strength. The substrate 7 is made of a lightweight At alloy with high tensile strength, and a coating material 8 is chemically plated on the outer periphery to enable optical polishing Wj.
(Ni, etc.) This Ni alloy 8 is optically polished to obtain a mirror surface. However, since the optical reflectance of Ni is low, a reflection increasing film 9 such as kt or ^U is deposited in full vacuum to improve the reflection characteristics. Further, the reflection increasing film 9 is coated with a transparent film 12 for retaining pus to form a reflective film.

かかる点に鑑み本発明は、高反射率で、軽量高品位化の
ため、軽合金又は低熱膨張材料等の表面に前記純金楓類
を被接し表面を切削して鋼面とすることを特徴とする。
In view of this, the present invention is characterized in that the pure gold maple is applied to the surface of a light alloy or a low thermal expansion material, etc., and the surface is cut to form a steel surface in order to achieve high reflectance, light weight, and high quality. do.

第3図は、本発明の一実施例の構成を示す図である。図
は光走査用回転多面鋳斜視図を示す。高抗張力を有する
At合金からi回転多面鏡基板1の外周に高純変人を部
材2を被覆し、この高純度kt材2の外周面を切削して
鋼面とするものである。被覆材2は、使用波長の光反射
特性に適合する材質(At、Cu、^g、^U等)の選
択が可能であシ、切削鋼面形成後は鋼面保護膜3形成処
理を行なうだけで、反射率増加処理工程を省略すること
ができる。
FIG. 3 is a diagram showing the configuration of an embodiment of the present invention. The figure shows a perspective view of a rotary polygon cast for optical scanning. The outer periphery of the i-rotary polygon mirror substrate 1 is coated with a high-purity KT material 2 made of an At alloy having high tensile strength, and the outer periphery of this high-purity KT material 2 is cut to form a steel surface. For the coating material 2, it is possible to select a material (At, Cu, ^g, ^U, etc.) that matches the light reflection characteristics of the wavelength used. After forming the cutting steel surface, a steel surface protective film 3 is formed. By just doing this, the reflectance increasing treatment step can be omitted.

本発明によれば、任意の金属全選択することで希望する
反射特性の鋼面が容易に製作可能となり更に、真空蒸着
による反射率増加工程を省略できる。又該説明の多面鋳
に限らず、単体の平面鏡或は球面、非球面鏡にも適用で
きる。更に、鏡の使用目的によっては、切削鏡面の保護
膜を全く使用しないでもよい。この場合の各種鈍の製作
工程は短縮され、低価格の反射炉を提供することができ
る。
According to the present invention, a steel surface with desired reflection characteristics can be easily manufactured by selecting all metals, and furthermore, the process of increasing the reflectance by vacuum deposition can be omitted. Furthermore, the present invention is not limited to the multifaceted casting described above, but can also be applied to a single plane mirror, a spherical mirror, or an aspherical mirror. Furthermore, depending on the intended use of the mirror, a protective film on the cut mirror surface may not be used at all. In this case, the manufacturing process for various types of blunts is shortened, and a low-cost reverberatory furnace can be provided.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び第2図は、従来の回転多面鎗の一部断面図、
第3図は、本発明の回転多面伊の一部断り・。 面図である。    / パノ 箒 ! ′V5z %3 4
FIGS. 1 and 2 are partial cross-sectional views of a conventional rotary multi-sided spear,
FIG. 3 shows a part of the rotating multi-faceted surface of the present invention. It is a front view. / Pano Houki! 'V5z %3 4

Claims (1)

【特許請求の範囲】[Claims] 構造材と鏡面材よ構成る複合材において、構造材表面を
鋳面材で被覆し、該被覆−面材を切削して光学的争面を
形成することを特命とする反射−。
In a composite material composed of a structural material and a mirror surface material, the surface of the structural material is coated with a cast surface material, and the coating is a reflection material whose special purpose is to cut the surface material to form an optical surface.
JP6732082A 1982-04-23 1982-04-23 Reflecting mirror Pending JPS58184902A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6732082A JPS58184902A (en) 1982-04-23 1982-04-23 Reflecting mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6732082A JPS58184902A (en) 1982-04-23 1982-04-23 Reflecting mirror

Publications (1)

Publication Number Publication Date
JPS58184902A true JPS58184902A (en) 1983-10-28

Family

ID=13341603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6732082A Pending JPS58184902A (en) 1982-04-23 1982-04-23 Reflecting mirror

Country Status (1)

Country Link
JP (1) JPS58184902A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4826271A (en) * 1984-08-31 1989-05-02 Canon Kabushiki Kaisha Rotational polygon mirror and method of manufacturing the same
JP2015017968A (en) * 2013-06-13 2015-01-29 国立大学法人 新潟大学 Laser scanning interferometer and surface shape measurement method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4826271A (en) * 1984-08-31 1989-05-02 Canon Kabushiki Kaisha Rotational polygon mirror and method of manufacturing the same
JP2015017968A (en) * 2013-06-13 2015-01-29 国立大学法人 新潟大学 Laser scanning interferometer and surface shape measurement method

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