JPS58177940U - 半導体拡散炉用石英ガラス管 - Google Patents

半導体拡散炉用石英ガラス管

Info

Publication number
JPS58177940U
JPS58177940U JP7465482U JP7465482U JPS58177940U JP S58177940 U JPS58177940 U JP S58177940U JP 7465482 U JP7465482 U JP 7465482U JP 7465482 U JP7465482 U JP 7465482U JP S58177940 U JPS58177940 U JP S58177940U
Authority
JP
Japan
Prior art keywords
quartz glass
glass tube
diffusion furnace
semiconductor diffusion
circumferential surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7465482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6311720Y2 (enrdf_load_stackoverflow
Inventor
佐藤　寿栄
崎久保　邦彦
君官　進
Original Assignee
東芝セラミツクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東芝セラミツクス株式会社 filed Critical 東芝セラミツクス株式会社
Priority to JP7465482U priority Critical patent/JPS58177940U/ja
Publication of JPS58177940U publication Critical patent/JPS58177940U/ja
Application granted granted Critical
Publication of JPS6311720Y2 publication Critical patent/JPS6311720Y2/ja
Granted legal-status Critical Current

Links

JP7465482U 1982-05-21 1982-05-21 半導体拡散炉用石英ガラス管 Granted JPS58177940U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7465482U JPS58177940U (ja) 1982-05-21 1982-05-21 半導体拡散炉用石英ガラス管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7465482U JPS58177940U (ja) 1982-05-21 1982-05-21 半導体拡散炉用石英ガラス管

Publications (2)

Publication Number Publication Date
JPS58177940U true JPS58177940U (ja) 1983-11-28
JPS6311720Y2 JPS6311720Y2 (enrdf_load_stackoverflow) 1988-04-05

Family

ID=30084068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7465482U Granted JPS58177940U (ja) 1982-05-21 1982-05-21 半導体拡散炉用石英ガラス管

Country Status (1)

Country Link
JP (1) JPS58177940U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6311720Y2 (enrdf_load_stackoverflow) 1988-04-05

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