JPS58177845U - Furnace temperature measuring device - Google Patents
Furnace temperature measuring deviceInfo
- Publication number
- JPS58177845U JPS58177845U JP7462582U JP7462582U JPS58177845U JP S58177845 U JPS58177845 U JP S58177845U JP 7462582 U JP7462582 U JP 7462582U JP 7462582 U JP7462582 U JP 7462582U JP S58177845 U JPS58177845 U JP S58177845U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- measuring device
- temperature measuring
- furnace temperature
- furnace wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Radiation Pyrometers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の熱電対の経時変化による測定誤差を示す
線区、第２図は放射温度計を使用した従来の炉内温度測
定装置の断面図、第３図は本考案の中空被測定物を示す
斜視図、第４図は本考案の炉温測定装置を示す断面図、
第５図は第４図のＶ−Ｖ線矢視断面図である。
２・・・放射温度計、４・・・炉壁、８・・・中空被測
定物、１０・・・測定孔、１２・・・孔（炉壁）、１４
・・・取付フード、１６・・・防塵ガラス隔壁、１８・
・・不活性ガス取入口。Figure 1 is a line showing measurement errors due to changes in conventional thermocouples over time, Figure 2 is a cross-sectional view of a conventional furnace temperature measurement device using a radiation thermometer, and Figure 3 is a hollow measurement device of the present invention. A perspective view showing the object, FIG. 4 is a sectional view showing the furnace temperature measuring device of the present invention,
FIG. 5 is a sectional view taken along the line V-V in FIG. 4. 2... Radiation thermometer, 4... Furnace wall, 8... Hollow measured object, 10... Measurement hole, 12... Hole (furnace wall), 14
...Mounting hood, 16...Dust-proof glass bulkhead, 18.
...Inert gas intake.
Claims (1)
を有する中空被測定物と、前記被測定物を前記炉壁に設
けられた孔を通して炉外から測温可能な放射温度計と、
防塵ガラス隔壁と不活性ガス取入口を有し前記放射温度
計を収納する取付フードと、を有して成る炉温測定装置
。a hollow object to be measured that is attached to the inside of a furnace wall and made of the same material as the furnace wall and has a measurement hole; a radiation thermometer that can measure the temperature of the object to be measured from outside the furnace through a hole provided in the furnace wall;
A furnace temperature measuring device comprising a dustproof glass partition wall and an installation hood having an inert gas intake port and housing the radiation thermometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7462582U JPS58177845U (en) | 1982-05-21 | 1982-05-21 | Furnace temperature measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7462582U JPS58177845U (en) | 1982-05-21 | 1982-05-21 | Furnace temperature measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58177845U true JPS58177845U (en) | 1983-11-28 |
Family
ID=30084042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7462582U Pending JPS58177845U (en) | 1982-05-21 | 1982-05-21 | Furnace temperature measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58177845U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63160327A (en) * | 1986-12-24 | 1988-07-04 | Mitsubishi Monsanto Chem Co | Annealing system for semiconductor wafer |
-
1982
- 1982-05-21 JP JP7462582U patent/JPS58177845U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63160327A (en) * | 1986-12-24 | 1988-07-04 | Mitsubishi Monsanto Chem Co | Annealing system for semiconductor wafer |
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