JPS5817633A - Gripping implement - Google Patents

Abstract

PURPOSE:To enhance the reliability of gripping and to obtain a gripping implement which can readily mount and dismount by providing a mechanism for strengthening gripping force by clamping by the aid of the elasticity when the implement is set to a containing jig and adding force to the grip. CONSTITUTION:An entire gripping implement 3 is lowered while urging a hook pawl 6 at the end of an arm 5 to the oblique surface 14 of a latch 7 to be hooked, the pawl 6 is elastically overriden to the latch 7. Thereafter, the implement 3 is slightly upwardly returned, and the pawl 6 is enaged within the inserting hole 13 of the latch 7. The jig 1 is already clamped in this state, but at the transporting time the shank 9 of the grip 4 and an auxiliary unit 12 are grasped, the arm 5 is deformed, as shown in Fig. (b), and the jig 1 is clamped with a pair of arm ends strongly. In removing the implement 3, the latter is moved downwardly as shown by an arrow in the drawing to remove the pawl 6 from the hole 13, and is moved sidewisely, thereby readily removing the pawl 6.

Description

[Detailed description of the invention]

The present invention relates to a clamper. Conventionally, as shown in FIG. 1 (al to lc), in wafer processing work in the development of semiconductor devices, a holding jig made of acid-resistant good resin is used to clean a semiconductor thin plate (wafer) 2 charged with IK. When etching, the holding jig 1, which is the object to be gripped, is gripped (clamped) with the gripper 3 having the structure shown in the figure.
The waste is then moved and transferred to a treatment tank. From the viewpoint of improving work efficiency, the gripping tool can be used to store the storage jig 1 in an extremely short time.
It needs to be set or reset. Also, a holding force appropriate for the weight is required. The gripping tool 3 includes a gripping part 4 having a frame structure, an arm 5 extending on the same extension of a pair of opposing sides of the gripping part 4, and a hook provided on the inner side of the tip of the pair of arms 5. It consists of 6. Since the grip portion 4 and arm 5 of the gripper 3 are required to be elastic bodies, they are entirely made of resin. It is also made of a material with excellent chemical resistance. The grip portion 4 is deformed by gripping the other pair of sides, and the distance between the tips of the arms 5 increases. obey

[, arm 5
When no external force is applied, the distance between the tips of the gripper is narrower than the distance between the pair of hooks 1670 provided on both outer surfaces of the storage jig l (see Fig. 1 (al)). 3, when clamping the accommodation jig 1, the grip part 4 is strongly dug from above and below as shown in FIG. After making the distance wider than the distance between the hooking parts 7, the hooking claws 6 of both arms 5 are placed facing the corresponding hooked parts 7 of the storage jig 1. Then, as shown in the same figure (cl), the clamping force is removed. , the hooking claw 6 is locked (hook) on the hooked part 7 of the accommodation jig 1, and the accommodation jig 1 is clamped by the elastic force of the pair of arms 5 and the grip part 4. When transporting, the handle 4 is moved by grasping the knob 8 above the grip 4. However, the grip 3 having such a structure has a problem in that the holding force is maintained by the elasticity of the arm 5 and the grip 4. If the weight of the object to be gripped, such as the storage jig 1, increases or the hooking claw 6 at the tip wears out, the storage jig 1 and the gripping tool 3 are both made of resin. The reliability of gripping is poor, such as when the wafer 1 comes off and falls during transportation, and the wafer 2 is damaged.Therefore, an object of the present invention is to provide a gripping tool that has high gripping reliability and is easy to attach and detach. In order to achieve such an object, the present invention, contrary to the conventional gripping tool, takes advantage of the elasticity of the gripping tool and increases the force on the gripping part when holding the gripping tool. The invention is characterized by a mechanism that enhances the holding force.The present invention will be explained below with reference to an embodiment.Figures 2 and 3 (a) and (b) show a gripping tool according to an embodiment of the present invention. 2 is a perspective view showing the gripping state, and FIGS. 3(a) and (bl) are schematic illustrations showing the usage state. As shown in FIGS. The gripping tool (clamper) 3 of this embodiment includes a U-shaped main body 11 consisting of a straight base 9 and a support frame 1o extending bent from both ends of the base 90, and a support on the base 9 side of the main body 11. It consists of an auxiliary body 12 which is fixed at both ends to the frame 10.These bodies are made of resin made of an elastic material with high chemical resistance.The auxiliary body 12 extends parallel to the main body 9. The base 9 and the support frame portions on the base side form a frame structure to form the grip portion 4. The support frame portions extending on the same extension of the opposing sides of the grip portion 4 form the arms 5, respectively. Therefore, the base 9 of the grip part 4 and the auxiliary body 12
If you squeeze it strongly, the distance between the tips of the arms 5 will become narrower. - The ends of both arms 5 are folded inward to form hooks 6, respectively. On the other hand, the housing jig 1 for housing the wafer 2 has hooked portions 7 on the outer surfaces of both ends thereof, on which the hooking claws 6 are hooked. As shown in FIG. 3(b), this hooked part 7 has an insertion hole 13 on its lower surface into which the hook 6 can be inserted, and an inclined surface on the upper part so that the hook 6 can slide while expanding.
It is 4. Further, the interval between the pair of hooking claws 6 is narrower than the interval between the pair of hooked parts 7, as shown in 3rd fg(a). Therefore, when the hooking claw 6 is inserted into the corresponding hooked @7VC, the accommodation jig 1 is held between the pair of hooking claws 6 by the elasticity of the grip portion 4 and the arm 50. When holding the storage jig 1 with a gripper 3 such as a knife,
As shown in FIGS. 2 and 3 (al), the hooking claw 6 at the tip of the arm 5 is pressed against the inclined surface 14 of the hooked part 7, and the entire gripping tool 3 is lowered, and the hooking claw 6 is elastically s7 to get over the hooked part s7, and then return the gripping tool 3 slightly upward [and fit the hooking claw 6 into the insertion hole 13 of the hooked part 7. In this state, the storage jig 1 is already clamped. However, during transportation, the main body 9 of the grip part 4 and the auxiliary body 12 are grasped, and the arm 5 is deformed and the storage jig 1 is strongly clamped with the tips of the pair of arms, as shown in FIG. 3 (bl). When removing the gripping tool 3, lower the gripping tool 3 downward and insert the hook 6 into the insertion hole 1 as shown by the arrow 5 in FIG.
This can be easily done by removing it from 3 and moving it to the side. According to such an embodiment, it is possible to securely hold the storage jig 1, and since the hooking claw 6 enters the insertion opening 13 of the hooked part 7, even if the hooking claw 6 is only slightly worn, the catching claw 6 is removed from the hooked N7. Therefore, it is suitable for clamping heavy objects. Note that the present invention is not limited to the above embodiments. That is,
As shown in FIGS. 4 (al to cl), the structure may be such that the hook 6 is inserted into the insertion hole 13 that opens outward on all four sides by the hook 6 that is slightly folded back. Also,
The tool to be grasped may be another object. As described above, according to the gripper f of the present invention, the object to be gripped can always be reliably gripped, so that the reliability of gripping is high. Additionally, it is easy to attach and detach, making it highly workable.

[Brief explanation of the drawing]

Fig. 1 (at to (cl) is a schematic explanatory diagram showing how to use a conventional gripping tool, Fig. 2 is a perspective view showing a gripping state of a gripping tool according to an embodiment of the present invention, and Fig. 3 (al, (bl is a schematic explanatory diagram showing the usage state, and FIGS. 4 (al to cl are schematic explanatory diagrams showing the usage state of the gripping tool according to other embodiments. 1... Accommodation jig, 3...・Gripper, 4...grip part,
5... Arm, 6... Hook claw, 7... Hooked part,
13...Insertion hole, ]4...Slanted surface. Agent Patent Attorney Susuki 1) Toshiyuki...//Wow
ノ'' Figure 1

Claims (1)

[Claims] 1. A grip part with a frame structure that elastically deforms when squeezed, an arm made of an elastic body that protrudes on the same extension of a pair of opposing sides of this grip part, and an object to be gripped at the tip of this arm. In the gripping tool f, which is composed of hooking claws that are hooked on the hooked part, the pair of hooking claws engages with the hooked part of the object to be grasped against the elasticity of the arm, and also due to grip deformation during gripping. , a gripping tool characterized in that the pair of hooking claws are configured to strongly grip an object to be gripped.