JPS58176127A - Preparation of stabilized zirconia fine powder - Google Patents

Preparation of stabilized zirconia fine powder

Info

Publication number
JPS58176127A
JPS58176127A JP5959082A JP5959082A JPS58176127A JP S58176127 A JPS58176127 A JP S58176127A JP 5959082 A JP5959082 A JP 5959082A JP 5959082 A JP5959082 A JP 5959082A JP S58176127 A JPS58176127 A JP S58176127A
Authority
JP
Japan
Prior art keywords
zirconium
stabilized zirconia
parts
salt
fine powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5959082A
Other languages
Japanese (ja)
Inventor
Takaaki Tsukidate
月舘 隆明
Reiji Miura
三浦 礼司
Satoru Tenma
天満 覚
Tomiyoshi Kubo
久保 富義
Yoshiichi Inoue
井上 芳一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Toyo Soda Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Soda Manufacturing Co Ltd filed Critical Toyo Soda Manufacturing Co Ltd
Priority to JP5959082A priority Critical patent/JPS58176127A/en
Publication of JPS58176127A publication Critical patent/JPS58176127A/en
Pending legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)

Abstract

PURPOSE:To prepare stabilized zirconia fine powder in high purity, at a low cost, by spraying and calcining an aqueous solution of a zirconium salt and a specific stabilizer under specific condition. CONSTITUTION:The zirconium salt is preferably zirconium oxychloride, zirconium sulfate, zirconium nitrate and basic zirconium carbonate, and examples of the stabilizer are salts of calcium, magnesium and yttrium. An aqueous solution or slurry of a zirconium salt and a stabilizer, containing 1-15pts.wt. of Ca, 1- 10pts.wt. of Mg or 2-20pts.wt. of Y per 100pts.wt. of Zr, is sprayed and calcined at 600-2,000 deg.C. The linear velocity of the solution in the spray calcination is 10-500m/min. Stabilized zirconia fine powder having particle size of about <=1mu can be prepared by this process.

Description

【発明の詳細な説明】 本発明はセンサー、耐火物、セラミックスおよび電子工
業などに使用される高純度安定化ジルコニア微粉末の製
造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing high-purity stabilized zirconia fine powder used in sensors, refractories, ceramics, electronic industries, etc.

従来、安定化ジルコニア粉末は、鉄鋼の連続鋳造用耐火
物、電子材料、自動車の排ガスセンサーなどに使用され
てき九。これらの分野では1〜数ミクロンの安定化ジル
コニア粉末が用いられてき九が、近年使用される製品の
高機能化の要求に伴い、サブミクロンの安定化ジルコニ
ア粉末が求められている。
Conventionally, stabilized zirconia powder has been used in refractories for continuous casting of steel, electronic materials, and exhaust gas sensors for automobiles. In these fields, stabilized zirconia powders of 1 to several microns have been used, but in recent years, with the demand for higher functionality of products used, submicron stabilized zirconia powders have been required.

このサブミクロンの安定化ジルコニア粉末の製造方法と
しては、1)ジルコンサンドをアルカリ焙焼後、酸処理
し、ジルコニウム塩とし、これにカルシウム、マグネシ
ウムおよびイツトリウムなどの化合物を安定化剤として
加え、さらにアルカリで中和処理し九後、か鉤看砕する
か、バデライトを酸処理し、見られ九ジルコニウム塩を
同様に処理する方法。
The method for producing this submicron stabilized zirconia powder is as follows: 1) zircon sand is roasted with alkali and then treated with acid to form a zirconium salt, to which compounds such as calcium, magnesium and yttrium are added as a stabilizer; After neutralizing with an alkali and then crushing, the baddeleyite is treated with an acid, and the zirconium salt is treated in the same way.

(勾オキシ塩化ジルコニウムまたはジルコニウムアルコ
キシドに安定化剤を加え、長時間加温し、加水分解させ
てえ圧水酸化物をか焼肴砕する方法。
(A method in which a stabilizer is added to zirconium oxychloride or zirconium alkoxide, heated for a long time, hydrolyzed, and the hydroxide is calcined and crushed.

などがある。and so on.

(1)の方法においては、アルカリで中和処理する際、
安定化剤とジルコニウム塩の水酸化物の溶液に対する溶
解度が著しく異なる丸めに、均一に安定化剤が分散した
ジルコニウムの水酸化物となりに<<、均質な安定化ジ
ルコニア肴末は得難い。
In method (1), when neutralizing with alkali,
Since the stabilizer and the zirconium salt have significantly different solubility in the hydroxide solution, it is difficult to obtain a homogeneous stabilized zirconia powder because the stabilizer is uniformly dispersed in the zirconium hydroxide.

0)の加水分解による方法は、極めて高純度の安定化ジ
ルコニア黴粉末を得ることができるが、大量に生産する
には、原料が高価である上に設備も、X 膨大となり1製造コストが高くなる。簡便な方法として
電動法が考えられるが、これは微粉末を得るには適さ表
い。
Method 0) using hydrolysis can obtain stabilized zirconia mold powder of extremely high purity, but in order to produce in large quantities, the raw materials are expensive and the equipment is also huge, making the production cost high. Become. An electric method may be considered as a simple method, but it is not suitable for obtaining fine powder.

これらアルカリ中和または加水分解法では、ジルコニウ
ムの水酸化物と安定化剤の水酸化物が、それぞれの粒子
表面または粒子近傍に存在し、か焼の工程で、ジルコニ
アと安定化剤の拡散によって安定化ジルコニアが生成す
るという機構を経ていると思われる。従って、水酸化物
の共沈工程およびか焼工程での溶液のpHコントロール
および温度コントロールが充分でない場合、一部に安定
化剤を固溶しない製品を生じるという欠点を有している
In these alkali neutralization or hydrolysis methods, the hydroxide of zirconium and the hydroxide of the stabilizer are present on or near the respective particles, and during the calcination process, the hydroxide of zirconium and the stabilizer are diffused. It seems that the mechanism is that stabilized zirconia is generated. Therefore, if the pH and temperature control of the solution in the hydroxide coprecipitation step and the calcination step are not sufficient, there is a drawback that some products do not contain the stabilizer as a solid solution.

また、粉砕については、現在機械的に行われているが、
不純物の混入9粒径分布のコントロールの困難さなどの
点で充分な方法とはなっていない。
In addition, although pulverization is currently done mechanically,
This method is not satisfactory in terms of contamination with impurities, difficulty in controlling particle size distribution, etc.

本発明者等は、かかる製造プロセスの問題点を解決すべ
く鋭意検討した結果、アルカリを使用せず、また粉砕を
必要としない方法として噴霧焙焼法により、シルコニ、
ラム塩の水溶液またはスラリ、1 一溶液から直接高純度安定化ジルコニア微粉末を安価に
製造する方法を見出した。
As a result of intensive study to solve the problems of this manufacturing process, the present inventors have developed a method that does not use alkali and does not require pulverization.
An aqueous solution or slurry of lamb salt has been found to produce a low-cost method of producing high-purity stabilized zirconia fine powder directly from a solution.

すなわち、本発明はジルコニウム塩およびカルンウム、
マグネシウムまたはイツトリウムの塩からなろ水溶液ま
たはスラリー溶液を600℃〜2000℃の温度で、噴
霧焙焼することを特徴とする安定化ジルコニア微粉末の
製造方法を提供するものである。
That is, the present invention provides zirconium salt and carunium,
The present invention provides a method for producing stabilized zirconia fine powder, which comprises spraying and roasting an aqueous solution or slurry solution of a magnesium or yttrium salt at a temperature of 600°C to 2000°C.

本発明のジルコニウム塩としては、特に制限は々く、い
ずれの塩でも良いが、好ましくはオキシ塩化ジルコニウ
ム、硫酸ジルコニウム、硝酸ジルコニウムまたは塩基性
炭酸ジルコニウムである。
The zirconium salt of the present invention is not particularly limited and may be any salt, but preferably zirconium oxychloride, zirconium sulfate, zirconium nitrate or basic zirconium carbonate.

特に好ましくは、オキシ塩化ジルコニウムである。Particularly preferred is zirconium oxychloride.

安定化剤としては、カルシウム、マグネシウムまたはイ
ツトリウムの塩があけられる。これらの塩とジルコニウ
ム塩との組合せは適宜選ばれるが、噴霧焙焼工程から副
生ずる酸が同じとなるような組合せが好ましい。
Calcium, magnesium or yttrium salts can be used as stabilizers. Combinations of these salts and zirconium salts may be selected as appropriate, but preferred are combinations in which the acids produced as by-products from the spray roasting process are the same.

ジルコニウム塩と安定化剤の混合割合は、均一に安定化
剤が分散される範囲であれば特に制限はないが、好まし
くは、ジルコニウム100重量部に対し、カルシウム1
〜15重量部、マグネシウム1〜10重量部またはイツ
トリウム2〜20重量部である。ジルコニウムに対する
これら安定化剤の混合割合が低すぎると安定化の効果が
生まれず、逆に多すぎると微粉末としてのジルコニアの
特性を低下させてしまうので好ましくない。
The mixing ratio of the zirconium salt and the stabilizer is not particularly limited as long as the stabilizer is uniformly dispersed, but preferably 100 parts by weight of zirconium is mixed with 1 part of calcium.
~15 parts by weight, 1 to 10 parts by weight of magnesium, or 2 to 20 parts by weight of yttrium. If the mixing ratio of these stabilizers to zirconium is too low, no stabilizing effect will be produced, and if it is too large, the properties of zirconia as a fine powder will be deteriorated, which is not preferable.

噴霧焙焼に供すべき、ジルコニウム塩と安定化剤の混合
溶液としては、水溶液またはスラリー溶液が使用できる
。水溶液の調製は、通常の方法で良く、ジルコニウム塩
水溶液に、安定化剤を溶解する。別々の水溶液を混合す
るなどによシ調整される。これら塩水溶液の濃度は、熱
収支上から、塩の析出を生じない範囲で十分に濃くする
ことが好ましく、そのために適当な酸、例えば塩酸、硫
酸、有機酸などを加えることもできる。
As the mixed solution of zirconium salt and stabilizer to be subjected to spray roasting, an aqueous solution or a slurry solution can be used. The aqueous solution may be prepared by a conventional method, and the stabilizer is dissolved in the zirconium salt aqueous solution. It is adjusted by mixing different aqueous solutions. The concentration of these salt aqueous solutions is preferably set to a sufficiently high concentration in a range that does not cause precipitation of salts from the viewpoint of heat balance, and for this purpose, suitable acids such as hydrochloric acid, sulfuric acid, organic acids, etc. may be added.

噴霧焙焼としては、通常使用される噴霧焙焼炉により6
00℃〜2000℃の温度で行えば良い。
For spray roasting, use a commonly used spray roasting furnace.
It may be carried out at a temperature of 00°C to 2000°C.

この温度は、酸素および水素ガスをバーナーより通じて
酸水素炎により見られるが、酸素−アセチレンガスまた
は酸素−プロノくンガスの燃焼炎でもかまわなハ。また
、本発明の特徴を遺憾なく発揮するためには、ジルコニ
ウム塩および安定化剤の混合溶液を10〜500m/m
inの線速度で噴霧焙焼することが良く、これによ91
ミクロン以下の安定化ジルコニア微粉末がえられる。
This temperature can be achieved with an oxyhydrogen flame by passing oxygen and hydrogen gas through a burner, but a combustion flame of oxygen-acetylene gas or oxygen-proton gas may also be used. In addition, in order to fully exhibit the features of the present invention, it is necessary to apply a mixed solution of zirconium salt and stabilizer at a rate of 10 to 500 m/m.
It is preferable to perform spray roasting at a linear velocity of 91 in.
Stabilized zirconia fine powder of sub-micron size can be obtained.

また、噴霧焙焼により酸が閣生ずるが、これは生成物安
定化ジルコニア黴粉末と容易に分離することができ、そ
の回収工程を設けることで処理される。
In addition, the spray roasting produces acid, which can be easily separated from the product stabilized zirconia mold powder and treated by providing a recovery step.

以上述べたごとく、本発明は、ジルコニウム塩と安定化
剤の均一な溶液を噴霧焙焼することにより、アルカリを
使用せず、簡便な設備、単純な工程により、任意の割合
で均一に安定化剤が分散固溶した安定化ジルコニア微粉
末をえることができる。
As described above, the present invention achieves uniform stabilization in any ratio by spray roasting a uniform solution of zirconium salt and a stabilizer, without using alkali, using simple equipment and a simple process. It is possible to obtain stabilized zirconia fine powder in which the agent is dispersed and dissolved.

以下、本発明を実施例によって説明するが、本発明はこ
れによって限定されるものではない。実施例中の部およ
び−はすべて重量部および重量−である。
EXAMPLES The present invention will be explained below with reference to Examples, but the present invention is not limited thereto. All parts and - in the examples are parts by weight and -.

実施例1 オキシ塩化ジルコニウム(ZrOClm・8ル0)24
0部と塩化カルシウム(Call、 ) 10部を、水
500部KM解させた。この様にして調整した混合溶液
を焙焼11[1200℃、Is速度70m+/winで
酸水素炎により噴霧焙焼し、α1〜1ミクロンの粒度分
布を有するカルシア安定化ジルコニウム微粉末をえた1
、この生成物の化学分析値は、 ZrOド9L6チ。
Example 1 Zirconium oxychloride (ZrOClm・8ru0) 24
0 parts and 10 parts of calcium chloride (Call, ) were dissolved in 500 parts KM of water. The mixed solution prepared in this manner was roasted by spray roasting using an oxyhydrogen flame at 1200°C and an Is speed of 70 m+/win to obtain a calcia-stabilized zirconium fine powder having a particle size distribution of α1 to 1 micron.
, the chemical analysis value of this product is ZrOdo9L6chi.

OaO: 4.7チ、 sto、 :αo s L F
’ll、o、:α1優であった。
OaO: 4.7chi, sto, :αo s L F
'll, o, : α1 excellent.

噴霧焙焼炉としては、20鴎φの二重管からなるバーナ
ーを設置した70■φ×2000−の焙焼炉および30
0−φx5000鴎のスクラバーからなるものを使用し
九。
The spray roasting furnace includes a 70 mm diameter x 2000-mm roasting furnace equipped with a 20 mm diameter double-tube burner, and a 30 mm diameter roasting furnace.
Use a 0-φx5000 seaweed scrubber.

実施例2 実施例1の塩化カルシウムの代りに塩化イツトリウム(
YOI、) 15部を用い、焙焼温度1500℃。
Example 2 Yttrium chloride (
YOI, ) 15 parts were used, and the roasting temperature was 1500°C.

線速度100I11/!1Iinで実施例1と同様に噴
霧焙焼し、α1〜α5ミクロンの粒1分布を有するイツ
トリア安定化ジルコニア微粉末をえた。このものの化学
分析値は、ZrO,:91.4 % 、 Y、Oj: 
7.8−、 sto、; (L 01 %、 Fe、O
,:α01−であった。
Linear speed 100I11/! Spray roasting was carried out in the same manner as in Example 1 at 1 Iin to obtain an ittria-stabilized zirconia fine powder having a particle size distribution of α1 to α5 microns. The chemical analysis values of this product are ZrO: 91.4%, Y, Oj:
7.8-, sto,; (L 01 %, Fe, O
, :α01−.

実施例3 実施例1の塩化カルシウムの代りに、塩化マグネシウム
(Mg01d  10mlを用い、実施例1と同様に噴
霧焙焼し、マグネシア安定化ジルコニア微粉末をえ九。
Example 3 In place of the calcium chloride in Example 1, 10 ml of magnesium chloride (Mg01d) was used and spray roasted in the same manner as in Example 1 to obtain magnesia-stabilized zirconia fine powder.

このものの化学分析値は、ZrO,:9  ’j>2%
、   MgO:  40  ラG、、   810*
:  α 02 タG  、  Fe、O,:[103
チであった。
The chemical analysis value of this product is ZrO,:9'j>2%
, MgO: 40 LAG,, 810*
: α 02 TA G , Fe, O, : [103
It was Chi.

実施例4 硫酸ジルコニウム(Zr(So、)、−4H,O) 2
80部と硫酸イツトリウム(y、(so、)、) 15
部を水500部に溶解した以外は、実施例2と同様に噴
霧焙焼し、α1〜°α5ミクロンの粒度分布のイツトリ
ア安定化ジルコニア微粉末をえた。このものの化学分析
値は、ZrO,: 92.9%、 Y、O,: &8%
、 810. :C1,025G、 We、O,:  
α005−であった。
Example 4 Zirconium sulfate (Zr(So, ), -4H,O) 2
80 parts and yttrium sulfate (y, (so,),) 15
Spray roasting was carried out in the same manner as in Example 2, except that 500 parts of water was dissolved in 500 parts of water to obtain ittria-stabilized zirconia fine powder with a particle size distribution of α1 to α5 microns. The chemical analysis values of this product are: ZrO,: 92.9%, Y, O,: &8%
, 810. :C1,025G,We,O,:
It was α005-.

特許出願人 東洋曹達工業株式会社Patent applicant: Toyo Soda Kogyo Co., Ltd.

Claims (1)

【特許請求の範囲】 α)ジルコニウム塩および安宛化剤としてカルシウム、
ffダネシウムを大はイツトリウムの塩からなる水iw
ntえはスラリー濤涼を400〜2000℃の温度で噴
優焙鉤することを特徴とする安定化ジルコニア黴粉末の
製造方法。 (2) ジルコニウム塩がオキシ塩化ジルコニウム。 硫酸ジルコニウム、硝酸ジルコニウムまたは塩基性炭酸
ジル′:にラムである特許請求の範囲(1)項記載の製
造方法。 (2) ジルコニウム塩と安窒化剤との混合割合が、ジ
ルコニウム110重量11に対して、カルシウム1〜1
5重量部、マダネシウム1〜10重量部またはイツトリ
ウム2〜20重量部である特許請求の範5ast九は一
項記載0製造方法。 (2)噴霧焙焼での溶液の線速度が10〜500II 
/ !ninである特許請求の範@(1)から(2)項
のいずれかに記載の製造方法。
[Claims] α) Calcium as a zirconium salt and a softening agent,
ff Danesium is a large amount of water made of yztrium salt iw
The method for producing stabilized zirconia mold powder is characterized in that slurry Toryo is heated at a temperature of 400 to 2000°C. (2) The zirconium salt is zirconium oxychloride. The manufacturing method according to claim (1), wherein zirconium sulfate, zirconium nitrate, or basic zircarbonate is used. (2) The mixing ratio of the zirconium salt and the nitriding agent is 110 parts by weight of zirconium to 1 to 1 parts by weight of calcium.
5 parts by weight, 1 to 10 parts by weight of madanesium, or 2 to 20 parts by weight of yttrium. (2) The linear velocity of the solution during spray roasting is 10 to 500 II
/! The manufacturing method according to any one of claims (1) to (2), which is nin.
JP5959082A 1982-04-12 1982-04-12 Preparation of stabilized zirconia fine powder Pending JPS58176127A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5959082A JPS58176127A (en) 1982-04-12 1982-04-12 Preparation of stabilized zirconia fine powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5959082A JPS58176127A (en) 1982-04-12 1982-04-12 Preparation of stabilized zirconia fine powder

Publications (1)

Publication Number Publication Date
JPS58176127A true JPS58176127A (en) 1983-10-15

Family

ID=13117593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5959082A Pending JPS58176127A (en) 1982-04-12 1982-04-12 Preparation of stabilized zirconia fine powder

Country Status (1)

Country Link
JP (1) JPS58176127A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4639356A (en) * 1985-11-05 1987-01-27 American Cyanamid Company High technology ceramics with partially stabilized zirconia
US4851293A (en) * 1987-04-22 1989-07-25 Tioxide Group Plc Stabilized metallic oxides
JPH01188461A (en) * 1988-01-20 1989-07-27 Noboru Aiko Al2o3-zro2 ceramic
WO1989008610A1 (en) * 1988-03-07 1989-09-21 Cabot Corporation High surface area metal oxide foams and method of producing the same
EP0362186A2 (en) * 1988-09-30 1990-04-04 Maschinenfabrik Andritz Actiengesellschaft Process for producing aluminium titanate
US5147630A (en) * 1989-06-05 1992-09-15 Reznek Steven R Method of producing alumina foams
US5336521A (en) * 1991-11-02 1994-08-09 Tioxide Group Services Limited Metallic oxides
US5460770A (en) * 1989-06-15 1995-10-24 Tioxide Group Plc Method for protecting shaped articles from attack by water
EP1264800A3 (en) * 2001-06-04 2004-01-02 Sumitomo Chemical Company, Limited Process for producing zirconia powder
JP2005512927A (en) * 2001-12-17 2005-05-12 プラックセアー エス.ティ.テクノロジー、 インコーポレイテッド Method for producing stabilized zirconia

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4639356A (en) * 1985-11-05 1987-01-27 American Cyanamid Company High technology ceramics with partially stabilized zirconia
US4851293A (en) * 1987-04-22 1989-07-25 Tioxide Group Plc Stabilized metallic oxides
JPH01188461A (en) * 1988-01-20 1989-07-27 Noboru Aiko Al2o3-zro2 ceramic
US4937062A (en) * 1988-03-07 1990-06-26 Cabot Corporation High surface area metal oxide foams and method of producing the same
WO1989008610A1 (en) * 1988-03-07 1989-09-21 Cabot Corporation High surface area metal oxide foams and method of producing the same
EP0362186A3 (en) * 1988-09-30 1992-02-19 Maschinenfabrik Andritz Actiengesellschaft Process for producing aluminium titanate
EP0362186A2 (en) * 1988-09-30 1990-04-04 Maschinenfabrik Andritz Actiengesellschaft Process for producing aluminium titanate
US5147630A (en) * 1989-06-05 1992-09-15 Reznek Steven R Method of producing alumina foams
US5460770A (en) * 1989-06-15 1995-10-24 Tioxide Group Plc Method for protecting shaped articles from attack by water
US5336521A (en) * 1991-11-02 1994-08-09 Tioxide Group Services Limited Metallic oxides
EP1264800A3 (en) * 2001-06-04 2004-01-02 Sumitomo Chemical Company, Limited Process for producing zirconia powder
KR100829408B1 (en) * 2001-06-04 2008-05-15 스미또모 가가꾸 가부시키가이샤 Process for producing zirconia powder
JP2005512927A (en) * 2001-12-17 2005-05-12 プラックセアー エス.ティ.テクノロジー、 インコーポレイテッド Method for producing stabilized zirconia

Similar Documents

Publication Publication Date Title
US3208866A (en) Tio2 manufacture
US6548039B1 (en) Processing aqueous titanium solutions to titanium dioxide pigment
US20020071806A1 (en) Method for producing mixed metal oxides and metal oxide compounds
JPS58176127A (en) Preparation of stabilized zirconia fine powder
JPH0524844A (en) Production of hydrated zirconia sol and zirconia powder
CN103588246A (en) Preparation process for nano zirconia powder
JPH03170332A (en) Zirconium dioxide powder, its manufacture and use as well as sintered product
US4532224A (en) Composite ceramic powders and a method of making the same
JPH0137331B2 (en)
CA2377241C (en) Processing aqueous titanium solutions to titanium dioxide pigment
JPH0244766B2 (en)
JPH0925119A (en) Production of heat resistant transition alumina
Gongyi et al. Effect of Preparation Methods and Condition of Precursors on the Phase Composition of Yttria‐Stabilized Zirconia Powders
JPH03126621A (en) Zirconium dioxide powder, preparation thereof, use thereof and sintered body prepared therefrom
JP3146578B2 (en) Manufacturing method of zirconia fine powder
JP3265597B2 (en) Method for producing zirconia fine powder
JPS60141621A (en) Manufacture of zirconia
JPS62128924A (en) Production of zirconium oxide series fine powder
JP2882040B2 (en) Method for producing hydrated zirconia sol
Woodhead Gel processing
JPH06157037A (en) Production of zirconium oxide powder
JPS62100420A (en) Production of ultrafine grain powder of high-purity hematite
JP3282264B2 (en) Method for producing magnetic oxide powder
JPH10182156A (en) Zirconia power and its production
RU2076069C1 (en) Process for preparing finely dispersive zirconium dioxide powder