JPS5817304A - Method for measuring surface roughness - Google Patents

Abstract

PURPOSE:To obtain the roughness of the surface to be measured, by employing an area and load detecting device which is constituted by holding a pressure sensitive plate whose resistance is changed by the contact with a body in an ON and OFF mode and a pressure sensitive plate whose resistance is changed in proportion to the n-th power of the contacting pressure between a pair of flexible conducting plates. CONSTITUTION:The pressure sensitive plate 11, whose resistance R changes with the pressure is held between the flexible conducting plate 12 having a pair of electrode plates 14 and 15 in the direction x and the similar conducting plate 13 having a pair of electrode plates 16 and 17 in the direction y. A voltage +a is applied to the electrodes 14 and 15 through resistors R and a voltage -a is applied to the electrodes 16 and 17. The resistance R for the pressure sensitive plate 11 is changed by the application of the pressure P in the ON and OFF mode as shown by a characteristic curve (b). Then a detecting device 1 becomes an area detecting device. An area S of the body A is obtained by electrode voltages VA1 and VB1. When the resistance of the plate is changed in proportion to the n-th power of the pressure as shown by a characteristic curve (c), the device 1 becomes a load detecting device. A total sum W n of the n-th power values of the load distribution of the convex parts on the contact surface is obtained by the voltages VA1 and VB1. The surface roughness is obtained from both S and Wn.

Description

DETAILED DESCRIPTION OF THE INVENTION This invention relates to a method for determining the surface roughness of an object.

Currently, various methods for measuring the surface roughness of objects have been proposed and implemented, some of them not only have a fiery measuring probe procedure that is cumbersome, but also require very complicated and expensive equipment to carry out. There are quite a few 10 people.

The present invention aims to provide a method that can measure extremely rough crystals on a certain surface of an object using a simple and inexpensive device.
When pressed against a certain pressure-sensitive plate, the total area of minute protrusions on the surface to be measured that directly touch the pressure-sensitive plate changes depending on the roughness of the surface to be measured, and the contacting protrusions cause the pressure-sensitive plate to Focusing on the fact that the sum of the squared values of the load distribution applied to the surface changes depending on the roughness of the surface to be measured, we focused on the fact that the sum of the squared values of the load distribution applied to the surface changes depending on the roughness of the surface being measured. An area detector and a load detector are used, each of which is constructed by sandwiching a pressure sensitive plate whose pressure changes in proportion to the first power of the pressure between a pair of flexible conductive plates. A conductor 4 provided on a pair of opposite sides of one conductive plate, respectively
A voltage +6 is applied through the resistor, and the other conductive plate O is applied to each of the pair of detectors.
A voltage of -6 is applied to the other pair of electrodes provided on the opposite sides through the resistors, and the applied voltage is calculated based on the voltage of each electrode when the fixed surface of the object is pressed against the above-mentioned both lateral extensions. This method is characterized by determining the column constant mlO table curvature.

To explain the details of the unfired @07j method in more detail, as shown in Fig. 1, the area detector 1 used in the present invention is shown in Fig. By applying a pressure P and ζ, the paper making wLR is provided with a pressure sensitive plate 11 that changes on and off from a value of approximately zero to a value close to zero, and a pair of 1q flexible conductive plates 6.u of the pressure sensitive plate nk are used. ), and electrodes 14. A stand is provided, and electrodes 11 and 17 are provided on a pair of opposite sides in the ν direction of the conductive plate 13 in one direction.

In addition, load tester 2 used by 3a Hiromoto 11ijiK
Show i. Pressure sensitive plate 21 companies in Jin's detector 2, I
As shown in Fig. s and 2), the resistance wind has a characteristic that changes inversely to the attack of the pressure P.

The other specific configuration is almost the same as that of the area detector l shown in FIG. .

To use the area detector 1 and the load detector 2 having the above configurations, first, in each detection-i, 2, a pair of electrodes 14, is, 24 facing each other in one direction is used.

25 through a resistor V, the conductivity of the O detectors 1 and 2 is applied in the V direction @Am, and the 411 body AO field ifi is touched under a constant pressure to 11J-. Electron 1i of area detector 1 14-17 K > elf b Electron 1
i 'IR pressure VAI t Vllll m VCI eV
Detect Dt and the electrode voltage Vat e VB2 e Vat v VDI at the electrode arm ~ rIK of the load detector 2, and these voltages and the above applied voltage 10g, -+sK
Based on the area detector IK, the convex portion O to be measured iiO
11 Product 8 and the convex portion of the contact surface] Load detection @Load distribution O applied to the force OI! IIWs can be obtained.

FIG.
, 32 is applied to the adder circuit 33, and the output from the above 8
as the output of the adding circuit okara.

5=J@-VAI-VBI. Also, Vh for Ws91g electrode voltage VAt e VBz t' (same as in Figure 1 〇m1m1K) %Wvh= za -VAt -V
I am self-reliant with the jin that I seek as y**.

gj diagram a above a1 hi Ws & electric [Electric JEVc1. Vca
.

A subtraction circuit U that shows the OI circuit configuration for obtaining VDI e Vpt using the electrode voltage and applied voltage.

3!6, and apply it to the addition circuit iris which is the output from the subtraction circuit 34.35 based on it, and make the above 8 and Ws the output of the addition circuit iris, 8 = 2a - VCl - Vl)t Ws = 28- Vat-VI) z) Find 10”t”Toru.

Therefore, by using 8 and - obtained as described above, it is possible to obtain the surface roughness of the surface to be measured of the object O. That is, for example, if the surface to be measured is firmly
I) In the case shown by K, S is large and the leprosy is small, and when the cross section is shown in the figure (&)K, D, 8 is small and Ws takes a large value. Therefore, the surface roughness can be determined by comparing the O8 and %VsO values with standard values determined in advance.

Incidentally, the area detector 1 and the load detector -2 can be installed one on top of the other with a flexible insulating plate interposed therebetween, thereby making it possible to detect the loads 8 and -2 simultaneously.

As described in detail above, the roughness of the surface to be measured of an object can be very easily determined by using the trap, which is a device that can be easily and inexpensively obtained according to the present invention.

[Brief explanation of the drawing]

FIGS. 1 and 3 are perspective views of the area detector and load detector used in the practice of the present invention, FIG. The figure is a block diagram of the arithmetic circuit connected to each of the above detectors, 1RL6 diagram (6)
, φ) are enlarged cross-sectional views of different surface surfaces. 1...Area detector, 2...Load detector, 11,
21... Pressure sensitive plate, 14-17, u N27-,, electrode. Designated Agent Ichiya Yodo, Director, Product Science Research Institute, Agency of Industrial Science and Technology

Claims (1)

[Claims] L An area detector constructed by sandwiching a pressure-sensitive plate whose resistance changes on and off depending on the contact with an object and a pressure-sensitive plate whose resistance changes in proportion to the contact pressure between a pair of conductive plates. Using the area detector and the load detector, voltage +- is applied to the electrodes of the pair of opposite sides Klk of one of the conductive plates in the area detector and the load detector aSso through the respective resistors, and the A voltage of -6 is applied to the electrodes provided on the other pair of opposite sides of the other O conductive plate through the respective resistors, and when the surface to be measured of the object is brought into pressure contact with the above-mentioned both lateral extensions, the voltage of each electrode is A surface roughness measuring method characterized in that the surface roughness t- of a surface to be measured is determined based on a voltage.