JPS5817300A - High- or low-temperature material supply system, and supply conduit - Google Patents

Abstract

PURPOSE:To enable reducing the rate of temperature rise and the rate of vaporization of a liquid being supplied, by flowing a refrigerant liquid so that the liquid may be supplied to a using point without a temperature change. CONSTITUTION:LN2 from an LN2 tank 1 flows in a liquid supply space 7 while cooling various equipments 2. Then, used LN2 flows through a return space 11 between an outermost pipe 10 and a partition pipe 8 while preventing a temperature rise of a conduit 5, particularly a center pipe 6 disposed at the center of the conduit 5, going into a vaporizer 13. A heat-insulating space 9 between the partition pipe 8 and the center pipe 6 is vacuum and therefore has a high heat-insulating effect, thereby preventing the vaporization of LN2 flowing in the supply space 7 of the center pipe 6.

Description

DETAILED DESCRIPTION OF THE INVENTION Himi relates to a refrigerant supply system for supplying liquid or gas at low temperature and to a conduit used in the supply system.

Liquid nitrogen (LN) is used as a refrigerant for oil diffusion vacuum pumps in evaporation equipment and implantation equipment. This LN can be supplied by charging it into a pressure-resistant capacity 1) (so-called Mahohin) or by flowing it through a conduit.

However, with conventional pressure-resistant containers, the supply efficiency is ◆1s.
It's below 0%. In addition, a double pipe is installed as a utility plant, and the outside where LN flows is connected to the true! When LN was supplied while keeping it warm at 1, LN was used at the point of use.
vaporized and could not be used as a refrigerant. This corresponds to a supply efficiency of 0%.

Here, the supply efficiency is based on the following 2.

Therefore, an object of the present invention is to supply refrigerant liquid to the point where it is used while keeping it warm while cooling it so that it does not change, thereby reducing the rate at which the liquid heats up or vaporizes. be.

In order to achieve these objectives, the present invention connects a high-temperature or low-temperature substance supply source and a usage part with a supply conduit having a triple or more structure, and also allows the high-temperature or low-temperature substance to flow into a central pipe in the innermost part of the conduit. , and the central canal and its outer septa,
The space between the septum and the septum and between the septum and the outermost tube is a constant temperature space or a space through which used high-temperature or low-temperature substances can flow.The present invention will be explained below with reference to Examples.

FIG. 1 is a schematic diagram showing a refrigerant supply system according to an embodiment of the present invention. As shown in the figure, LN and tank 1, which are refrigerant supply sources, and two groups of various devices, which are refrigerant using sections, are connected by a conduit 5 via a manifold 3 and a pulp 4. As shown in FIG. 2, this conduit 5 has a triple structure. That is, the central pipe 6 is a round pipe, and the refrigerant (LN) sent out from the tank 1 flows within the conveying space 7 of the central pipe 6. Outside the central pipe 6, there is a partition 8 made of a square pipe with a triangular cross section. The circle that forms the outer periphery of the center tube 6 is the inner circumference of the snow barrier 8. The space between the snow barrier 8 and the center tube 6 is a heat insulating space (
In this embodiment, a constant temperature space) 9 is formed, which becomes a vacuum area, further enhancing the heat insulation effect.

On the other hand, an outermost tube 10 is fitted into the septum 8 having a triangular interrupted structure, with the outer circumference being a circle forming the inner periphery. The space between the outermost pipe 1o made of a round pipe and the partition 8 becomes a return space 11, through which the refrigerant used in the various devices 2 flows and is returned to the supply source side. Since this return space communicates with the return pipe 12, the used refrigerant enters the vaporizer 13 at a temperature of 5 tC. Carburetor 13 is LN! It is also connected to the tank 1 via a pipe 14. In addition, the vaporizer 13
When the N1 gas is vaporized into N and gas, it is released into the atmosphere from the discharge pipe 5.

It is designed to be used as a gas.

In such an embodiment, the LN, which is sent out from the tank 1, flows through the conveyance space 7 and is sent to the various devices 2 to cool the various devices 2. In addition, the used LN (most of which has cooled and changed to N and gas) now flows through the return space 11 between the outermost pipe 1o and the snow barrier 8, and flows through the conduit 5. In particular, it flows into the vaporizer 13 while playing the role of cutting off the temperature rise in the inner central pipe 6. In addition, since the insulation space 9 between the snow partition 8 and the center pipe 6 is in a vacuum state, the insulation effect is high, and the temperature of the center pipe 6 due to outside air increases. LN.

Prevents evaporation.

Therefore, in this embodiment, since the refrigerant can be supplied to the refrigerant-using part KLN far away from the refrigerant supply source without vaporizing it, the supply efficiency is as high as 100%, and the economic efficiency is high.

In addition, since the supply conduit is a polygonal square tube with an even number H from the center, and it is a circular tube whose inner diameter or outer diameter is the inner circumference or outer circumference of this square tube, Easy to manufacture.

Incidentally, Himi and Akira are not determined in the above-mentioned Example Vcl11%. That is, the number of alternate snows may be further increased to provide multiple supply conduits of more than three layers. Further, the constant temperature space and the return space may be arranged alternately or consecutively.

In addition, in the present invention, K other than low-temperature substances such as refrigerants.

It is also possible to supply a high temperature substance for 5K.

[Brief explanation of the drawing]

The first factor is a schematic diagram according to an embodiment of the present invention, and FIG. 2 is a cutaway diagram as well. 16.・LN, tank, 2... device, 3... manifold, 5... conduit, 6... central pipe, 8... alternate snow,
1o... outermost tube, 13... vaporizer.

Claims (1)

[Claims] 1. A high-temperature or low-temperature substance supply source and a high-temperature or low-temperature substance use section are connected by a supply conduit with a multilayer structure of three or more layers, and the high-temperature or low-temperature substance is placed in the innermost central pipe of the supply conduit. A sink, and a central pipe and a septum on the outside, a septum and a septum,
The space between the partition tube and the outermost tube is a constant temperature space or a high temperature or low temperature material supply system through which used high temperature or low temperature materials flow. 1. A supply conduit which is a conduit having a multilayer structure of three or more layers, wherein the even-numbered II-th tube from the center is a square tube with a polygon cross section of N.