JPS58169654U - マイクロ波放電光源装置 - Google Patents

マイクロ波放電光源装置

Info

Publication number
JPS58169654U
JPS58169654U JP6619482U JP6619482U JPS58169654U JP S58169654 U JPS58169654 U JP S58169654U JP 6619482 U JP6619482 U JP 6619482U JP 6619482 U JP6619482 U JP 6619482U JP S58169654 U JPS58169654 U JP S58169654U
Authority
JP
Japan
Prior art keywords
light source
source device
discharge light
microwave discharge
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6619482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638005Y2 (enrdf_load_stackoverflow
Inventor
大貫　一志
和生 伴
田中　民雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6619482U priority Critical patent/JPS58169654U/ja
Publication of JPS58169654U publication Critical patent/JPS58169654U/ja
Application granted granted Critical
Publication of JPS638005Y2 publication Critical patent/JPS638005Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Discharge Lamps And Accessories Thereof (AREA)
JP6619482U 1982-05-07 1982-05-07 マイクロ波放電光源装置 Granted JPS58169654U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6619482U JPS58169654U (ja) 1982-05-07 1982-05-07 マイクロ波放電光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6619482U JPS58169654U (ja) 1982-05-07 1982-05-07 マイクロ波放電光源装置

Publications (2)

Publication Number Publication Date
JPS58169654U true JPS58169654U (ja) 1983-11-12
JPS638005Y2 JPS638005Y2 (enrdf_load_stackoverflow) 1988-03-09

Family

ID=30076084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6619482U Granted JPS58169654U (ja) 1982-05-07 1982-05-07 マイクロ波放電光源装置

Country Status (1)

Country Link
JP (1) JPS58169654U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS638005Y2 (enrdf_load_stackoverflow) 1988-03-09

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