JPS58167438U - 試料導入装置 - Google Patents

試料導入装置

Info

Publication number
JPS58167438U
JPS58167438U JP6439482U JP6439482U JPS58167438U JP S58167438 U JPS58167438 U JP S58167438U JP 6439482 U JP6439482 U JP 6439482U JP 6439482 U JP6439482 U JP 6439482U JP S58167438 U JPS58167438 U JP S58167438U
Authority
JP
Japan
Prior art keywords
sample
sample introduction
side wall
chamber
introduction device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6439482U
Other languages
English (en)
Japanese (ja)
Other versions
JPH018986Y2 (enrdf_load_stackoverflow
Inventor
平居　暉士
和夫 小柳
森　優治
啓義 副島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP6439482U priority Critical patent/JPS58167438U/ja
Publication of JPS58167438U publication Critical patent/JPS58167438U/ja
Application granted granted Critical
Publication of JPH018986Y2 publication Critical patent/JPH018986Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP6439482U 1982-04-30 1982-04-30 試料導入装置 Granted JPS58167438U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6439482U JPS58167438U (ja) 1982-04-30 1982-04-30 試料導入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6439482U JPS58167438U (ja) 1982-04-30 1982-04-30 試料導入装置

Publications (2)

Publication Number Publication Date
JPS58167438U true JPS58167438U (ja) 1983-11-08
JPH018986Y2 JPH018986Y2 (enrdf_load_stackoverflow) 1989-03-10

Family

ID=30074424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6439482U Granted JPS58167438U (ja) 1982-04-30 1982-04-30 試料導入装置

Country Status (1)

Country Link
JP (1) JPS58167438U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01163951A (ja) * 1987-12-21 1989-06-28 Toshiba Corp 真空装置及びそれを用いてプロセスを行う方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS475116U (enrdf_load_stackoverflow) * 1971-02-05 1972-09-14
JPS5030477A (enrdf_load_stackoverflow) * 1973-07-20 1975-03-26
JPS5114427A (ja) * 1974-07-27 1976-02-04 Shinji Yoshii Himokakeshikiheikojogino kakudoshijiho
JPS5147072A (enrdf_load_stackoverflow) * 1974-10-22 1976-04-22 Furukawa Electric Co Ltd

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS475116U (enrdf_load_stackoverflow) * 1971-02-05 1972-09-14
JPS5030477A (enrdf_load_stackoverflow) * 1973-07-20 1975-03-26
JPS5114427A (ja) * 1974-07-27 1976-02-04 Shinji Yoshii Himokakeshikiheikojogino kakudoshijiho
JPS5147072A (enrdf_load_stackoverflow) * 1974-10-22 1976-04-22 Furukawa Electric Co Ltd

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01163951A (ja) * 1987-12-21 1989-06-28 Toshiba Corp 真空装置及びそれを用いてプロセスを行う方法

Also Published As

Publication number Publication date
JPH018986Y2 (enrdf_load_stackoverflow) 1989-03-10

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