JPS58167387U - Vacuum piping joints in vacuum degassing equipment - Google Patents

Vacuum piping joints in vacuum degassing equipment

Info

Publication number
JPS58167387U
JPS58167387U JP6463682U JP6463682U JPS58167387U JP S58167387 U JPS58167387 U JP S58167387U JP 6463682 U JP6463682 U JP 6463682U JP 6463682 U JP6463682 U JP 6463682U JP S58167387 U JPS58167387 U JP S58167387U
Authority
JP
Japan
Prior art keywords
vacuum
degassing equipment
vacuum piping
piping joints
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6463682U
Other languages
Japanese (ja)
Inventor
若林　昭
和俊 松尾
福義 磯村
英俊 山下
室井　尋伸
Original Assignee
株式会社大阪真空機器製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社大阪真空機器製作所 filed Critical 株式会社大阪真空機器製作所
Priority to JP6463682U priority Critical patent/JPS58167387U/en
Publication of JPS58167387U publication Critical patent/JPS58167387U/en
Pending legal-status Critical Current

Links

Landscapes

  • Joints Allowing Movement (AREA)
  • Treatment Of Steel In Its Molten State (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係る真空配管接手の接続時の状態を示
す要部断面図。第２図は本考案に係る真空配管接手の脱
離時の状態を示す要部断面図。第３図及び第４図は本考
案に係る真空配管接手の他実施例を示す要部断面図。第
５図は従来の真空配管接手を示す要部断面図。FIG. 1 is a cross-sectional view of the main part showing the state of the vacuum piping joint according to the present invention when it is connected. FIG. 2 is a cross-sectional view of essential parts showing the state of the vacuum piping joint according to the present invention when it is detached. 3 and 4 are sectional views of main parts showing other embodiments of the vacuum piping joint according to the present invention. FIG. 5 is a cross-sectional view of the main parts of a conventional vacuum piping joint.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 、　　スライド接手１の筒部３を真空配管先端部２ヘス
ライド自在に嵌挿入し、また該スライド接手１のフラン
ジ８を取鍋の上蓋４の排気口先端部５に設けられた座板
７に対面して設けてなる真空配管接手に於いて、前記フ
ランジ８と真空配管先端部２とを伸縮自在のベロー９に
て接続したことを特徴とする真空脱ガス装置に於ける真
空配管接手。, The cylindrical part 3 of the slide joint 1 is slidably inserted into the vacuum piping tip 2, and the flange 8 of the slide joint 1 is faced to the seat plate 7 provided at the exhaust port tip 5 of the upper lid 4 of the ladle. A vacuum piping joint for a vacuum degassing device, characterized in that the flange 8 and the vacuum piping tip 2 are connected by a telescopic bellows 9.
JP6463682U 1982-04-30 1982-04-30 Vacuum piping joints in vacuum degassing equipment Pending JPS58167387U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6463682U JPS58167387U (en) 1982-04-30 1982-04-30 Vacuum piping joints in vacuum degassing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6463682U JPS58167387U (en) 1982-04-30 1982-04-30 Vacuum piping joints in vacuum degassing equipment

Publications (1)

Publication Number Publication Date
JPS58167387U true JPS58167387U (en) 1983-11-08

Family

ID=30074654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6463682U Pending JPS58167387U (en) 1982-04-30 1982-04-30 Vacuum piping joints in vacuum degassing equipment

Country Status (1)

Country Link
JP (1) JPS58167387U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200020783A (en) * 2017-06-21 2020-02-26 피코순 오와이 Substrate Processing Apparatus and Method
KR200491582Y1 (en) * 2019-09-30 2020-05-04 삼성엔지니어링 주식회사 Connecting unit for piping connection

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561718U (en) * 1979-06-19 1981-01-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561718U (en) * 1979-06-19 1981-01-09

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200020783A (en) * 2017-06-21 2020-02-26 피코순 오와이 Substrate Processing Apparatus and Method
JP2020528491A (en) * 2017-06-21 2020-09-24 ピコサン オーワイＰｉｃｏｓｕｎ Ｏｙ Substrate processing equipment and method
KR200491582Y1 (en) * 2019-09-30 2020-05-04 삼성엔지니어링 주식회사 Connecting unit for piping connection

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