JPS58166035U - ウエハの位置決め装置 - Google Patents

ウエハの位置決め装置

Info

Publication number
JPS58166035U
JPS58166035U JP6278482U JP6278482U JPS58166035U JP S58166035 U JPS58166035 U JP S58166035U JP 6278482 U JP6278482 U JP 6278482U JP 6278482 U JP6278482 U JP 6278482U JP S58166035 U JPS58166035 U JP S58166035U
Authority
JP
Japan
Prior art keywords
wafer
end surface
positioning device
driving roller
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6278482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6130285Y2 (enrdf_load_stackoverflow
Inventor
秋田　栄一
Original Assignee
安藤電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 安藤電気株式会社 filed Critical 安藤電気株式会社
Priority to JP6278482U priority Critical patent/JPS58166035U/ja
Publication of JPS58166035U publication Critical patent/JPS58166035U/ja
Application granted granted Critical
Publication of JPS6130285Y2 publication Critical patent/JPS6130285Y2/ja
Granted legal-status Critical Current

Links

JP6278482U 1982-04-29 1982-04-29 ウエハの位置決め装置 Granted JPS58166035U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6278482U JPS58166035U (ja) 1982-04-29 1982-04-29 ウエハの位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6278482U JPS58166035U (ja) 1982-04-29 1982-04-29 ウエハの位置決め装置

Publications (2)

Publication Number Publication Date
JPS58166035U true JPS58166035U (ja) 1983-11-05
JPS6130285Y2 JPS6130285Y2 (enrdf_load_stackoverflow) 1986-09-05

Family

ID=30072918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6278482U Granted JPS58166035U (ja) 1982-04-29 1982-04-29 ウエハの位置決め装置

Country Status (1)

Country Link
JP (1) JPS58166035U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6130285Y2 (enrdf_load_stackoverflow) 1986-09-05

Similar Documents

Publication Publication Date Title
JPS58166035U (ja) ウエハの位置決め装置
JPS5869913U (ja) 多段式ロ−タリソレノイド装置
JPS58163873U (ja) Ｘ−ｙ方向入力装置
JPS616938U (ja) テ−プカセツト装填装置
JPS5814259U (ja) リ−ル台駆動装置
JPS58134709U (ja) プリンタ−の検出板止め機構
JPS591127U (ja) 回転ヘツド支持装置
JPS5997932U (ja) ピンチロ−ラ
JPS60170496U (ja) 巻取式スクリ−ンの制動装置
JPS60154882U (ja) 原稿検出装置
JPS5892240U (ja) テ−プ、ひも類の繰出し装置
JPS582750U (ja) テ−プレコ−ダ−のフライホイ−ル支持装置
JPS59142080U (ja) 仕分用ロ−ラ
JPS5929422U (ja) ベアリング浮上り防止装置
JPS5981815U (ja) キヤプスタン軸装置
JPS5942549U (ja) テ−プ駆動装置
JPS5914188U (ja) 磁気テ−プクリ−ナ
JPS59121746U (ja) リ−ルロツク機構
JPS60123727U (ja) カセツトケ−スの再生面表示装置
JPS5877894U (ja) 可撓性磁気デイスク装置
JPS58178172U (ja) ベルト状感光体駆動装置
JPS58154526U (ja) プツシユボタンの節度バネ構造
JPS58105080U (ja) エンドレスカセツトテ−プ
JPS59164982U (ja) 磁気記録再生装置
JPS59121525U (ja) 転がり軸受装置