JPS58165412A - Crystal oscillator - Google Patents
Crystal oscillatorInfo
- Publication number
- JPS58165412A JPS58165412A JP4835182A JP4835182A JPS58165412A JP S58165412 A JPS58165412 A JP S58165412A JP 4835182 A JP4835182 A JP 4835182A JP 4835182 A JP4835182 A JP 4835182A JP S58165412 A JPS58165412 A JP S58165412A
- Authority
- JP
- Japan
- Prior art keywords
- phi
- crystal
- graph
- overtone
- formula
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 28
- 238000006243 chemical reaction Methods 0.000 abstract description 7
- 238000006073 displacement reaction Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 6
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 241000272814 Anser sp. Species 0.000 description 1
- 241001164374 Calyx Species 0.000 description 1
- 241000272201 Columbiformes Species 0.000 description 1
- 241000021559 Dicerandra Species 0.000 description 1
- 235000010654 Melissa officinalis Nutrition 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005290 field theory Methods 0.000 description 1
- 238000011990 functional testing Methods 0.000 description 1
- 235000012907 honey Nutrition 0.000 description 1
- 239000000865 liniment Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02062—Details relating to the vibration mode
- H03H9/0207—Details relating to the vibration mode the vibration mode being harmonic
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
Abstract
Description
【発明の詳細な説明】
−）発明の技術分野
本発明はＡＴカット厚みすぺ如水晶振動子を高調波振動
次歇（１４次オーバトーン）％ ｍ）３で用−る場合に
係り、振―子形状會決定すゐ有効な設定基準に閤する◎
０１１）技術の背景
従来ＡＴカット厚みすべり振動子を２〜３０ＭＨｉｌ１
度の肩波数帯域即ち高次オーバトーン（ｍ〉３）で用い
る場合、電気的４Ｉ性や良好な振動子、例えば高Ｑ、高
安定、不ｌ！噌−ドの抑圧等に優れ九振動子を得るＫｔ
ｊ大きな水晶片が必要である・、 しかし近年のデジタ
ル伝送装置ｉ計測器等の分野では、多重化、小形化が進
み、高書度実装され１、こｉＫ用いる水晶振動子もよシ
小形化が要請される〇
（Ｃ） 従来技術と問題点
電気的特性に優れえ振動子を得るには大きな水晶片か必
要となり１慇的には片面もしくは両面を球面加工した水
晶片を世−る０ 。Detailed Description of the Invention -) Technical Field of the Invention The present invention relates to the use of an AT-cut quartz crystal resonator with a 14th harmonic frequency (14th overtone) of 3 m). -Determine the child shape based on effective setting standards◎ 011) Background of the technology Conventional AT cut thickness shear transducer is 2~30MHil1
When used in the shoulder wave number band of degrees, that is, high-order overtones (m>3), the oscillator has good electrical 4I properties, such as high Q, high stability, and high-order overtones (m>3). Kt that is excellent in suppressing sho-do and obtains nine oscillators.
However, in recent years, in the field of digital transmission equipment, measuring instruments, etc., multiplexing and miniaturization have progressed, and high resolution packaging has been implemented1, and the crystal resonators used have also become smaller. 〇(C) Conventional technology and problems In order to obtain a vibrator with excellent electrical characteristics, a large crystal piece is required, and it is best to use a crystal piece with one or both sides processed into a spherical surface. .
球面加工し−厚みすべり振−子下は水晶片板厚Ｔと勢価
的−率牛１１１ （片面加工の―車牛径を意味し画一加
工Ｏ場合は１／２に換算）のパラメータのみで振動変位
分布が流量ることが明らかＫされて匹る。 ゛
第１図の（（イ）、（神、ｅう図は水―片の形状例を示
す図である。印図は上面を示し、（ロ）図は片面球面状
の倒置、Ｃう園は両面球面状の倒置を示す図である。Spherical surface processing - Thickness Sliding pendulum - The lower part is the crystal plate thickness T and the ratio - Ratio 111 (For single-sided processing, it means the wheel diameter, and in the case of uniform processing O, it is converted to 1/2) parameters only. It is clear that the vibration displacement distribution is similar to the flow rate. Figure 1 ((a), (e) shows an example of the shape of a water piece. The seal shows the top surface, and the (b) one-sided spherical inverted, C-shaped one. is a diagram showing an inverted double-sided spherical shape.
図中１は片面球面状の水晶片、１′杜片面球画状の水晶
片、３は電極、３は板厚（７）、４は直径（→、Ｒ３゜
鳥は一率半掻を示す・
こ−で片面球面状としえ水晶片の寸法全従来例の設定基
準によ抄求めると、例えば１０ＭＨｉの周波数ｗＫｓＰ
叶る３次オーバトーンにおける水晶片１０１［厚鎖３、
直径（→４、を求める方法祉Ｆ管局波数帯とすれば概略
次式により求められる。In the figure, 1 is a single-sided spherical crystal piece, 1' is a single-sided spherical crystal piece, 3 is an electrode, 3 is the plate thickness (7), and 4 is the diameter (→, R3°, the bird indicates a half-rate.・If the dimensions of the single-sided spherical crystal piece are calculated based on the conventional setting standards, for example, the frequency wKsP of 10 MHi is obtained.
Crystal piece 101 [thick chain 3,
How to find the diameter (→4) If we take F as the wave number band, it can be roughly found by the following formula.
ｆＸｍ
Ｆ （ｋｌＨｚ） ＝ Ｔ（但しＫｆｊｉ歇：１６７
０ＫＨｚ５ｋ）得る◎板厚のと直径（４七〇−係は、＞
ａＯｏｓ＠−で求めるよう規定されｔお）φ≧ｌｓを褥
る◎夷、、）、。fXm F (klHz) = T (Kfji interval: 167
0KHz5k) Obtain ◎ Plate thickness and diameter (470-section is >
It is specified that it is to be found by aOos@-.
ＱＫｔｉｌｌＯように球面・上に被膜状ｔ）＠＠２會生
威させ為丸め、屑着装置又はスパッタりンダ装置等のホ
ルダｔイズＩＩＯ寸機系列例えば・％、＠％、１０％、
ｌ霊％、・・・・・・！−％、２２％、ａＯＸ等から選
択されて用いられる◎前述の鳩舎１２，１４１１・から
選択し、形成され大水晶片は積置加工され各種機能テス
トを行う。QKtillO is a spherical surface with a film on top) @@2 Holders such as rounding, scraping equipment or sputtering equipment etc. for the purpose of incubating the IIO size machine series, e.g. %, @%, 10%,
l spirit%...! -%, 22%, aOX, etc. ◎Selected from the above-mentioned pigeon house 12, 1411. The formed large crystal pieces are piled up and subjected to various functional tests.
このように遥択範■は広（大ｔかな規定基準が用いられ
るえめ嵐好な電気的特性を得るえめに試作調査管繰返す
必豐がＴｏ勤４１に小型化に対処しに〈−欠点かあり九
。In this way, the scope of selection is wide (very large), and in order to obtain good electrical characteristics, it is necessary to repeat the trial production of the research tube, and in order to deal with miniaturization, it is necessary to deal with miniaturization. Yes, nine.
−＊＠０＠的
本発明は上記欠点に曽み、球面加工する水晶振動子ｏ＊
ｖｈを簡単に求められる数式及び換算表を提供し、小櫃
化に寄与する有効な設定基準とすることをＩ釣とする・
（・） 尭＠ｏ＊威
上記目的は本尭＠によれば片面もしくは両面が球面を形
成するム！カット厚みすべり水晶振動子：：
であって、皺躯動、子をなす水晶片の等価的−率半１ｋ
Ｒ（％）と共振−１数Ｆ （ＭＨｚ）から求められる鍍
水晶片の鏝大中心板厚Ｔ （Ｘ）及びオーバトーン次数
ｍ （ｍ−Ｌ ８．＊−）とするとＩｌ咳水蟲片１１
φ（％）を次式
Ｏ閤係弐によ動電める゛ことによって達せられる。−*@0@ The present invention overcomes the above drawbacks and provides a crystal resonator o* that is processed into a spherical surface.
The purpose of the above is to provide a formula and conversion table that can easily calculate vh, and to make it an effective setting standard that contributes to the conversion of small boxes. Or both sides form a spherical surface! Cut thickness sliding quartz crystal oscillator: The equivalent rate of the crystal piece forming the wrinkling motion is half 1k.
If the center plate thickness T (X) of the quartz crystal piece obtained from R (%) and the resonance-1 number F (MHz) and the overtone order m (m-L 8.*-) are 11
This can be achieved by subtracting φ (%) by the following equation.
（ｆｉ １＠明の実施例
以下本斃ｌｌＯ実施儒をａｍ及び場論式により詳述すゐ
〇
第嵩図はｘ、ｙ、ｚ座標系における片藺球面状厚与すべ
り振動子を示す図である０
図において振動子の底面中心点ｌ！からＯ座標軸をＸ軸
、Ｙ輪、２軸とシ水晶片１１ＩＩ）ｌ［厚ａ３、直径（
−）１４、自率半Ｓ■１ｍとすれば！軸方向Ｏ変位Ｗ、
は下記で表わされるみ
ｍ：オーパＦ−ン次数（１＠ ＩＩ ５・・・・・・
）Ｕ：蜜４１Ｌの最大値（電歇）
第３１１０（イ）、Ｈは厚与すぺ勤擺ｌＩｈの変位分布
を示す自纏園である・（へ）はｘ＊、ｙ軸上にお叶る振
動変位な示す閣でＴｏ塾、に）は（ｒｓ り極座標系
におけ為オーバトーン次数（＠ｍｌ、Ｓ、 藝）によ為
蜜位分布Ｏ彎化を示す−であるＯ
ｄ）■ｅ＊ｓ＃ｉｘ輪上Ｏ変位−１ｍ１１１１ｔＦシ、
点線は２軸上の変位−纏１１を示す。（ｄ）ｌｌではオ
ーバトーン次数によつて変位−一を示し！−は６ｍ１．
１・はｍ５ｗ８．２＠はＡＳＳＳを表わす０印図Ｏ変位
―纏から明らかなよう−ＫＸ軸、ｚ軸の変位は殆んど閂
じで等価と見做して簡素化すると値違０１１１式は次式
で表わされる０ム（ｒ）ｍＵ＠Ｘｐ（−ヱ）・・・・・
惰２ａ鵞
但し！ −ｒｌＩ Ｉ＃＠ １−ｒｌ １１に’１ ａ
、 ａ １１ ＠ ＆雪ＩＩＩ： ＠ｔ ！ ＠ｓムＴ
カッ）０−合一は下記によ）表わされる０崗館５ｌＩＩ
で示す変位分布が極めて小さくなる位置として
ＡＣ）≦０．０１ （Ｕｓ−１，０で基準化）Ｏ条件ｔ
Ｗ弐に代入するとφ■鵞ｒであるから下記次式が得られ
る・
こＯ数式を用いて水墨片０＊＊−を求めることがで自る
◎
第４園は本慟−０ＩＩ施例である数式を基準として振動
子の直径を求める換算ｌＩを示す・具体的何として一般
的に用いられるオーバトーン次数ａｍｌ、８．Ｓｔ）％
−ＶＫＯいて上ｆｆ１Ｏ（３１弐によ勤求めて、上部よ
りｍｓ＊１．ｍ■８． ｒｍ社ｓｏ＠算表としえものｅ
１．、； ６今、仮に１０ＭＨｓ、Ｉ −パトー
ン（ｍ−３）ｍｓ千〇−率半ｌｌをＲ−３’１１０（％
）ｋ選んだとすれば水晶片０Ｉｌｌ厚ＴはＦＭＨｓ萼五
（息 より？−１０．Ｋｆ：常歇１・７ ＠ ＫＨｚ
＠ ｍ、 ａｍ Ｂであるから、！警へ１％が得ら
れ横軸（Ｒ・７ｍ）１，４は６．１（■りとなる。(Fi 1 @ Ming's Example Below, the present IllO implementation will be explained in detail using am and field theory formulas. The ゐ〇 bulk diagram is a diagram showing a spherical thickness-slip oscillator in the x, y, z coordinate system. 0 In the figure, from the center point l! of the bottom surface of the vibrator, the O coordinate axis is the X axis, the Y ring, and the two axes.
-) 14. If the self rate is half S ■ 1 m! Axial direction O displacement W,
is expressed as below: m: open order (1@II 5...
) U: Maximum value of honey 41L (electronic switch) No. 3110 (a), H is the self-contained garden showing the displacement distribution of the welfare work force lIh. (F) is on the x*, y axis The vibrational displacement that comes true is shown in the table, and (2) is (rs) in the polar coordinate system, which indicates the overtone order (@ml, S, 藝), which indicates the curvature of the position distribution O - which is O d). ■e*s#ixO displacement on the wheel -1m1111tFshi,
The dotted line indicates the displacement on two axes. (d) In ll, the overtone order shows a displacement of -1! - is 6m1.
1. is m5w8.2@ represents ASSS 0 mark O displacement - As is clear from the cover - K is expressed by the following formula: 0m(r)mU@Xp(-ヱ)...
Ina 2a Gobutashi! -rlI I#@1-rl 11 to '1 a
, a 11 @ & Snow III: @t! @smuT
c) 0-union is expressed as below) 0gangkan 5lII
As the position where the displacement distribution shown by
Substituting into W2, we get φ ■ goose r, so we get the following formula. You can use this formula to find the ink piece 0**-. Shows the conversion lI for determining the diameter of a vibrator based on a certain mathematical formula.Specifically, the commonly used overtone order aml, 8. St)%
- VKO and upper ff1O (31 2nd work, from the top ms * 1. m 8. rm company so @ calculation table and Shiemono e
1. ,; 6 Now, suppose 10MHs, I-patone (m-3) ms 1,000-rate half ll is R-3'110 (%
) If you choose k, the crystal piece 0Ill thickness T is FMHs calyx 5 (breath? -10.Kf: constant 1.7 @KHz
@ m, am B, so! 1% is obtained for the police, and the horizontal axis (R・7m) 1,4 becomes 6.1 (■ri).
１１により （Ｒ・Ｔり暑ｉｔ：ｓ、１ｖｒ一対応する
直径φを−”−１１３，５Ｋ）Ｉｎ？求めると各＃１１
．Ｏ。11, (R・T temperature it: s, 1vr - corresponding diameter φ -"-113,5K) In? Find each #11
．． O.
亀４．４ ｍｌ （１０中Ａ、 ｍ、 ＣｊＫ対応）と
なる◎従り？１０ＭＨｉ、ｍｍ８ｔ）場合、即ちＩＩＫ
対応するφ≧６．４（％）を示す・
こ＼で基本＊４−ド（ａｘｌ）約３．８ ｂａｌｍの場
合（ム点）φ≧１１．０（％）であ）基本波モードを抑
圧するにはφ（１１，０（５％）とすればよいＯｅＯ！
うＫＩＳ、４＜１１＜１１．００１１１！に選ぶとと
によ一出来るだ叶小濁て不５％−ド（上記の例では基本
＃Ｌ４−ド）を抑圧で龜る・
無調１１タイプｏｉａｍ器（例、ｔｔｆｃ−ＭＯ８ＩＣ
等を用いえもの）等！紘ともすれｄ不ｇＩモードのレス
ポンスで異常発御することがあシ、不ｌ！モー、／
ドの抑圧が重要と１ｋｈ・
同様ＯｅとがＳ次オ―パトーン（ａ−５）毫−ドを用％
／′ｈえ場合にも適用で１００点約１１６ｋｍ１ｍでは
直後φ≧４．−（％）とすればよい。Kame 4.4 ml (corresponds to A, m, CjK out of 10) ◎ Follow? 10MHi, mm8t), i.e. IIK
Indicates the corresponding φ≧6.4 (%). Here, if the fundamental *4-do (axl) is approximately 3.8 balm (Mu point) φ≧11.0 (%)) To suppress it, set φ(11,0 (5%)) OeO!
UKIS, 4<11<11.00111! If you select it, it will be possible to suppress the low 5%-mode (basic #L4-mode in the above example).
etc.) etc.! Hiro: It's a shame that an abnormal response may occur due to the I mode response. It is important to suppress the mode, / and 1kh.Similarly, Oe uses the S-order overtone (a-5).
100 points can also be applied to cases where φ≧4. -(%) may be used.
従って基本波峰−ド（鵬−１）、３次オーバトーン峰−
ド（ｍ−１）の両帯域を同時に抑圧する九めには４．
ｉｌ （−〈＆４０範囲に選ぺばよい仁とがわかる〇
このように球面加工されえムチカット厚みすぺ勤水晶振
動子であれば最適の次数、形状寸法が求められその利用
範囲は極めて大きい〇
（−発明の効果
以上詳細に説明しえように本発明の数式及び換算表を用
いることにより１球画加工のＡＴカット厚みすぺ伽振動
子であれば籠めで容易に振動子の最適形状寸法が求めら
れる上、不ｌ！毫−ドの抑圧４可能となる等その効果は
絶大である。Therefore, the fundamental wave peak is Do (Peng-1), and the third overtone peak is
4. To simultaneously suppress both bands of (m-1).
il (-〈You can see that it is best to select a crystal in the range of &40〇 If the spherical surface can be processed in this way, and the whip-cut thickness is perfect for a crystal oscillator, the optimum order and shape dimensions can be found, and the range of its use is extremely large.〇 (-In order to explain the effect of the invention in more detail, by using the mathematical formula and conversion table of the present invention, the optimum shape and size of the resonator can be easily obtained by using a cage for the AT cut thickness of one-sphere image processing.) Not only is this required, but the effects are tremendous, such as making it possible to suppress il!
第１ｌｌＯ（イ）、（ロ）、ｆ→閣は水晶片の形状例を
示す図、←）は上面を示しく→は片藺球面状の側面を示
し、ｆｌは両面球画状Ｏ側面を示す図、第鵞図はｘ、ｙ
。
２軸ＫＴｈける片面球状厚みすべ勤振勅子を示す図、第
３図Ｏ饋、（ロ）閣は厚与すべり績動Ｏ変位分布を示す
曲線図、（イ）＃ｉｘ輪、Ｙ軸上における振動変位を示
す図、（ロ）は（ｒ＊＃）＠塵癲畢Ｋかけるオーバトー
ン次数Ｃｍ間１，３．５）による変位分布の資化を示す
図、第４図は本発明の実施例である数式を基準として振
動子の直径を求める換算表である・図において
１１は水晶片、！２は軸中心、１３は厚板■、１４は直
径（φ）、１ｓは曲率半径■、１６はＸ軸変位−一、１
１は２軸変位−線、１ｇ、 １９．２０はオーバトー
ン変位−纏を示す〇11O (a), (b), f→kaku are diagrams showing examples of the shape of crystal pieces, ←) shows the top surface, → shows the one-sided spherical side surface, and fl shows the double-sided spherical O side surface. The diagram shown is x, y
. Diagram showing one-sided spherical thickness and thickness on two axes KTh, Figure 3. Figure 4 shows the vibration displacement of the present invention. This is a conversion table for determining the diameter of a vibrator based on the mathematical formula in the example. In the figure, 11 is a crystal piece! 2 is the axis center, 13 is the thick plate ■, 14 is the diameter (φ), 1s is the radius of curvature ■, 16 is the X-axis displacement -1, 1
1 indicates biaxial displacement-line, 1g, 19.20 indicates overtone displacement-line〇
Claims (1)
べ抄水晶損動ｔであって、鋏振動子をなす水晶片の等価
的−率半１１Ｂ （％）と共振周波数Ｆ（ＭＨｚ）から
求められる鋏水晶片の最大中心板厚Ｔ（％）及び高周ｗ
Ｌ鎖動次ｌａｍ （ｎｘｌ、 ３．５・・・）とすると
自、該水晶片直徽φＣ％）を次式の１係により定めてな
ることを特徴とする水晶振動子＠On one side, L〈 is the AT-cut crystal loss t that forms a sphere i[, and the equivalent rate of the crystal piece forming the scissor oscillator is 11B (%) and the resonance frequency F (MHz). The maximum center plate thickness T (%) and high circumference w of the scissors crystal piece obtained from
A crystal resonator @ characterized in that, when the L-chain dynamic order lam (nxl, 3.5...), the crystal piece squareness φC%) is determined by the first equation of the following equation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4835182A JPS58165412A (en) | 1982-03-26 | 1982-03-26 | Crystal oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4835182A JPS58165412A (en) | 1982-03-26 | 1982-03-26 | Crystal oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58165412A true JPS58165412A (en) | 1983-09-30 |
Family
ID=12800946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4835182A Pending JPS58165412A (en) | 1982-03-26 | 1982-03-26 | Crystal oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58165412A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2584866A1 (en) * | 1985-07-15 | 1987-01-16 | Seikosha Kk | PLANAR TYPE QUARTZ OSCILLATOR OPERATING IN TRANSVERSE MODE IN THICKNESS |
| WO1998031104A1 (en) * | 1997-01-09 | 1998-07-16 | Seiko Epson Corporation | Pll oscillator and method for manufacturing the same |
-
1982
- 1982-03-26 JP JP4835182A patent/JPS58165412A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2584866A1 (en) * | 1985-07-15 | 1987-01-16 | Seikosha Kk | PLANAR TYPE QUARTZ OSCILLATOR OPERATING IN TRANSVERSE MODE IN THICKNESS |
| JPS6216611A (en) * | 1985-07-15 | 1987-01-24 | Seikosha Co Ltd | Plate-shaped thickness-shear crystal resonator |
| US4710731A (en) * | 1985-07-15 | 1987-12-01 | Seikosha Co., Ltd. | Planar type thickness shear mode quartz oscillator |
| WO1998031104A1 (en) * | 1997-01-09 | 1998-07-16 | Seiko Epson Corporation | Pll oscillator and method for manufacturing the same |
| US6081164A (en) * | 1997-01-09 | 2000-06-27 | Seiko Epson Corporation | PLL oscillator package and production method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| FR2427004A1 (en) | QUARTZ CRYSTAL OSCILLATOR | |
| FR938692A (en) | Improvements to electronic discharge devices for the production of high frequency electrical oscillations | |
| Shear et al. | The dispersion of supersonic waves in cylindrical rods of polycrystalline silver, nickel, and magnesium | |
| JPS58165412A (en) | Crystal oscillator | |
| US3601639A (en) | Low-temperature coefficient lithium tantalate resonator | |
| Hirschmann et al. | The infrared spectrum of bis (trifluoromethyl) trioxide | |
| Taimsalu et al. | Far infra-red spectra of PbEt 4, SnEt 4 and Sn (n-Pr) 4 | |
| Zartman | Ultrasonic velocities and absorption in gases at low pressures | |
| Curtis | An experimental determination of ultrasonic absorption and reflection coefficients in air and in carbon dioxide | |
| JPS529349A (en) | Dielectric focusing horn | |
| Edgell | On the Spatial Configuration of Perfluorocyclobutane | |
| JPH03160811A (en) | Surface acoustic wave device | |
| Vance | Velocity of sound in tubes at audible and ultrasonic frequencies | |
| US1947182A (en) | Constant frequency apparatus | |
| Suryaprakasam | Effect of temperature on the ultrasonic velocity in liquids | |
| Pielemeier | Acoustical Detection of Electrically Weak Vibrations in Quartz Plates | |
| SU725846A1 (en) | Apparatus for ultrasonic microwelding | |
| JPS52140289A (en) | Thickness shear crystal oscillator | |
| SU1126897A1 (en) | Device for measuring tuned circuit quality factor | |
| US2458615A (en) | Piezoelectric crystal apparatus | |
| JPS6353469A (en) | Generation of signal | |
| Mazumdar et al. | A note on the determination of cutoff frequencies of hollow waveguides by a contour line—Conformal mapping technique | |
| Ramakanth et al. | Measurement of the Elastic Constants of Aluminium and Copper Using a Continuous Wave Ultrasonic Technique | |
| JPS5944118A (en) | Tuning fork type vibrator | |
| SU76451A1 (en) | The method of displaying acoustic pressure |