JPS58163951A - 光導電部材 - Google Patents

光導電部材

Info

Publication number
JPS58163951A
JPS58163951A JP57047802A JP4780282A JPS58163951A JP S58163951 A JPS58163951 A JP S58163951A JP 57047802 A JP57047802 A JP 57047802A JP 4780282 A JP4780282 A JP 4780282A JP S58163951 A JPS58163951 A JP S58163951A
Authority
JP
Japan
Prior art keywords
layer
atoms
amorphous
gas
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57047802A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373857B2 (enrdf_load_stackoverflow
Inventor
Teruo Misumi
三角　輝男
Kyosuke Ogawa
小川　恭介
Junichiro Kanbe
純一郎 神辺
Keishi Saito
恵志 斉藤
Yoichi Osato
陽一 大里
Shigeru Shirai
茂 白井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP57047802A priority Critical patent/JPS58163951A/ja
Priority to DE19833308165 priority patent/DE3308165A1/de
Priority to US06/473,278 priority patent/US4501807A/en
Publication of JPS58163951A publication Critical patent/JPS58163951A/ja
Publication of JPH0373857B2 publication Critical patent/JPH0373857B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08214—Silicon-based
    • G03G5/08221—Silicon-based comprising one or two silicon based layers
    • G03G5/08228—Silicon-based comprising one or two silicon based layers at least one with varying composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08214—Silicon-based
    • G03G5/08235—Silicon-based comprising three or four silicon-based layers
    • G03G5/08242—Silicon-based comprising three or four silicon-based layers at least one with varying composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Light Receiving Elements (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP57047802A 1982-03-08 1982-03-25 光導電部材 Granted JPS58163951A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP57047802A JPS58163951A (ja) 1982-03-25 1982-03-25 光導電部材
DE19833308165 DE3308165A1 (de) 1982-03-08 1983-03-08 Fotoleitfaehiges aufzeichnungselement
US06/473,278 US4501807A (en) 1982-03-08 1983-03-08 Photoconductive member having an amorphous silicon layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57047802A JPS58163951A (ja) 1982-03-25 1982-03-25 光導電部材

Publications (2)

Publication Number Publication Date
JPS58163951A true JPS58163951A (ja) 1983-09-28
JPH0373857B2 JPH0373857B2 (enrdf_load_stackoverflow) 1991-11-25

Family

ID=12785497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57047802A Granted JPS58163951A (ja) 1982-03-08 1982-03-25 光導電部材

Country Status (1)

Country Link
JP (1) JPS58163951A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60218829A (ja) * 1984-04-16 1985-11-01 Canon Inc 堆積膜形成方法
JPS60218828A (ja) * 1984-04-16 1985-11-01 Canon Inc 堆積膜形成方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60218829A (ja) * 1984-04-16 1985-11-01 Canon Inc 堆積膜形成方法
JPS60218828A (ja) * 1984-04-16 1985-11-01 Canon Inc 堆積膜形成方法

Also Published As

Publication number Publication date
JPH0373857B2 (enrdf_load_stackoverflow) 1991-11-25

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