JPS58163809U - Ｘ線微小部膜厚計におけるコリメ−タ装置 - Google Patents

Ｘ線微小部膜厚計におけるコリメ−タ装置

Info

Publication number
JPS58163809U
JPS58163809U JP6135282U JP6135282U JPS58163809U JP S58163809 U JPS58163809 U JP S58163809U JP 6135282 U JP6135282 U JP 6135282U JP 6135282 U JP6135282 U JP 6135282U JP S58163809 U JPS58163809 U JP S58163809U
Authority
JP
Japan
Prior art keywords
collimator
film thickness
thickness meter
mounting hole
collimator device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6135282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6315768Y2 (enrdf_load_stackoverflow
Inventor
信男 中野
Original Assignee
セイコーインスツルメンツ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーインスツルメンツ株式会社 filed Critical セイコーインスツルメンツ株式会社
Priority to JP6135282U priority Critical patent/JPS58163809U/ja
Publication of JPS58163809U publication Critical patent/JPS58163809U/ja
Application granted granted Critical
Publication of JPS6315768Y2 publication Critical patent/JPS6315768Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP6135282U 1982-04-27 1982-04-27 Ｘ線微小部膜厚計におけるコリメ−タ装置 Granted JPS58163809U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6135282U JPS58163809U (ja) 1982-04-27 1982-04-27 Ｘ線微小部膜厚計におけるコリメ−タ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6135282U JPS58163809U (ja) 1982-04-27 1982-04-27 Ｘ線微小部膜厚計におけるコリメ−タ装置

Publications (2)

Publication Number Publication Date
JPS58163809U true JPS58163809U (ja) 1983-10-31
JPS6315768Y2 JPS6315768Y2 (enrdf_load_stackoverflow) 1988-05-06

Family

ID=30071555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6135282U Granted JPS58163809U (ja) 1982-04-27 1982-04-27 Ｘ線微小部膜厚計におけるコリメ−タ装置

Country Status (1)

Country Link
JP (1) JPS58163809U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6315768Y2 (enrdf_load_stackoverflow) 1988-05-06

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