JPS58160306U

JPS58160306U - Optical shape measuring device

Info

Publication number: JPS58160306U
Application number: JP5714082U
Authority: JP
Inventors: 進橋本; 鈴木　悦四
Original assignee: 株式会社東芝
Priority date: 1982-04-20
Filing date: 1982-04-20
Publication date: 1983-10-25

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図はこの考案の一実施例を示す斜視図、第２図は被
測定物を拡大して示す平面図、第３図は第２図の被測定
物の外径を測定する使用例で、回転ヘッドを回転させた
場合を示す平面図、第４図は同じくＹ方向のみに走査Ｚ
座標を求める場合を示す平面図、第５図は同じく回転ヘ
ッドをｏＯ１９０６に切りかえることによって、座標を
測定する場合を示す平面図である。１・・・被測定物、４・・・カメラヘッド、５・・・回
転ヘッド、６．７・・・微調整用Ｘ、　Ｙテーブル、７
．８−Ｘ、　Ｙテーブル、９．　１３ａ、　　１６．　
１８ａ−ハルスモータ、１２，１３ｂ、１８ｂ・・・ス
ケール。Fig. 1 is a perspective view showing an embodiment of this invention, Fig. 2 is a plan view showing an enlarged view of the object to be measured, and Fig. 3 is an example of use for measuring the outer diameter of the object to be measured in Fig. 2. , a plan view showing the case where the rotary head is rotated, and FIG.
FIG. 5 is a plan view showing the case where the coordinates are determined. Similarly, FIG. 5 is a plan view showing the case where the coordinates are measured by switching the rotary head to oO1906. 1... Object to be measured, 4... Camera head, 5... Rotating head, 6.7... X and Y table for fine adjustment, 7
．． 8-X, Y table, 9. 13a, 16.
18a - Hals motor, 12, 13b, 18b... scale.

Claims

[Scope of utility model registration request]

A camera head equipped with a built-in optical system and a one-dimensional image sensor facing the object to be measured is provided on the lower surface, a rotating head provided with an XY table for fine adjustment on the upper surface, and a rotating head provided above the rotating head, A Z table is provided with a drive source for rotating the rotary head and a sensor for detecting the rotation angle of the drive source, and the Z table is moved up and down to focus the optical system and detect the amount of movement. An optical shape measuring device comprising: an XY table equipped with a sensor for measuring the shape of the object;