JPS5815656U - エツチング装置 - Google Patents

エツチング装置

Info

Publication number
JPS5815656U
JPS5815656U JP10757681U JP10757681U JPS5815656U JP S5815656 U JPS5815656 U JP S5815656U JP 10757681 U JP10757681 U JP 10757681U JP 10757681 U JP10757681 U JP 10757681U JP S5815656 U JPS5815656 U JP S5815656U
Authority
JP
Japan
Prior art keywords
tube
end surface
etched
inner tube
partition plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10757681U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6215241Y2 (enrdf_load_html_response
Inventor
康夫 飯田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP10757681U priority Critical patent/JPS5815656U/ja
Publication of JPS5815656U publication Critical patent/JPS5815656U/ja
Application granted granted Critical
Publication of JPS6215241Y2 publication Critical patent/JPS6215241Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP10757681U 1981-07-20 1981-07-20 エツチング装置 Granted JPS5815656U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10757681U JPS5815656U (ja) 1981-07-20 1981-07-20 エツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10757681U JPS5815656U (ja) 1981-07-20 1981-07-20 エツチング装置

Publications (2)

Publication Number Publication Date
JPS5815656U true JPS5815656U (ja) 1983-01-31
JPS6215241Y2 JPS6215241Y2 (enrdf_load_html_response) 1987-04-17

Family

ID=29902006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10757681U Granted JPS5815656U (ja) 1981-07-20 1981-07-20 エツチング装置

Country Status (1)

Country Link
JP (1) JPS5815656U (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS6215241Y2 (enrdf_load_html_response) 1987-04-17

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