JPS58152993A - Piping material for vacuum - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to improvements in vacuum piping materials, particularly vacuum piping materials used for communicating vacuum pumps, vacuum containers, manifolds, etc. of vacuum equipment.

[Technical background of the invention and its problems]

Conventionally, as shown in Fig. 1, the vacuum device is a vacuum pump 1.
, a vacuum container 2, and three manifolds, and these are connected through a piping material 4. When obtaining an ultra-high vacuum with this vacuum device, a vacuum container 2 that forms a vacuum system;
In order to remove gas molecules such as water vapor adsorbed and remaining on the vacuum parts of the three manifolds and the inner surface of the piping material 40, the entire vacuum system is maintained at a uniform temperature f by heating with a heating heater.

However, since this conventional heating heater is wound from the outside of the vacuum parts such as the vacuum vessel 2 and manifold 3, it is difficult to install these parts in places where it is difficult to work, especially when the piping material is In many cases, they are connected at narrow intervals and have a complicated structure, creating an obstacle in keeping the entire vacuum system of the device at a uniform temperature.

[Purpose of the invention]

The present invention has been rounded to solve the above problem,
It can also be used in situations where it is difficult to wrap the heater later and wrap it in advance so that it can be assembled and heated due to the multiple IIatk structure, such as when used in places with poor workability or when connected at narrow intervals. The purpose is to provide vacuum piping materials that can be used.

[Summary of the invention]

The present invention relates to a vacuum piping material that closely connects the vacuum pump and vacuum container of a vacuum device, and the vacuum container and the manifold at flanges at both ends of the pipe, in which a heating heater is embedded along the axial direction of the front piping path. It is characterized by being

[Embodiments of the invention]

The present invention will be explained in detail below based on the drawings.

FIG. 2 and FIG. 3 show a longitudinal cross-sectional view and a cross-sectional view, respectively, of the vacuum piping material of the present invention. The piping material 5 has flanges 6 at both ends so as to be in close contact with and communicate with vacuum parts such as a vacuum pump, a vacuum container, and a manifold.

A heating means is provided along the axial direction of the conduit I excluding the flanges 6 at both ends. This means is a heating heater 9 made of a nickel-chromium alloy coated with an electrically insulating material 8, which is wrapped and embedded in the thick wall 12 between the outer 1110 and inner wall 11 of the conduit 7. and the piping material 5
The ends 13 of the heater 9 taken out from both ends of the heater 9 are connected to a heating power source (not shown), and the heating temperature can be adjusted.

As mentioned above, in the piping material of the present invention, the heating heater is embedded in advance, so it can be used in places where it is impossible to wrap the heater later or wrap it in advance and assemble it due to workability and structural reasons. It can be heated and used.

Therefore, if you use this to connect the vacuum pump, vacuum equipment, manifold, and vacuum container (see Figure 1), you can create a vacuum system consisting of the vacuum container wrapped around the heater from the outside, the manifold, and the piping material. The entire area is heated uniformly, the adsorbed residual gas can be removed evenly, and a high vacuum can be obtained.

Note that the present invention is not limited to piping materials, but can be applied to parts constituting a vacuum system to prevent insufficient heating caused by insufficient external wrapping.

〔Effect of the invention〕

As is clear from the above examples, in the vacuum piping material according to the present invention, a heater is embedded in advance along the pipe line and rolled up, thereby uniformly heating the entire vacuum system of the vacuum device connected to it. It is possible to increase the degree of vacuum. Incidentally, the ultimate vacuum level was improved by 50% compared to when a heater was installed externally in the piping section.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram showing the configuration of a vacuum system, FIG. 2 is a longitudinal cross-sectional view of the vacuum piping material according to the present invention, and FIG. 3 is a cross-sectional view of the vacuum piping material of FIG. 1. 1...Vacuum pump 2...Vacuum container 3...1 Nifold 4...Piping material 5...Vacuum piping material 6... ... Flange 7 ... Pipeline 8 ... Electrical insulating material S ... Heating heater 10 ... Outer wall 11 ... Inner wall 12 ... Thickness Part 13 - End (7317) Representative patent attorney Nori Chika Yukui or one person)
Figure 2 Figure 3

Claims (1)

[Claims] In a vacuum piping material that tightly connects a vacuum pump and a vacuum container of a vacuum device, a vacuum container and a manifold, etc. at 7 rank portions at both ends of the pipe, a heating heater is embedded in the pipe along the axial direction of the pipe. Vacuum piping material characterized by: