JPS58149191A - 試料移動装置 - Google Patents
試料移動装置Info
- Publication number
- JPS58149191A JPS58149191A JP3221982A JP3221982A JPS58149191A JP S58149191 A JPS58149191 A JP S58149191A JP 3221982 A JP3221982 A JP 3221982A JP 3221982 A JP3221982 A JP 3221982A JP S58149191 A JPS58149191 A JP S58149191A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- vacuum
- drive rod
- moving
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011553 magnetic fluid Substances 0.000 claims description 40
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 16
- 239000012530 fluid Substances 0.000 claims description 9
- 229910052742 iron Inorganic materials 0.000 claims description 8
- 235000000396 iron Nutrition 0.000 claims 1
- 238000007789 sealing Methods 0.000 description 14
- 239000007788 liquid Substances 0.000 description 11
- 230000004907 flux Effects 0.000 description 10
- 239000002612 dispersion medium Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 238000010894 electron beam technology Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000000696 magnetic material Substances 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 7
- 238000007790 scraping Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 238000009736 wetting Methods 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 239000003570 air Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000001568 sexual effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- WURBVZBTWMNKQT-UHFFFAOYSA-N 1-(4-chlorophenoxy)-3,3-dimethyl-1-(1,2,4-triazol-1-yl)butan-2-one Chemical compound C1=NC=NN1C(C(=O)C(C)(C)C)OC1=CC=C(Cl)C=C1 WURBVZBTWMNKQT-UHFFFAOYSA-N 0.000 description 1
- 241000272814 Anser sp. Species 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 241000270666 Testudines Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000009193 crawling Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- DKQVJMREABFYNT-UHFFFAOYSA-N ethene Chemical group C=C.C=C DKQVJMREABFYNT-UHFFFAOYSA-N 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 230000004886 head movement Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 210000000554 iris Anatomy 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 229920006113 non-polar polymer Polymers 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Landscapes
- Linear Motors (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3221982A JPS58149191A (ja) | 1982-03-03 | 1982-03-03 | 試料移動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3221982A JPS58149191A (ja) | 1982-03-03 | 1982-03-03 | 試料移動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58149191A true JPS58149191A (ja) | 1983-09-05 |
| JPS6328754B2 JPS6328754B2 (enrdf_load_stackoverflow) | 1988-06-09 |
Family
ID=12352820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3221982A Granted JPS58149191A (ja) | 1982-03-03 | 1982-03-03 | 試料移動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58149191A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61205786U (enrdf_load_stackoverflow) * | 1985-06-14 | 1986-12-25 | ||
| JPS62120994A (ja) * | 1985-11-21 | 1987-06-02 | フアナツク株式会社 | 防塵用シ−ルを有する産業用ロボツト |
| JP2018157026A (ja) * | 2017-03-16 | 2018-10-04 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS519853A (ja) * | 1974-07-03 | 1976-01-26 | Suwa Seikosha Kk | Ekishohaikoyosumakuniokeru bunshihokono ketsuteihoho |
| JPS55108734A (en) * | 1979-02-14 | 1980-08-21 | Toshiba Corp | Movable table device |
-
1982
- 1982-03-03 JP JP3221982A patent/JPS58149191A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS519853A (ja) * | 1974-07-03 | 1976-01-26 | Suwa Seikosha Kk | Ekishohaikoyosumakuniokeru bunshihokono ketsuteihoho |
| JPS55108734A (en) * | 1979-02-14 | 1980-08-21 | Toshiba Corp | Movable table device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61205786U (enrdf_load_stackoverflow) * | 1985-06-14 | 1986-12-25 | ||
| JPS62120994A (ja) * | 1985-11-21 | 1987-06-02 | フアナツク株式会社 | 防塵用シ−ルを有する産業用ロボツト |
| JP2018157026A (ja) * | 2017-03-16 | 2018-10-04 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6328754B2 (enrdf_load_stackoverflow) | 1988-06-09 |
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