JPS58149191A - 試料移動装置 - Google Patents

試料移動装置

Info

Publication number
JPS58149191A
JPS58149191A JP57032219A JP3221982A JPS58149191A JP S58149191 A JPS58149191 A JP S58149191A JP 57032219 A JP57032219 A JP 57032219A JP 3221982 A JP3221982 A JP 3221982A JP S58149191 A JPS58149191 A JP S58149191A
Authority
JP
Japan
Prior art keywords
magnetic
vacuum
drive rod
moving
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57032219A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6328754B2 (cg-RX-API-DMAC7.html
Inventor
井戸　敏
正二郎 三宅
露嵜　晴夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP57032219A priority Critical patent/JPS58149191A/ja
Publication of JPS58149191A publication Critical patent/JPS58149191A/ja
Publication of JPS6328754B2 publication Critical patent/JPS6328754B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Linear Motors (AREA)
JP57032219A 1982-03-03 1982-03-03 試料移動装置 Granted JPS58149191A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57032219A JPS58149191A (ja) 1982-03-03 1982-03-03 試料移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57032219A JPS58149191A (ja) 1982-03-03 1982-03-03 試料移動装置

Publications (2)

Publication Number Publication Date
JPS58149191A true JPS58149191A (ja) 1983-09-05
JPS6328754B2 JPS6328754B2 (cg-RX-API-DMAC7.html) 1988-06-09

Family

ID=12352820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57032219A Granted JPS58149191A (ja) 1982-03-03 1982-03-03 試料移動装置

Country Status (1)

Country Link
JP (1) JPS58149191A (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61205786U (cg-RX-API-DMAC7.html) * 1985-06-14 1986-12-25
JPS62120994A (ja) * 1985-11-21 1987-06-02 フアナツク株式会社 防塵用シ−ルを有する産業用ロボツト
JP2018157026A (ja) * 2017-03-16 2018-10-04 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS519853A (ja) * 1974-07-03 1976-01-26 Suwa Seikosha Kk Ekishohaikoyosumakuniokeru bunshihokono ketsuteihoho
JPS55108734A (en) * 1979-02-14 1980-08-21 Toshiba Corp Movable table device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS519853A (ja) * 1974-07-03 1976-01-26 Suwa Seikosha Kk Ekishohaikoyosumakuniokeru bunshihokono ketsuteihoho
JPS55108734A (en) * 1979-02-14 1980-08-21 Toshiba Corp Movable table device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61205786U (cg-RX-API-DMAC7.html) * 1985-06-14 1986-12-25
JPS62120994A (ja) * 1985-11-21 1987-06-02 フアナツク株式会社 防塵用シ−ルを有する産業用ロボツト
JP2018157026A (ja) * 2017-03-16 2018-10-04 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置

Also Published As

Publication number Publication date
JPS6328754B2 (cg-RX-API-DMAC7.html) 1988-06-09

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