JPS58147245U - Substrate liquid transfer device - Google Patents

Substrate liquid transfer device

Info

Publication number
JPS58147245U
JPS58147245U JP4500282U JP4500282U JPS58147245U JP S58147245 U JPS58147245 U JP S58147245U JP 4500282 U JP4500282 U JP 4500282U JP 4500282 U JP4500282 U JP 4500282U JP S58147245 U JPS58147245 U JP S58147245U
Authority
JP
Japan
Prior art keywords
transfer device
liquid transfer
substrate
substrate liquid
transport path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4500282U
Other languages
Japanese (ja)
Inventor
有井　勝之
長島　節夫
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP4500282U priority Critical patent/JPS58147245U/en
Publication of JPS58147245U publication Critical patent/JPS58147245U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図、第２図は本考案の一実施例の搬送装置の断面図
である。 図中１は基板、２は搬送路、３はノズル、４は排出口で
ある。1 and 2 are cross-sectional views of a conveying device according to an embodiment of the present invention. In the figure, 1 is a substrate, 2 is a conveyance path, 3 is a nozzle, and 4 is a discharge port.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 傾斜した基板の搬送路と、該搬送路に設けられ液体を該
基板に噴射させる多数のノズルと、該搬送路の進行方向
に沿って所定の間隔で設けられ該液体を排出する排出口
とを具備することを特徴とする基板の液体搬送装置。A tilted substrate transport path, a number of nozzles provided on the transport path to spray liquid onto the substrate, and discharge ports provided at predetermined intervals along the traveling direction of the transport path to discharge the liquid. A liquid transport device for a substrate, comprising:
JP4500282U 1982-03-30 1982-03-30 Substrate liquid transfer device Pending JPS58147245U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4500282U JPS58147245U (en) 1982-03-30 1982-03-30 Substrate liquid transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4500282U JPS58147245U (en) 1982-03-30 1982-03-30 Substrate liquid transfer device

Publications (1)

Publication Number Publication Date
JPS58147245U true JPS58147245U (en) 1983-10-03

Family

ID=30056043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4500282U Pending JPS58147245U (en) 1982-03-30 1982-03-30 Substrate liquid transfer device

Country Status (1)

Country Link
JP (1) JPS58147245U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01192144A (en) * 1988-01-28 1989-08-02 Ngk Spark Plug Co Ltd Device and method for removing foreign substance of ceramic package

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01192144A (en) * 1988-01-28 1989-08-02 Ngk Spark Plug Co Ltd Device and method for removing foreign substance of ceramic package

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