JPS58146845A - Gas sensor - Google Patents

Abstract

PURPOSE:To enhance durability of a sensor for combustible gases having leaked, and to lower its cost, by forming a conductor route on a plastic film, fixing a gas sensor to the inner lead of this conductor, and forming an explosion- preventive mesh on one side of the sensor. CONSTITUTION:A window hole 3 is formed through a polyimide film 1 or the like, copper foil 5 is attached to the film 1 with an adhesive 4, and durable stainless steel foil 6 or the like is laminated on the foil 5. Then, a conductor route 7 and an explosion-preventive mesh 8 are formed on or in the foils 5, 6. A semiconductor gas sensor 2 is attached into the window hole 3. A solder bump 10 and the inner lead 11 of the conductor lead 7 are attached to the sensor 2. The opening of the hole 3 on the bottom side of the sensor 2 is covered with a metal or resin plate 12 or the like. In another case, as shown in another figure, the sensor 2 is formed on the outside of the hole 3 of the film 1, joined with a resin 16, and a stainless steel explosion-preventive mesh 14 is provided on the opposite side of the film 1 to enhance durability.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a gas detection device that detects flammable gases such as city gas and propane gas, and organic gases such as carbon oxide, which have leaked into the atmosphere.

A conventional gas detection device of this type has a pair of bottles made of nickel, amberlite, etc. planted on a molded resin substrate with a diameter of 15 am and 8 degrees, with an interval of approximately 10 mm apart.
2■4 for these bottles! ! Wires extending from both ends of the coil that form the gas detection element are soldered or spot welded, and these coils, bottles, etc. are surrounded by an explosion-proof material made of stainless steel mesh or a dome of sintered metal particles. It has been inherited by.

However, in the case of conventional devices like this, when connecting wires to the gas detection element using the wire bonding method, there is a risk of deterioration due to moisture in the air if the wire is made of alumium, and if the wire is made of gold. and mechanical plugging can lead to electrical shorts and interrupted wires. Furthermore, the conventional type uses a do^-shaped O explosion-proof S material with sintered metal particles in a stainless steel mesh, so not only is the material itself noble, but the processing is complicated.

The present invention has been made for the purpose of eliminating the drawbacks of the conventional devices and providing a low-cost gas detection device that can be valuable with a sensor. A gas detection element is attached to the inner lead of this conductive path, and one row of gas detection elements is covered with an explosion-proof member formed of a mesh.

The present invention will be explained below with reference to embodiments shown in the drawings.

1 and 111 show a first practical example of the present invention, and Figures 1, B, Q, and D show the manufacturing type 111 of the gas detection device of the first embodiment.

The gas detection device of the present invention has a gas detection element 8 mounted on a film made of polyelectrolyte, #lase epoxy, etc.
As shown in Fig. 1, this rounded film 1 has <9 angles I! A window hole 8 of jAWt is formed. Thereafter, as shown in FIG. 1B, the surface of the film 10 is coated with K11, and on this adhesive 4, steel M5 and a foil 6 having an explosion-proof function and durability, such as stainless steel, are applied in this order. Laminate. Note that these O steel foils 5 and stainless steel foils 6 are attached to the window holes 8.
Make sure to cover the top as well. f7t, instead of this stainless steel foil 6, sputter stainless steel directly on t-W36+J7/
Alternatively, liquid phase plating with % or chromium or the like may be used.

Next, as shown in FIG. 1O, a photoresist baton is applied to the steel foil 6, the stainless steel foil 6, and the adhesive 4 so that the conductive path and the explosion-proof porous portion 8 are not electrically short-circuited.
A1 conductive path 7 and explosion-proof porous portion 8 are simultaneously formed by etching. This explosion-proof porous portion 8 has a large number of small holes e, s-. with a diameter of 100 degrees, and 94 holes are formed therein.

After that, as shown in diagram 111, the window hole 8 of the film l
The gas detection element 2 is stored inside, and this gas detection element! Formed on the electrode pad (not shown) of nine conductor bumps,
11% 11 of the inner lead 11 of the conductor and the inner lead 11 of the conductor, and the opening of the window hole which will be on the side of the j space detection tag J)m
l! 11.

The gas detection element 8 is formed on the surface of a substrate such as a silicon wafer for semiconductor devices, glass, or a carbon material, and has a structure by using a semicircular structure patterning technique. It is possible to increase the yield by reducing the probability of encountering defects, and to obtain paper with less fluctuation in quality, its low price, and its flexibility. The size of the gas detection element 2 is small 11Kt11. For example, a type of work that mounts a gas detection element type using an integrated circuit, such as an integrated circuit, is handled in the same way as an integrated four-way element (XO step).

Note that the conductive path is connected to a power line, an alarm, etc. (not shown).

The gas detection device of the first embodiment C described above is shown in the IIGI diagram and the Ka8 diagram, but when there is only one gas in the surrounding atmosphere.
When the gas leaks and enters through the small holes in the explosion-proof porous section 8 and the gas detection element g detects the presence of this gas, it immediately issues an alarm to prevent a major accident caused by the gas.

Further, even if the gas explodes due to the heat of the gas detection element g), this explosion occurs only inside the explosion-proof porous portion 8, and therefore does not result in a large explosion in the surrounding atmosphere.

In the gas detection device of the first embodiment, the film l stretched over the steel foil 51 can be manufactured at low cost by using a generally commercially available material, and the explosion-proof porous portion 8 is integrated. Therefore, the positioning process required in conventional gas detection devices is omitted, resulting in higher accuracy. Firstly, when connecting the gas detecting element 8, it does not damage the snowy surface of the gas detecting element, and furthermore, the overall thickness is a few digits, making it possible to install it on the wall indoors. , which is advantageous for vortaple type applications.

Figures 8 and 8B show a modification of the first embodiment described above, in which only the black film IK steel foil is bonded, a round IK is attached, and one conductive path is formed as shown in Figure ＠a. 7 and the explosion-proof hole part 8 by photo-etching).
After aS As shown in Figure 1, the explosion-proof porous sI is made of metal! Stainless steel sputtering I [uKyo CIE [
L, then s1, as shown in Figure DK, place the snow on the sensing element and turn it with a friend.

If you do this, it will be cheaper to make 11iK than the $111 actual model.

By the way, without using the above-mentioned 9 stainless steel sputtering, I was able to use Tsuru Tsurubo! It may also be used in a liquid phase with loam, etc.-0 No. 41, S, and a indicate the gs embodiment of the present invention.
Then, as shown in Figure 11411, only a steel foil sheet was glued to the film 1, cut into a round shape 11, and only the conductive pattern 7 was formed by photo-etching. Then, the gas detection element mold is housed in the window hole 8 of the film l, and the solder bangs to, to of the gas detection element 2 are crimped to the inner leads 11 and 11 of the conductive path, and further, as shown in @4@O. As shown, a flat explosion-proof stainless steel V smesh net 14T is placed on the steel W15 through a ninth layer (not shown) that prevents electrical short circuits between the conductive paths T.
Alternatively, an explosion-proof sintered metal plate (not shown) is attached using adhesive, solder, spot welding 15, etc. to cover the window hole 8. The opening of the window hole 8 is made aa by the plate t2, as in the case of the ninth first embodiment described above.

According to this configuration, it is possible to roll the conventional stainless steel messier into a casing, which is explosion-proof! Highly considerate.

FIG. 6 shows a fourth embodiment of the present invention, in which only the steel foil 6 is adhered to the film L, and the conductive path 7 is
After forming only the pattern by photoetching,
The gas detection element 2 is positioned outside the window hole 8, and its solder bumps to and to are connected to the inner leads 11 of the conductive path T.
, IIK crimped, and the gas detection element 2 is glued with resin.
After sealing, glue the opening of the window hole 1 of the film l with the film lK11*mts and attach it to the stainless steel mesh for Kusatsubaku with 14ml! IL, count with animals.

According to such a configuration, unless the gas passes through the window after passing through the net 14t, the gas blowout plate will not detect this gas, so that the surrounding atmosphere will not be detected. ! The gas detection element type will not react unless the gas in the air reaches a radius R of 1 degree, thus improving the reliability of gas detection.

FIG. 6 shows an example of the present invention, in which the structure of the above-mentioned 9th 1% trend example can be slightly modified.

That is, the thickness of the male sensing element type is made smaller than the thickness of the film 1 so that the gas sensing element type is completely contained within the window hole 8, and the plate body taK described above is replaced. Glue with FIL A I K111 adhesive 15 and attach the gas detection element s with the explosion-proof stainless steel mesh net 14
He overturns the window hole sOM on the omiI side and his friend comes out, ζO
It is desirable that the gas detection element type solder panda tO be made as small as possible so as not to obstruct the flow of air passing through the window hole 8.

According to such a configuration, since air flows through the window hole 8 in which the gas detection element 2 is housed, when gas is generated in the surrounding atmosphere, the gas detection element 2 instantly detects this gas. Detection speed increases.

FIG. 7 shows a sixth practical example of the present invention, which differs from the above-mentioned round can embodiment in that no window hole 8 is provided in the fill.

On the film 1, except for the central part, @6 is adhered with an adhesive 4, and on the upper surface of the film 1 where the steel foil 6 is not stretched, there is a gas detection element 2. is bonded with solder or resin 16], and this gas sensing element type electrode (not shown) and a conductive path are connected with bonding wires 17, 17 made of gold, platinum, aluminum, etc. with a diameter of 50μ or more. has been done. Further, the upper part of the gas detection element 8 is bonded to the steel foil 6 through a resin 18t and covered by an explosion-proof hood 19). Possible materials for the hood 19 include stainless steel mesh and sintered metal.

For such a configuration, the gas sensing element, the conductive path, and the OVm are bonded by wire bonding as described above, and the durability is inferior to that of each of the above-mentioned embodiments. Processes such as etching the steel Wi6 on the film I are not required, and the manufacturing process is cheaper.

That’s all! As is clear, the gas detection device according to the present invention forms a conductive path on a film, attaches a gas detection element to the inner lead of this conduction path, and connects the gas detection element to the inner lead of the conduction path.
Since the sides are covered with a mesh-formed explosion-proof member, it has the advantage of being compact, capable of generating electricity, and being able to be manufactured at a low cost.

Table Drawing O Simple 111 @ Figures 1 and 3 show the first practical example of the present invention, and B, O, and D are vertical cross-sectional front views showing the manufacturing process of the gas detection device. Figures 2 and 2 are plan views of the first diagram, Figures 8 and 8B are vertical cross-sectional front views showing the manufacturing process of the m-th row of snowflakes of the present invention, and Figures 4 and 4 are plane views of the present invention. A vertical cross-sectional front view showing the manufacturing process of the eighth embodiment, and FIGS. 6, 6, and 7 are vertical cross-sectional front views showing other embodiments of the present invention, respectively.

l...Film, 2...Gas detection element, 8...Window hole.

6...Steel foil, 6...Al<nium foil, 7.-41%
, 8... Prevention 1 porous part, 12... Plate body, 14... Net, 19... Hood.

Applicant Representative Kiyoshi 51 Trap Also 2 closed Also 3 ■ Also 4 ■

Claims (1)

[Claims] 1) A conductive path is formed on the film, a gas sensing element is attached to the inner lead of the conductive path, and one side of the gas sensing element is formed with a mesh and an explosion-proof part #9 is formed. A gas detection device characterized in that there are nine following effects. The gas detection device according to claim 1, wherein the gas detection element is mounted in a window hole formed in the film, and the opening of the window hole on the opposite side to the explosion-proof member is sealed with a sealing member. Device. 8) The gas sensing element is mounted outside the window hole opposite to the window hole formed in the film, and the gas sensing element o, i*s
2. The gas detection device according to claim 1, wherein the opening of the window hole on the side separated from the gas detection element is covered with an explosion-proof member. 4) The gas detection device according to any one of claims 1 to 8, wherein the explosion-proof member # is in the form of a flat plate.