JPS58144833U - Lamp position adjustment mechanism - Google Patents

Lamp position adjustment mechanism

Info

Publication number
JPS58144833U
JPS58144833U JP4175082U JP4175082U JPS58144833U JP S58144833 U JPS58144833 U JP S58144833U JP 4175082 U JP4175082 U JP 4175082U JP 4175082 U JP4175082 U JP 4175082U JP S58144833 U JPS58144833 U JP S58144833U
Authority
JP
Japan
Prior art keywords
position adjustment
adjustment mechanism
lamp position
lamp
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4175082U
Other languages
Japanese (ja)
Inventor
田和 邁
利光 三浦
隆 佐藤
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP4175082U priority Critical patent/JPS58144833U/en
Publication of JPS58144833U publication Critical patent/JPS58144833U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はランプ位置調整機構従来タイプの外観斜視図、
第2図は同従来タイプの構成図、第3図は同本考案に足
るタイプの外観斜視図、第4図は同本考案によるタイプ
の構成図、第5図は第3図のA−A’断面図、第6図は
第3図のB−B’断面図である。 1・・・ランプハウス、2・・・固定ベース、3・・・
Yテーブル、5・・・Xテーブル、11・・・ランプ、
14・・・排気孔付主軸、15・・・XYテーブル、1
7・・・フリーローラ(1)、20・・・X偏心カム、
29・・・断熱スペーサ、30・・・フリーローラ(2
)。
Figure 1 is a perspective view of the conventional lamp position adjustment mechanism.
Fig. 2 is a block diagram of the conventional type, Fig. 3 is an external perspective view of a type suitable for the present invention, Fig. 4 is a block diagram of the type according to the present invention, and Fig. 5 is A-A in Fig. 3. 6 is a sectional view taken along line BB' in FIG. 3. 1...Lamp house, 2...Fixed base, 3...
Y table, 5...X table, 11... lamp,
14... Main shaft with exhaust hole, 15... XY table, 1
7...Free roller (1), 20...X eccentric cam,
29...Insulating spacer, 30...Free roller (2
).

Claims (1)

【実用新案登録請求の範囲】 1 集光鏡又は集光レンズでランプからの光を集光し、
一定面積を一様な照度で照明する露光用ランプハウスに
於けるランプ位置調整機構で、一平面的でX方向、Y方
向及びその合成方向いずれにも移動可能な構造のXYテ
ーブルにより構成されたことを特徴とするランプ位置調
整機構。 2 実用新案登録請求の範囲第1.項記載において、機
構全体が露光用照明光源に対17、断熱構造に取り付け
られていることを特徴とするランプ位置調整機構。
[Scope of claims for utility model registration] 1. Concentrating the light from the lamp with a condensing mirror or condensing lens,
This is a lamp position adjustment mechanism in an exposure lamp house that illuminates a fixed area with uniform illuminance. It is composed of an XY table that is flat and movable in the X direction, Y direction, and their composite direction. A lamp position adjustment mechanism characterized by: 2 Scope of Claims for Utility Model Registration No. 1. 17. The lamp position adjustment mechanism according to item 17, wherein the entire mechanism is attached to an exposure illumination light source in a heat-insulating structure.
JP4175082U 1982-03-26 1982-03-26 Lamp position adjustment mechanism Pending JPS58144833U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4175082U JPS58144833U (en) 1982-03-26 1982-03-26 Lamp position adjustment mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4175082U JPS58144833U (en) 1982-03-26 1982-03-26 Lamp position adjustment mechanism

Publications (1)

Publication Number Publication Date
JPS58144833U true JPS58144833U (en) 1983-09-29

Family

ID=30052926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4175082U Pending JPS58144833U (en) 1982-03-26 1982-03-26 Lamp position adjustment mechanism

Country Status (1)

Country Link
JP (1) JPS58144833U (en)

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