JPS58143137U - electrostatic chuck - Google Patents
electrostatic chuckInfo
- Publication number
- JPS58143137U JPS58143137U JP3784282U JP3784282U JPS58143137U JP S58143137 U JPS58143137 U JP S58143137U JP 3784282 U JP3784282 U JP 3784282U JP 3784282 U JP3784282 U JP 3784282U JP S58143137 U JPS58143137 U JP S58143137U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic chuck
- holding surface
- heating body
- recess
- receiving heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Jigs For Machine Tools (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図および第２図は従来例を示す断面図、第３図はこ
の一実施例を示す断面図、第４図は上記第３図における
作用を説明するための断面図である。
１０・・・静電チャック本体、１１・・・誘電体、１２
・・・電極、１４・・・環状溝、１６・・・加熱器、１
７・・・縁体。1 and 2 are cross-sectional views showing a conventional example, FIG. 3 is a cross-sectional view showing one embodiment of the present invention, and FIG. 4 is a cross-sectional view for explaining the operation in FIG. 3. 10... Electrostatic chuck body, 11... Dielectric material, 12
... Electrode, 14 ... Annular groove, 16 ... Heater, 1
7... Limb.
Claims (3)
る半導体ウェハの直径範囲内の保持面に刻設された凹部
を有する吸着本体と、上記凹部に埋設される加熱体と、
上記凹部内に上記加熱体と接触もしくは非接触で設けら
れ上記加熱体による熱を受けて上記保持面より上方に浮
き上がり、上記加熱体の熱を受けない時点では上記保持
面より下方に位置する記憶合金とを備えることを特徴と
する静電チャック。(1) a suction body made of a dielectric material containing electrodes and having a recess carved in a holding surface within the diameter range of a semiconductor wafer held by electrostatic force; a heating body embedded in the recess;
A memory provided in the recess in contact or non-contact with the heating body and floating above the holding surface upon receiving heat from the heating body, and located below the holding surface when not receiving heat from the heating body. An electrostatic chuck characterized by comprising an alloy.
帰することを特徴とする実用新案登録請求の範囲第１項
記載の静電チャック。(2) The electrostatic chuck according to claim 1, wherein the memory alloy returns to its original shape when cooled by a forced cooling mechanism.
体からなり熱を受けて波状に保持面に突出することを特
徴とする実用新案登録請求の範囲第１項または第２項記
載の静電チャック。(3) When the concave groove is annular, the memory alloy consists of an annular body that extends along the groove and protrudes from the holding surface in a wavy manner upon receiving heat.Claim 1 or 2 of the Utility Model Registration Claims Electrostatic chuck as described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3784282U JPS58143137U (en) | 1982-03-19 | 1982-03-19 | electrostatic chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3784282U JPS58143137U (en) | 1982-03-19 | 1982-03-19 | electrostatic chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58143137U true JPS58143137U (en) | 1983-09-27 |
Family
ID=30049209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3784282U Pending JPS58143137U (en) | 1982-03-19 | 1982-03-19 | electrostatic chuck |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58143137U (en) |
-
1982
- 1982-03-19 JP JP3784282U patent/JPS58143137U/en active Pending
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