JPS58138930U - 真空密着焼付機 - Google Patents

真空密着焼付機

Info

Publication number
JPS58138930U
JPS58138930U JP3409182U JP3409182U JPS58138930U JP S58138930 U JPS58138930 U JP S58138930U JP 3409182 U JP3409182 U JP 3409182U JP 3409182 U JP3409182 U JP 3409182U JP S58138930 U JPS58138930 U JP S58138930U
Authority
JP
Japan
Prior art keywords
cover sheet
vacuum contact
plate
transparent plate
sealing member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3409182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS631311Y2 (enExample
Inventor
英男 佐藤
Original Assignee
株式会社キタムラ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社キタムラ filed Critical 株式会社キタムラ
Priority to JP3409182U priority Critical patent/JPS58138930U/ja
Publication of JPS58138930U publication Critical patent/JPS58138930U/ja
Application granted granted Critical
Publication of JPS631311Y2 publication Critical patent/JPS631311Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP3409182U 1982-03-11 1982-03-11 真空密着焼付機 Granted JPS58138930U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3409182U JPS58138930U (ja) 1982-03-11 1982-03-11 真空密着焼付機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3409182U JPS58138930U (ja) 1982-03-11 1982-03-11 真空密着焼付機

Publications (2)

Publication Number Publication Date
JPS58138930U true JPS58138930U (ja) 1983-09-19
JPS631311Y2 JPS631311Y2 (enExample) 1988-01-13

Family

ID=30045602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3409182U Granted JPS58138930U (ja) 1982-03-11 1982-03-11 真空密着焼付機

Country Status (1)

Country Link
JP (1) JPS58138930U (enExample)

Also Published As

Publication number Publication date
JPS631311Y2 (enExample) 1988-01-13

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