JPS58134298A - Lubricating device for vacuum chamber mechanism - Google Patents
Lubricating device for vacuum chamber mechanismInfo
- Publication number
- JPS58134298A JPS58134298A JP1433182A JP1433182A JPS58134298A JP S58134298 A JPS58134298 A JP S58134298A JP 1433182 A JP1433182 A JP 1433182A JP 1433182 A JP1433182 A JP 1433182A JP S58134298 A JPS58134298 A JP S58134298A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- vacuum
- chamber
- operating oil
- hydraulic oil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16N—LUBRICATING
- F16N7/00—Arrangements for supplying oil or unspecified lubricant from a stationary reservoir or the equivalent in or on the machine or member to be lubricated
- F16N7/14—Arrangements for supplying oil or unspecified lubricant from a stationary reservoir or the equivalent in or on the machine or member to be lubricated the lubricant being conveyed from the reservoir by mechanical means
- F16N7/16—Arrangements for supplying oil or unspecified lubricant from a stationary reservoir or the equivalent in or on the machine or member to be lubricated the lubricant being conveyed from the reservoir by mechanical means the oil being carried up by a lifting device
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- General Details Of Gearings (AREA)
Abstract
Description
【発明の詳細な説明】
本発8Aは、真空室内に配置され高速回転を行なう機構
への適用が好適表注油潤滑装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention 8A relates to a surface oil lubrication device suitable for application to a mechanism disposed in a vacuum chamber and rotating at high speed.
真空室内に72イネイールを設置し、外部の運動エネル
ギー或紘電気エネルギーを回転力に転換し、フライホイ
ールの同転慣性エネルギーとして貯蔵し、必要時にその
回転慣性エネルギーを運動エネルギー或ヒ電気エネルギ
ーに復元して使用する蓄エネルギーフライ示イール装置
がある。Install 72 inertia in a vacuum chamber, convert external kinetic energy or electrical energy into rotational force, store it as flywheel co-rotating inertial energy, and restore the rotational inertial energy to kinetic energy or electrical energy when necessary. There is an energy storage fly display device that can be used to store energy.
そして、フライホイールの回転慣性エネルギー量は、副
転数の自乗に比例するから7?イネイー★の同転数を増
大するために駆動軸と7ライ示イールとの間に歯車機構
を介在させである。And since the amount of rotational inertia energy of the flywheel is proportional to the square of the secondary rotation speed, it is 7? A gear mechanism is interposed between the drive shaft and the 7-line indicator wheel to increase the number of rotations of the engine.
歯車機構は、高速回転部への給油に便なる大めに、通例
、真空室外に置かれるが、歯車機構が高速回転と表るに
つれて空気抵抗によりその回転運動が妨げられ、そのた
めに回転速度が減衰したり、効率が低下したルするエネ
ルギー損失、すなわち風損が増大し、エネルギーの伝達
効率を低下させる等の欠点がある。The gear mechanism is usually placed outside the vacuum chamber in a large space to facilitate oil supply to the high-speed rotating parts, but as the gear mechanism rotates at high speed, its rotational movement is hindered by air resistance, which causes the rotation speed to decrease. There are drawbacks such as increased energy loss due to attenuation and decreased efficiency, that is, windage loss, which reduces energy transmission efficiency.
又潤滑を必要とする歯車4m!構を真空室内に設置した
場合には、通常の潤滑油を注油すると、真空室内の雰囲
気がその潤滑油O蒸気圧よ)低い丸めに潤滑油が蒸発し
て真空度が阻害され、従りて72イ示イールの回転抵抗
が増大して工ネルイーの伝達効率が低下する。There are also 4m gears that require lubrication! When the structure is installed in a vacuum chamber, if ordinary lubricating oil is applied, the atmosphere inside the vacuum chamber will be lower than the lubricating oil (O vapor pressure), and the lubricating oil will evaporate, impeding the degree of vacuum. The rotational resistance of the 72-point heel increases and the transmission efficiency of the rotary wheel decreases.
而して、本発明状真空室内に蓄エネルギー用のフライ本
イールと共に設置される歯車機構へO注油潤滑装置の提
供を目的としている。Therefore, the object of the present invention is to provide an O oil lubrication device for a gear mechanism installed together with a flywheel for storing energy in a vacuum chamber.
以下に、本発1l11o実施例について図面を参照して
説明する。An embodiment of the present invention will be described below with reference to the drawings.
固状、蓄エネルギーフライホイール装置に本発明を適用
した実施例を示し、la真空室、2は高速回転をして蓄
エネルギーに供されるフライホイールであ)、真9室1
壁に固定されたベアリング2m、2bKて支承されてい
る。3は72イホイーk 2 K固定された鋼製の小歯
車、4紘小歯車3と噛合する鋼製の大歯車であシ、真空
室NICK固定され大ペナリング4aにて支承される。An embodiment in which the present invention is applied to a solid-state energy storage flywheel device is shown.
It is supported by bearings 2m and 2bK fixed to the wall. 3 is a steel small gear fixed to 72 Ihoi k 2 K, and a steel large gear meshed with the 4-hole small gear 3, which is fixed to the vacuum chamber NICK and supported by a large penal ring 4a.
Wは入力用のモ―り、Uは出力用の発電機、戎は切換装
置であ゛′i載フラフライホイール2入力鉱モータ鰺を
切換装置12によシ大歯車40軸Kll絖して小歯車3
を増速回転させて75)イ本イーJ/2を回転さすとと
Kよルエネルギーが79イ本イール2の慣性エネルギー
として蓄積される。フライホイール2の慣性エネルギー
を放出する際には切換装置νによ〉大歯車4軸を発電機
Uに接続するととKよル、フライ本イーに2の慣性エネ
ルギーによ〉回転する小歯車3によシ大歯車今を回転速
度を低下させて回転させ発電機nの回転によシミ気エネ
ルギーとして外部へ帰えされる。5状小歯車3と大歯車
4との噛合部で注油潤滑を要する個所である。W is a motor for input, U is a generator for output, and 戎 is a switching device. Small gear 3
When the 75) A main eel J/2 is rotated at an increased speed, the K reel energy is accumulated as the inertial energy of the 79 A main eel 2. When the inertial energy of the flywheel 2 is released, the switching device ν is used to connect the 4 shafts of the large gear to the generator U. The large gear is then rotated at a reduced rotational speed, and the rotation of the generator n returns the energy to the outside as air energy. This is the area where the five-shaped small gear 3 and the large gear 4 mesh, which requires oil lubrication.
6は真空室l内に真空を発生させ維持すゐ真空ポンプで
あシ、作動油なポンプの潤滑と気密とに使用している。6 is a vacuum pump that generates and maintains a vacuum in the vacuum chamber 1, and is used for lubrication and airtightness of the hydraulic oil pump.
真空ポンプ6の吸気口は真空室lにバイブロaにて接続
してあシ、バイブロaには排油を清浄化させるオイルフ
ィルタ7が必要によ)設けられる。真空ポンプ6の排気
管6bゆf¥To ilb I y / ll’llj
、K *□−い、8□、よシ歇引された突気は作動油タ
ンク8内で作動油と分離されて作動油タンク8外に排出
される。The suction port of the vacuum pump 6 is connected to the vacuum chamber 1 by a vibro a, and the vibro a is provided with an oil filter 7 for cleaning drained oil. Exhaust pipe 6b of vacuum pump 6 To ilb I y / ll'llj
, K *□-I, 8□, The ejected air is separated from the hydraulic oil in the hydraulic oil tank 8 and discharged to the outside of the hydraulic oil tank 8.
そして作動油タンク8には配管9が設けられ、配管9の
他端開口9鳳は真空室l@壁を貫通して潤滑を要する噛
合部5に給油し得る如くに位置している。従って噛合部
5には作動油タンク8内と真空室l内との圧力差により
蒸気圧の低い作動油が潤滑油として放出給油される。潤
滑油の供給量は必要最少限であることが好ましく、配管
O他端開口9a径を適宜IC径し、又は配管9の途中に
調整弁を設ける等して調整される。The hydraulic oil tank 8 is provided with a pipe 9, and the other end opening 9 of the pipe 9 is located so as to penetrate through the wall of the vacuum chamber 1 and supply oil to the meshing portion 5 that requires lubrication. Therefore, hydraulic oil having a low vapor pressure is released and supplied to the meshing portion 5 as lubricating oil due to the pressure difference between the hydraulic oil tank 8 and the vacuum chamber l. The amount of lubricating oil supplied is preferably the minimum necessary amount, and is adjusted by appropriately adjusting the diameter of the opening 9a at the other end of the pipe O or by providing an adjustment valve in the middle of the pipe 9.
なお、配管9の作動油タンク8への取付位置は、真空室
lからの排出空気の混入しない個処に選定される。噛合
部5へ給油された作動油は、真空ポンプ60吸気口よシ
空気と共に吸引されて作動油タンク8へ帰えされる。Incidentally, the mounting position of the pipe 9 to the hydraulic oil tank 8 is selected at a location where the exhaust air from the vacuum chamber 1 will not be mixed in. The hydraulic oil supplied to the meshing portion 5 is sucked together with air through the intake port of the vacuum pump 60 and returned to the hydraulic oil tank 8.
又、噛合部5以外のベアリング2m 、2b等の潤滑部
へ拡配管9を分岐延長させて注油潤滑を行うこともでき
、本装置が、蓄エネルギーフライホイール装置の同転部
分への給油のみならず、広く真空室内OamlへO潤滑
装置として適用できることは勿論である。In addition, it is also possible to branch and extend the expansion pipe 9 to lubricating parts such as bearings 2m and 2b other than the meshing part 5 to perform oil lubrication. Of course, it can be widely applied as an O lubrication device to Oaml in vacuum chambers.
以上に説明しえ如く本発明に係る真空室内機構へO潤滑
装置によれと次ajIQ会効果を紘する。As explained above, the vacuum chamber mechanism according to the present invention is provided with an O lubrication device and the next ajIQ effect is obtained.
(イ)真空室内機構への潤滑油として、真空ポンプに使
用している蒸気圧orV%作動餉作動用するので真空家
内O必1!を真空度が維持される。(a) As a lubricating oil for the vacuum chamber mechanism, the steam pressure or V% operating valve used in the vacuum pump is used, so O is a must in the vacuum house! The degree of vacuum is maintained.
(@1111油として作動油を真空ポンプを通じて循環
使用するので、別個に給油装置を設ける場合に比し経済
的となるのみならず、作動油と潤滑油と紘必然的に同一
種油であ)、別種の油otss*o閑題紘回避される。(Since hydraulic oil is circulated as 1111 oil through a vacuum pump, it is not only more economical than installing a separate oil supply device, but also the hydraulic oil and lubricating oil are necessarily the same type of oil.) , another kind of oil otss*o Kandaihiro is avoided.
E紘、本発明に係る真空室内機構への潤滑装置を蓄エネ
ルギーフライ本イーに装置に適用した一部断面図である
。
五−真空室 2−72イネイール
2m、2b−ベアリング 3−小一車
番一大一車 5−噛合部 6−真空ポンプ8−作動油タ
ンク 9−配管 lO−モータU−発電機 キー切換装
置
代理人弁理士 前 ff11%I 之
・冨FIG. 1 is a partial sectional view in which the lubrication device for a vacuum chamber mechanism according to the present invention is applied to an energy storage frying device. 5-Vacuum chamber 2-72 Inail 2m, 2b-Bearing 3-Small wheel No. 1 large wheel 5-Meshing part 6-Vacuum pump 8-Hydraulic oil tank 9-Piping lO-Motor U-Generator Key switching device substitute Former Patent Attorney ff11%I Tomi
Claims (1)
設した蓄エネルギーフクイホイール装置の潤滑装置にお
いて、真空室内の真空を維持する真空ポンプと、真空ポ
ンプに接続される作動油タンクと、作動油タンク内の作
動油を真空室内の潤滑部に供給する配管とからなるとと
を特徴とする真空室内機構への潤滑装置。A lubrication system for an energy storage Fukui wheel device in which a flywheel and its driving gear mechanism are arranged in a vacuum chamber includes a vacuum pump that maintains the vacuum in the vacuum chamber, a hydraulic oil tank connected to the vacuum pump, and a hydraulic oil tank. A lubrication device for a vacuum chamber mechanism, comprising a pipe for supplying hydraulic oil in a tank to a lubrication section in a vacuum chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1433182A JPS58134298A (en) | 1982-02-02 | 1982-02-02 | Lubricating device for vacuum chamber mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1433182A JPS58134298A (en) | 1982-02-02 | 1982-02-02 | Lubricating device for vacuum chamber mechanism |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58134298A true JPS58134298A (en) | 1983-08-10 |
JPS6149559B2 JPS6149559B2 (en) | 1986-10-30 |
Family
ID=11858085
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1433182A Granted JPS58134298A (en) | 1982-02-02 | 1982-02-02 | Lubricating device for vacuum chamber mechanism |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58134298A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100435276C (en) * | 2004-12-22 | 2008-11-19 | 东京毅力科创株式会社 | Vacuum processing apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5125659U (en) * | 1974-08-14 | 1976-02-25 | ||
JPS53165983U (en) * | 1977-06-01 | 1978-12-26 |
-
1982
- 1982-02-02 JP JP1433182A patent/JPS58134298A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5125659U (en) * | 1974-08-14 | 1976-02-25 | ||
JPS53165983U (en) * | 1977-06-01 | 1978-12-26 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100435276C (en) * | 2004-12-22 | 2008-11-19 | 东京毅力科创株式会社 | Vacuum processing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS6149559B2 (en) | 1986-10-30 |
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