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Publication date
Application filed by 綜合カ−ボン株式会社filedCritical綜合カ−ボン株式会社
Priority to JP2722982UpriorityCriticalpatent/JPS58131964U/en
Publication of JPS58131964UpublicationCriticalpatent/JPS58131964U/en
Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed
(AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【図面の簡単な説明】[Brief explanation of the drawing]
第１図は実施例を示す斜視図である。
１は黒鉛ルツボ本体、２は溝である。
FIG. 1 is a perspective view showing an embodiment.
1 is a graphite crucible body, and 2 is a groove.
Claims (1)
【実用新案登録請求の範囲】[Scope of utility model registration request]半導体物質を収容する石英ルツボの外装用黒鉛ルツボに おいて、その外周に一体或はそれ以上の溝を設けてなる 半導体物質溶融用黒鉛ルツボ。A graphite crucible for melting a semiconductor material, which is an exterior graphite crucible for a quartz crucible that houses a semiconductor material, and is provided with one or more grooves on its outer periphery.
JP2722982U1982-03-011982-03-01
Graphite crucible for melting semiconductor materials
PendingJPS58131964U
(en)